23.160 - Vacuum technology

Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for spinning rotor gauges

ISO 24477:2025(Main)

This document defines terms related to spinning rotor gauges (SRGs)[2]-[4], specifies required parameters for SRGs, details the SRG calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.

Standard
11 pages
English language
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11-Mar-2025
23.160
ISO/TC 112

SIST EN 13160-2:2016+A1:2025(Main + Amendment)

Leak detection systems - Part 2: Requirements and test/assessment methods for pressure and vacuum systems

EN 13160-2:2016+A1:2024

This European Standard gives requirements and the corresponding test/assessment methods applicable to leak detection kits (leak detector) based on the measurement of pressure change. Leak detection kits are intended to be used with double skin, underground or above ground, pressurized or non-pressurized, tanks or pipework designed for water polluting liquids/fluids. The kits are usually composed of:
-   measuring device;
-   evaluation device;
-   alarm device;
-   pressure generator;
-   pressure relief device;
-   liquid stop device;
-   condensate trap.

Standard
53 pages
English language
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Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 6: Cryogenic vacuum pumps

ISO 21360-6:2023(Main)

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Standard
12 pages
English language
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05-Dec-2023
23.160
ISO/TC 112

Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 5: Non-evaporable getter (NEG) vacuum pumps

ISO 21360-5:2023(Main)

This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those: - with the shape of pill, disk, ring, strip, module, cartridge; - with pump structures; - and NEG coatings on inner surface of pipes and vacuum chamber. A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs. WARNING It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.

Standard
27 pages
English language
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27-Nov-2023
23.160
ISO/TC 112

Vacuum technology - Vacuum gauges - Characteristics for a stable ionisation vacuum gauge

ISO/TS 6737:2023(Main)

This document describes a special design of an ionisation vacuum gauge which has a well-defined ionising electron path length.[2] Due to the construction design, it leads to good measurement accuracy, long-term stability, as well as gauge independent and reproducible sensitivity for nitrogen and relative sensitivity factors[3][4]. It is designed for the measurement range of 10-6 Pa to 10-2 Pa. This document describes only those dimensions and potentials of the gauge head which are relevant for the electron and ion trajectories. This document does not describe the electrical components necessary to operate the ionisation vacuum gauge in detail. The gauge head can be operated by voltage and power sources and ammeters commercially available, but also by a controller specially built for the purpose of the operation of this gauge head. The ionisation vacuum gauge described in this document can be built by any experienced manufacturer of other ionisation vacuum gauges. It is not subject to intellectual property protection. It is assumed for this document that the applicant is familiar with both the physics and principles of ionisation vacuum gauges as well as high and ultra-high vacuum technology in general.

Technical specification
15 pages
English language
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27-Nov-2023
23.160
ISO/TC 112

ASTM F2647-07(2023)(Guide)

Standard Guide for Approved Methods of Installing a CVS (Central Vacuum System)

SIGNIFICANCE AND USE
4.1 The suggestions of this guide are intended to provide proper installation materials and practices to be used during the installation of a central-vacuum system.
SCOPE
1.1 This guide demonstrates proper methods for installing a central-vacuum system.
1.2 Appendix X1 contains additional sources of information that may be helpful to the user of this guide.
1.3 The values stated in inch-pound units are to be regarded as the standard. The values given in parentheses are for information only.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Guide
7 pages
English language
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31-Aug-2023
23.160
F11

ASTM D4991-07(2023)(Test Method)

Standard Test Method for Leakage Testing of Empty Rigid Containers by Vacuum Method

SIGNIFICANCE AND USE
5.1 Containers may be pressurized in accordance with this test method without modification to the closure or to the body of the container. This test method may be used for testing rigid containers intended for the transportation of some liquids by air in accordance with the ICAO TIs or in accordance with the UN TDG.
5.2 This test method establishes the point at which leakage commences, with a limit of approximately 95 kPa (13.8 psi) differential. See Test Method D3078 for flexible packages.
5.3 This test method may not be suitable for some packages, such as packages with paper cap seals, where the test fluid may rapidly deteriorate the packaging.
SCOPE
1.1 This test method covers the testing of empty containers for resistance to leakage under differential pressure conditions such as those which can occur during air transport. It is suitable for testing rigid containers intended for the transportation of some hazardous liquids in accordance with the United Nations Recommendations On The Transport Of Dangerous Goods (UN TDG) and the International Civil Aviation Organization Technical Instructions For The Safe Transport Of Dangerous Goods By Air (ICAO TIs).
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.3 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Standard
3 pages
English language
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14-Mar-2023
23.160
D10

Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for spinning rotor gauges

ISO 24477:2022(Main)

This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.

Standard
11 pages
English language
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04-Aug-2022
23.160
ISO/TC 112

Standard Practice for Determining Vacuum Chamber Gaseous Environment Using a Cold Finger

ASTM E834-21(Practice)

SIGNIFICANCE AND USE
5.1 When applied in the case in which there is no test item in the vacuum chamber (such as during bake-out operations), this procedure may be used to evaluate the performance of the vacuum chamber in relation to other data from the same or other chambers given that critical parameters (for example, length of exposure, temperature of the chamber and cold finger, anisotropy, and so forth) can be related.
5.2 The procedure can be used to evaluate the effects of materials found in the residue on items placed in the vacuum chamber.
5.3 The procedure can be used to describe the effect of a prior test on the residual gases within a vacuum chamber.
5.4 By selecting the time at which the coolant is introduced into the cold finger, the environment present during a selected portion of a test can be characterized. This can be used to determine the relative efficacy of certain vacuum chamber procedures such as bake-out.
5.5 The procedure may be used to define the outgassed products of a test item that condense on the cold finger.
5.6 The procedure may be used in defining the relative cleanliness of a vacuum chamber.
5.7 In applying the results of the procedure to the vacuum chamber in general, consideration must be given to the anisotropy of the molecular fluxes within the chamber.
5.8 The procedure is sensitive to both the partial pressures of the gases that form the condensibles and the time of exposure of the cold finger at coolant temperatures.
5.9 The procedure is sensitive to any losses of sample that may occur during the various transfer operations and during that procedure wherein the solvent is evaporated by heating it on a steam bath.
Note 1: Reactions between solvent and condensate can occur and would affect the analysis.
SCOPE
1.1 This practice covers a technique for collecting samples of materials that are part of the residual gas environment of an evacuated vacuum chamber. The practice uses a device designated as a “cold finger” that is placed within the environment to be sampled and is cooled so that constituents of the environment are retained on the cold-finger surface.
1.2 The practice covers a method for obtaining a sample from the cold finger and determining the weight of the material removed from the cold finger.
1.3 The practice contains recommendations as to ways in which the sample may be analyzed to identify the constituents that comprise the sample.
1.4 By determining the species that constitute the sample, the practice may be used to assist in defining the source of the constituents and whether the sample is generally representative of samples similarly obtained from the vacuum chamber itself.
1.5 This practice covers alternative approaches and usages to which the practice can be put.
1.6 The degree of molecular flux anisotropy significantly affects the assurance with which one can attribute characteristics determined by this procedure to the vacuum chamber environment in general.
1.7 The temperature of the cold finger significantly affects the quantity and species of materials collected.
1.8 Units—The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.9 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. For specific warning statements, see Section 8.
1.10 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Standard
5 pages
English language
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Standard
5 pages
English language
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31-Mar-2021
23.160
E21

ASTM E595-15(2021)(Test Method)

Standard Test Method for Total Mass Loss and Collected Volatile Condensable Materials from Outgassing in a Vacuum Environment

SIGNIFICANCE AND USE
5.1 This test method evaluates, under carefully controlled conditions, the changes in the mass of a test specimen on exposure under vacuum to a temperature of 125 °C and the mass of those products that leave the specimen and condense on a collector at a temperature of 25 °C.
5.2 The 24 h test time does not represent actual outgassing from years of operation, so a higher test temperature shorter time was selected to allow material comparisons with no intent to predict actual outgassing in service. The test temperature of 125 °C was assumed to be significantly above the expected operating temperature in service. If expected operating temperatures exceed 65 to 70 °C the test temperature should be increased. It is suggested that test temperature be at least 30 °C higher than expected maximum service temperature in order to provide material comparisons for TML and CVCM.
5.3 Comparisons of material outgassing properties are valid at 125 °C sample temperature and 25°C collector temperature only. Samples tested at other temperatures may be compared only with other materials which were tested at that same temperature.
5.4 The measurements of the collected volatile condensable material are also comparable and valid only for similar collector geometry and surfaces at 25 °C. Samples have been tested at sample temperatures from 50 to 400 °C and at collector temperatures from 1 to 30 °C by this test technique. Data taken at nonstandard conditions must be clearly identified and should not be compared with samples tested at 125 °C sample temperature and 25 °C collector temperature.
5.5 The simulation of the vacuum of space in this test method does not require that the pressure be as low as that encountered in interplanetary flight (for example, 10−12 Pa (10−14  torr)). It is sufficient that the pressure be low enough that the mean free path of gas molecules be long in comparison to chamber dimensions.
5.6 This method of screening materials is considered a conservativ...
SCOPE
1.1 This test method covers a screening technique to determine volatile content of materials when exposed to a vacuum environment. Two parameters are measured: total mass loss (TML) and collected volatile condensable materials (CVCM). An additional parameter, the amount of water vapor regained (WVR), can also be obtained after completion of exposures and measurements required for TML and CVCM.
1.2 This test method describes the test apparatus and related operating procedures for evaluating the mass loss of materials being subjected to 125 °C at less than 7 × 10−3 Pa (5 × 10−5 torr) for 24 h. The overall mass loss can be classified into noncondensables and condensables. The latter are characterized herein as being capable of condensing on a collector at a temperature of 25°C.
Note 1: Unless otherwise noted, the tolerance on 25 and 125 °C is ±1 °C and on 23 °C is ±2 °C. The tolerance on relative humidity is ±5 %.
1.3 Many types of organic, polymeric, and inorganic materials can be tested. These include polymer potting compounds, foams, elastomers, films, tapes, insulations, shrink tubings, adhesives, coatings, fabrics, tie cords, and lubricants. The materials may be tested in the “as-received” condition or prepared for test by various curing specifications.
1.4 This test method is primarily a screening technique for materials and is not necessarily valid for computing actual contamination on a system or component because of differences in configuration, temperatures, and material processing.
1.5 The criteria used for the acceptance and rejection of materials shall be determined by the user and based upon specific component and system requirements. Historically, TML of 1.00 % and CVCM of 0.10 % have been used as screening levels for rejection of spacecraft materials.
1.6 The use of materials that are deemed acceptable in accordance with this test method does not ensure that the system or component will rem...

Standard
9 pages
English language
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31-Mar-2021
23.160
E21

Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 2: Positive displacement vacuum pumps

ISO 21360-2:2020(Main)

This document specifies methods for measuring the volume flow rate, base pressure, water vapour tolerance, power consumption, and the lowest start-up temperature of positive displacement vacuum pumps, which discharge gas against atmospheric pressure and with a usual base pressure In this document, it is necessary to use the determinations of volume flow rate and base pressure specified in ISO 21360‑1. This document also applies to the testing of other types of pumps which can discharge gas against atmospheric pressure, e.g. drag pumps.

Standard
16 pages
English language
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14-Jun-2020
23.160
ISO/TC 112

Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 1: General description

ISO 21360-1:2020(Main)

This document specifies three methods for measuring the volume flow rate and one method each for measuring the base pressure, the compression ratio, and the critical backing pressure of a vacuum pump. The first method for measuring the volume flow rate (the throughput method) is the basic concept, in which a steady gas flow is injected into the pump while the inlet pressure is measured. In practice, the measurement of gas throughput may be complicated or inexact. For this reason, two other methods are specified which avoid the direct measurement of throughput. The second method for measuring the volume flow rate (the orifice method) is used when there is very small throughput at very small inlet pressures (under a high or ultra-high vacuum). It is based on measuring the ratio of pressures in a two-chamber test dome in which the two chambers are separated by a wall with a circular orifice. The third method for measuring the volume flow rate (the pump-down method) is well suited for automated measurement. It is based on the evacuation of a large vessel. The volume flow rate is calculated from two pressures, before and after a pumping interval, and from the volume of the test dome. Different effects, such as leak and desorption rates, gas cooling by nearly isentropic expansion during the pumping interval, and increasing flow resistance in the connection line between test dome and pump caused by molecular flow at low pressures, influence the results of the pressure measurement and the resulting volume flow rate. The choice of the required measurement methods depends on the properties of the specific kinds of vacuum pump, e.g. the measurement of the critical backing pressure is only necessary for vacuum pumps which need a backing pump. All data that are measured on a vacuum pump, but not specified in this document (e.g. measurement of power consumption), are defined in the specific pump standard.

Standard
28 pages
English language
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14-Jun-2020
23.160
ISO/TC 112

Vacuum technology - Vocabulary - Part 2: Vacuum pumps and related terms

ISO 3529-2:2020(Main)

This document gives definitions of vacuum pumps and related terms. It is a continuation of ISO 3529‑1 which defines general terms used in vacuum technology.

Standard
15 pages
English language
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Vacuum technology - Dimensions of clamped-type quick-release couplings

ISO 2861:2020(Main)

This document specifies the dimensions of the clamped-type quick-release couplings used in vacuum technology, as well as those of the O-rings and their carriers associated with these couplings, used to ensure vacuum tightness. NOTE The dimensions retained for the coupling diameter ensure the compatibility of the quick-release coupling with the corresponding vacuum flanges specified in ISO 1609[1].

Standard
6 pages
English language
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16-Feb-2020
23.160
ISO/TC 112

Vacuum technology - Dimensions of knife-edge flanges

ISO 3669:2020(Main)

This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.

Standard
7 pages
English language
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06-Feb-2020
23.160
ISO/TC 112

Vacuum technology - Dimensions of non-knife edge flanges

ISO 1609:2020(Main)

This document specifies the dimensions of non-knife-edge flanges and collars used in vacuum technology. The dimensions ensure interchangeability between bolted, clamped and rotatable flanges: a) whether the assembly be homogeneous (for example, bolted flanges or clamped flanges) or heterogeneous (for example, bolted flanges assembled with clamped flanges either by means of bolts or clamps or by means of bolts and rotatable flanges). b) whether the sealing rings used with the flanges be elastomer O-rings or metal sealing rings, provided that they are compatible with the linear sealing loads given in Annex A.

Standard
12 pages
English language
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09-Jan-2020
23.160
ISO/TC 112

Vacuum technology - Mounting dimensions of pipeline fittings - Part 2: Knife-edge flange type

ISO 9803-2:2020(Main)

This document specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of knife-edge flanges for nominal bores from 16 mm to 200 mm.

Standard
4 pages
English language
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08-Jan-2020
23.160
ISO/TC 112

Vacuum technology - Mounting dimensions of pipeline fittings - Part 1: Non knife-edge flange type

ISO 9803-1:2020(Main)

This document specifies mounting dimensions for vacuum pipeline fittings (elbows, tees and crosses) of non knife-edge flange for nominal bores from 10 mm to 250 mm of the R5 series.

Standard
4 pages
English language
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06-Jan-2020
23.160
ISO/TC 112

Vacuum technology - Right-angle valve - Dimensions and interfaces for pneumatic actuator

ISO 21358:2020(Main)

This document defines dimensions of right-angle valves that are compatible with the mounting dimensions of elbows defined in ISO 9803-1 and ISO 9803-2. This document covers right-angle valves with flanges defined in ISO 2861, ISO 1609 and ISO 3669.

Standard
3 pages
English language
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06-Jan-2020
23.160
ISO/TC 112

Vacuum technology - Vocabulary - Part 1: General terms

ISO 3529-1:2019(Main)

This document defines general terms used in vacuum technology. It gives theoretical definitions as precise as possible, bearing in mind the need for use of the concept in practice.

Standard
10 pages
English language
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Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

ISO 20146:2019(Main)

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

Standard
16 pages
English language
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Standard
17 pages
French language
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30-Jan-2019
23.160
ISO/TC 112

Vacuum technology - Standard methods for measuring vacuum pump performance - Part 3: Specific parameters for mechanical booster vacuum pumps

ISO 21360-3:2019(Main)

This document specifies methods and special requirements for measuring the maximum tolerable pressure difference, effective compression ratio, compression ratio with zero throughput and overflow valve pressure difference of mechanical booster vacuum pumps. It applies to mechanical booster vacuum pumps employed for medium vacuum or rough vacuum applications including gas-cooled mechanical booster vacuum pump and multiple mechanical booster vacuum pump systems. It covers particular characteristics of mechanical boosters that are different from those of the usual positive displacement vacuum pumps. Maximum tolerable pressure difference Δpmax, effective compression ratio Keff, compression ratio with zero throughput K0 and overflow valve pressure difference Δp1 are special characteristics of the performance of mechanical booster vacuum pumps.

Standard
14 pages
English language
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Standard
15 pages
French language
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29-Jan-2019
23.160
ISO/TC 112

Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps

ISO 21360-4:2018(Main)

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those - with mechanical or magnetic bearings; - with or without an additional drag stage(s) or other pumping stages on the shaft; - with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance. The following completes the performance characteristics: - information about throughputs and backing pressure of the turbomolecular vacuum pump; - the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).

Standard
10 pages
English language
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Standard
10 pages
French language
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30-Jul-2018
23.160
ISO/TC 112

Vacuum technology - Vacuum gauges - Procedures to measure and report outgassing rates

ISO/TS 20177:2018(Main)

This document describes procedures to measure outgassing rates from components designed for vacuum chambers and of vacuum chambers as a whole. The outgassing rates are expected to be lower than 10−5 Pa m3 s−1 (10−2 Pa L s−1) at 23 °C and to emerge from devices that are suitable for high or ultra-high vacuum applications. The molecular mass of the outgassing species or vapour is below 300 u. The upper limit 10−5 Pa m3 s−1 of total outgassing rate is specified independent of the size, the total surface area and texture or state of the outgassing material. If a specific outgassing rate (outgassing rate per area) is determined, the area is not a specific surface area including the surface roughness, but the nominal geometrical one. When it is difficult to determine the nominal geometrical surface area of the sample, such as powders, porous materials, very rough surfaces, or complex devices, mass specific outgassing rate (e.g. outgassing rate per gram) is used. For many practical applications, it is sufficient to determine the total outgassing rate. If a measuring instrument, which sensitivity is gas species dependent, is used, the total outgassing rate are given in nitrogen equivalent. In cases, however, where the total outgassing rate is too high, the disturbing gas species is identified, and its outgassing rate is measured in order to improve the sample material. This document covers both cases. Some outgassing molecules can adsorb on a surface with a residence time that is much longer than the total time of measurement. Such molecules cannot be detected by a detecting instrument when there is no direct line of sight. This is considered as a surface effect and surface analytical investigations are more useful than general outgassing rate measurements considered here. Also, molecules that are released from the surface by irradiation of UV light or X-rays, are out of the scope of this document. This document is written to standardize the measurement of outgassing rates in such a way that values obtained at different laboratories and by different methods are comparable. To this end, for any of the described methods, traceability is provided to the System International (SI) for the most important parameters of each method and according to the metrological level. Outgassing rate measurements by mass loss, which were mainly developed for testing of spacecraft and satellite materials, are not gas specific. For acceptable measurement times, mass loss measurements require significantly higher outgassing rates (>10−5 Pa m3 s−1) than typical for high and ultrahigh vacuum components. Also, it is not possible to measure the sample in situ due to the weight of the vacuum chamber, since the balances are not vacuum compatible. For these reasons, mass loss measurements are not considered in this document. It is assumed that the user of this document is familiar with high and ultra-high vacuum technology and the corresponding measuring instrumentation such as ionization gauges and quadrupole mass spectrometers.

Technical specification
39 pages
English language
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Technical specification
39 pages
English language
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11-Jun-2018
23.160
ISO/TC 112

ASTM E2734/E2734M-10(2018)(Specification)

Standard Specification for Dimensions of Knife-Edge Flanges

SCOPE
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.
1.4 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Technical specification
4 pages
English language
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31-May-2018
23.160
E42

Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement

ISO/TS 20175:2018(Main)

This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z This document is not applicable to QMSs with other ion sources, such as chemical ionization, photo-ionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials. It is well known from published investigations on the metrological characteristics of quadrupole mass spectrometers that their indications of partial pressures depend significantly on the settings of the instrument, the total pressure, and the composition of the gas mixture. For this reason, it is not possible to calibrate a quadrupole mass spectrometer for all possible kinds of use. The characterization procedures described in this document cover the applications of continuous leak monitoring of a vacuum system, leak rate measurement with tracer gas, residual gas analysis and outgassing rate measurements. The user can select that characterization procedure that best suits his or her needs. These characterization procedures can also be useful for other applications. It is also well known that the stability of several parameters of quadrupole mass spectrometers, in particular sensitivity, are rather poor. Therefore, when a parameter has been calibrated, it needs frequent recalibration when accuracy is required. For practical reasons this can only be accomplished by in situ calibrations. To this end, this document not only describes how a quadrupole mass spectrometer can be calibrated by a calibration laboratory or a National Metrological Institute with direct traceability to the System International (SI), but also how calibrated parameters can be frequently checked and maintained in situ. By their physical principle, quadrupole mass spectrometers need high vacuum within the instrument. By reducing dimensions or by special ion sources combined with differential pumping the operational range can be extended to higher pressures, up to atmospheric pressure. This document, however, does not include quadrupole mass spectrometers with differential pumping technology. Therefore, it does not cover pressures exceeding 1 Pa on the inlet flange of the quadrupole mass spectrometer. This document does not describe how the initial adjustment of a quadrupole mass spectrometer by the manufacturer or by a service given order by the manufacturer should be made. The purpose of such an initial adjustment is mainly to provide a correct m/z scale, constant mass resolution or constant transmission, and is very specific to the instrument. Instead, it is assumed for this document that a manufacturer's readjustment procedure exists which can be carried on-site by a user. This procedure is intended to ensure that the quadrupole mass spectrometer is in a well-defined condition for the characterization. It is the intention of this document that the user gets the best possible metrological quality from his quadrupole mass spectrometer. From investigations it is known that in most cases this can be achieved in the so called "scan mode". The bar graph may also be of an adequate quality depending on the software used for evaluation of the data taken by the quadrupole mass spectrometer. The trend mode, however, often involves the additional uncertainty that a shift of the peak value position on the mass scale causes a shift in ion current. For this reason, the scan mode is preferable for most of the measurement procedures of this document. It is not the intent of this document that all the parameters described be determined for each quadrupole mass spectrometer. However, it is intended that the value of a parameter addressed in this document be determined according to the procedure described in this document if it is given or measured (e.g. for an inspection test). It is assumed for this document that the applicant

Technical specification
23 pages
English language
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02-May-2018
23.160
ISO/TC 112

Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for Pirani gauges

ISO 19685:2017(Main)

ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.

Standard
13 pages
English language
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19-Sep-2017
23.160
ISO/TC 112

Vacuum technology - Vocabulary - Part 3: Total and partial pressure vacuum gauges

ISO 3529-3:2014(Main)

ISO 3529-3:2014 gives definitions of total and partial pressure vacuum gauges. lt is a continuation of ISO 3529‑1, which defines general terms used in vacuum technology, and of ISO 3529‑2, which gives definitions of vacuum pumps and related terms.

Standard
10 pages
English language
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Standard
10 pages
English language
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Standard
10 pages
French language
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Standard
10 pages
French language
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SIST EN 1012-3:2014(Main)

Compressors and vacuum pumps - Safety requirements - Part 3: Process compressors

EN 1012-3:2013

This European Standard is applicable to process gas compressors and process gas compressor units having an operating pressure greater than 0,5 bar (gauge), an input shaft power greater than 0,5 kW and designed to compress all gases other than air, nitrogen or inert gases which are covered in Part 1. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of process gas compressors and process gas compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacturer (see Clause 4).
This part of EN 1012 includes under the general term compressor units those machines which comprise:
-   the compressor;
-   a drive system including the prime mover;
-   any component or device supplied which is necessary for operation.
This part of EN 1012 is not applicable to compressors which are manufactured before the date of publication of this document by CEN.
The requirements of this European Standard do not take into account the interaction between the compressor/compressor unit and other processes carried out on site.
Excluded are:
-   refrigerant compressors used in refrigerating systems or heat pumps for which the safety requirements are given in EN 60335-2-34 or EN 12693;
-   the specification of performance levels and/or safety integrity levels for safety related parts of control systems.
Performance levels and/or safety integrity levels are an important aspect of compressor design and should be determined by the manufacturer and the user based on a risk assessment (see Introduction).
This European Standard does not cover those safety aspects of road transport dealt with by EC legislation for trailers.

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Compressors and vacuum pumps - Safety requirements - Part 3: Process compressors

EN 1012-3:2013(Main)

SIST EN 1012-3:2014

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Compressors and vacuum pumps - Safety requirements - Part 1: Air compressors

EN 1012-1:2010(Main)

SIST EN 1012-1:2010

This part of EN 1012 is applicable to compressors and compressor units having an operating pressure greater than 0,5 bar and designed to compress air, nitrogen or inert gases. This document deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of compressors and compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacturer (see Clause 4).
This part of EN 1012 includes under the general term compressor units those machines which comprise:
-   the compressor;
-   a drive system;
-   any component or device which is necessary for operation.
This part also covers the general requirements relating to process gas compressors; for specific requirements see prEN 1012-3 which applies.
This part covers compressors driven by any power media, including battery powered and which are fitted in or used with motor vehicles.
This part of EN 1012 does not cover requirements for compressors used in potentially explosive atmospheres.
This part of EN 1012 is not applicable to compressors which are manufactured before the date of publication of this document by CEN.

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Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers

ISO 14291:2012(Main)

ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement. ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically /z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.

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14 pages
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05-Jul-2012
23.160
ISO/TC 112

Vacuum gauges - Calibration by direct comparison with a reference gauge

ISO 3567:2011(Main)

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14 pages
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14 pages
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08-Dec-2011
23.160
ISO/TC 112

Vacuum technology - Vacuum gauges - Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge

ISO 27893:2011(Main)

ISO 27893:2011 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567. ISO 27893:2011 describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with the guidelines given in ISO 27893:2011 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used. ISO 27893:2011 defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.

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15 pages
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15 pages
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09-Aug-2011
23.160
ISO/TC 112

Compressors and vacuum pumps - Safety requirements - Part 1: Air compressors

SIST EN 1012-1:2010

EN 1012-1:2010

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Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown torque

ISO 27892:2010(Main)

ISO 27892:2010 specifies a method for the measurement of rapid shutdown torque (destructive torque) of turbomolecular pumps in which gas momentum is produced by axial flow type blades and/or helical channels. The main forces leading to failure of turbomolecular pumps are torques around the rotational axis. Other insignificant forces and moments that can occur lie outside the scope of ISO 27892:2010. There are two kinds of failure: rapid shutdown by whole burst and softer crash of rotor. ISO 27892:2010 applies to both. The same measurement method can be used for turbomolecular pumps and molecular drag pumps.

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16 pages
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18 pages
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18 pages
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21-Jan-2010
23.160
ISO/TC 112

Acoustics - Noise test code for compressors and vacuum pumps - Engineering method (Grade 2) (ISO 2151:2004)

EN ISO 2151:2008(Main)

SIST EN ISO 2151:2008

ISO 2151:2004 specifies methods for the measurement, determination and declaration of the noise emission from portable and stationary compressors and vacuum pumps. It prescribes the mounting, loading and working conditions under which measurements are to be made, and includes measurement or determination of the noise emission expressed as the sound power level under specified load conditions and the emission sound pressure level at the work station under specified load conditions.
It is applicable to compressors for various types of gases, oil-lubricated air compressors, oil-flooded air compressors, water injected air compressors, oil-free air compressors, compressors for handling hazardous gases (gas compressors), compressors for handling oxygen, compressors for handling acetylene, high pressure compressors (over 40 bar/4 MPa), compressors for application at low inlet temperatures (i.e. below 0 °C), large compressors (over 1 000 kW input power), portable and skid-mounted air compressors, and rotary positive displacement blowers and centrifugal blowers and exhausters in applications of 2 bar/0,2 MPa or less. It is not applicable to compressors for gases other than acetylene having a maximum allowable working pressure of less than 0,5 bar/0,05 MPa, refrigerant compressors used in refrigerating systems or heat pumps, nor to hand-held portable compressors.

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Vacuum technology - Valves - Leak test

ISO 27895:2009(Main)

ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10-5 Pa m3/s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications. A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.

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11 pages
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29-Nov-2009
23.160
ISO/TC 112

Vacuum technology - Vacuum gauges - Specifications for hot cathode ionization gauges

ISO 27894:2009(Main)

ISO 27894:2009 defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.

Standard
19 pages
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29-Nov-2009
23.160
ISO/TC 112

SIST EN 1012-2:2001+A1:2009(Main)

Compressors and vacuum pumps - Safety requirements - Part 2: Vacuum pumps

EN 1012-2:1996+A1:2009

This standard is applicable to all vacuum pumps, vacuum pump combinations and vacuum pumping systems. The standard lists the significant hazards associated with vacuum pumps and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of vacuum pumps during their foreseeable life and subsequent disposal.
The scope does not include pumps designed to pump continuously on open systems where the pump inlet pressure is above 75 kPA (750 mbar) absolute, i.e. vacuum cleaners, ventilation fans).
Vacuum pumps intended for use in special applications shall also comply with any specific standards relating to those applications.

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EN 1012-2:1996+A1:2009(Main)

Compressors and vacuum pumps - Safety requirements - Part 2: Vacuum pumps

SIST EN 1012-2:2001+A1:2009

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SIST EN ISO 2151:2008(Main)

Acoustics - Noise test code for compressors and vacuum pumps - Engineering method (Grade 2) (ISO 2151:2004)

EN ISO 2151:2008

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Vapour vacuum pumps - Measurement of performance characteristics - Part 1: Measurement of volume rate of flow (pumping speed)

ISO 1608-1:1993(Main)

The measurements deal with diffusion pumps, ejector pumps, and booster pumps, i.e. pumps capable of operation in both the molecular and laminar flow regions.

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3 pages
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3 pages
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3 pages
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24-Nov-1993
23.160
ISO/TC 112

Vapour vacuum pumps - Measurement of performance characteristics - Part 2: Measurement of critical backing pressure

ISO 1608-2:1989(Main)

The considered method of measurement deals with vapours jet vacuum pumps, diffusions pumps and diffusion-ejector pumps. The dependence of the performance of these pumps on the backing pressure can only be completely described be means of a curve relating the inlet and backing pressure over the range of operation. The recommended test dome and the principle of the test equipment are illustrated.

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3 pages
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3 pages
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3 pages
French language
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29-Nov-1989
23.160
ISO/TC 112

Vacuum technology - Mass-spectrometer-type leak-detector calibration

ISO 3530:1979(Main)

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

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10 pages
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oSIST prEN 13160-2:2025(Main)

Leak detection systems - Part 2: Requirements and test/assessment methods for pressure and vacuum systems

prEN 13160-2

This document gives requirements and the corresponding test/assessment methods applicable to leak detector based on the measurement of pressure change. Leak detectors are intended to be used with double skin, underground or above ground, pressurized or non-pressurized, tanks or pipe designed for water polluting liquids/fluids. The leak detectors are usually composed of:
-   measuring device;
-   evaluation device;
-   alarm device;
-   pressure generator;
-   pressure relief device;
-   liquid stop device;
-   condensate trap.

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oSIST prEN ISO 18623-1:2023(Main)

Air compressors and compressed air systems - Part 1: Air compressor safety requirements (ISO/DIS 18623-1:2023)

prEN ISO 18623-1

This part 1 of ISO 18623 is applicable to compressors and compressor units having an operating pressure greater than 0,5 bar and designed to compress air, nitrogen or inert gases. This standard deals with all significant hazards, hazardous situations and events relevant to the design, installation, operation, maintenance, dismantling and disposal of compressors and compressor units, when they are used as intended and under conditions of misuse which are reasonably foreseeable by the manufacturer (see Clause 4).
This part of ISO 18623 includes under the general term compressor units those machines which comprise:
- the compressor;
- a drive system;
- any component or device which is necessary for operation.
This part covers compressors driven by any power media, including battery powered and which are fitted in or used with motor vehicles.
The significant hazards dealt with in the standard are identified in Annex A.
It does not cover requirements for compressors and compressor units used in potentially explosive atmospheres.
It is not applicable to compressors and compressor units which are manufactured before the date of publication of this standard.
It does not cover compressors and compressor units for processing petroleum, petrochemicals, or chemicals within the scope of ISO/TC 67.

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SIST EN 1012-2:2001/kprA1:2009(Amendment)

Compressors and vacuum pumps - Safety requirements - Part 2: Vacuum pumps

EN 1012-2:1996/prA1

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oSIST prEN 1012-3:2008(Main)

Compressors and vacuum pumps - Safety requirements - Part 3: Process compressors

prEN 1012-3

This part of EN 1012 is applicable to compressors having an operating pressure greater than 0,5 bar and designed to utilise all gases other than air, nitrogen or inert gases which are covered in part 1. The standard lists the significant hazards associated with compressors and specifies safety requirements applicable to the design, installation, operation, maintenance and dismantling of compressors during their foreseeable lifetime and subsequent disposal. This part of EN 1012 includes under the general term compressors, those machines which comprise; - the compressor itself - a prime mover - any component or device supplied which is necessary for safe operation of the compressor. In addition it applies to partly completed compressors having a compressor in combination with some of these components as well as compressor assemblies operating in combination. Excluded are refrigerant compressors used in refrigerating systems or heat pumps as defined in EN 378-1.

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