Vacuum technology - Dimensions of knife-edge flanges

This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.

Technique du vide — Dimensions des brides à guillotine

General Information

Status
Published
Publication Date
06-Feb-2020
Technical Committee
ISO/TC 112 - Vacuum technology
Current Stage
9092 - International Standard to be revised
Start Date
30-Aug-2023
Completion Date
13-Dec-2025

Relations

Effective Date
23-Apr-2020

Overview

ISO 3669:2020 - Vacuum technology - Dimensions of knife-edge flanges specifies the dimensional requirements for fixed or rotatable bolted knife-edge flanges (often known as ConFlat® or CF-style flanges) used in vacuum systems from atmospheric pressure down to ultra-high vacuum levels (as low as 10−11 Pa). The third edition (2020) consolidates a single series of standard flange dimensions, includes detailed knife-edge sealing profiles, and provides tables and figures for flange and gasket sizes (nominal bores from common CF sizes through larger CF sizes).

Key topics and technical requirements

  • Dimensional specifications: Precise outside diameters, bolt circle, bolt-hole positions, flange thickness, knife-edge geometry and seal recess dimensions are defined in figures and tables (see Figures 1–4, Table 1 and Table 2).
  • Knife-edge sealing profile: Triangular knife-edge detail for metal-to-metal seals is specified; a correction in this edition updates the vertical distance from the knife-edge to the flange surface to 0.65 ± 0.05 mm.
  • Gasket dimensions: Recommended metal gasket outside diameters and tolerances are given (Table 2). The standard notes that gaskets should be softer than the flange to avoid dulling the knife-edge.
  • Materials guidance: Material selection should suit service temperature, sealing needs, corrosion resistance and magnetic properties. Austenitic stainless steel and OFHC copper gaskets are commonly used, but the standard does not limit material choice.
  • Bolt hole options and threads: Flanges may use clearance or tapped holes; both metric and English (imperial) thread forms commonly in use are addressed.
  • Leak check grooves: Recommended geometry and equidistant positioning between bolt holes to facilitate leak checking.

Applications and users

ISO 3669:2020 is essential for:

  • Vacuum engineers and system integrators designing UHV and high-vacuum systems
  • Manufacturers and machinists producing vacuum flanges and vacuum chambers
  • Research labs (physics, accelerator facilities, fusion research), semiconductor fabs, analytical instrument OEMs and maintenance teams Practical benefits include ensuring flange interchangeability, reliable metal seals for bakeable UHV joints, and consistent specifications for procurement and quality control.

Related standards

  • ISO 1609 (dimensions of non-knife edge flanges)
  • ISO 965-1 (metric screw thread tolerances)
  • ISO 286 (tolerances on linear sizes) Consult these referenced documents for complementary thread, tolerance and flange-type requirements.

Keywords: ISO 3669:2020, knife-edge flanges, ConFlat, vacuum technology, UHV flanges, metal gasket, flange dimensions, leak check groove, flange materials.

Standard

ISO 3669:2020 - Vacuum technology — Dimensions of knife-edge flanges Released:5/20/2020

English language
7 pages
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Frequently Asked Questions

ISO 3669:2020 is a standard published by the International Organization for Standardization (ISO). Its full title is "Vacuum technology - Dimensions of knife-edge flanges". This standard covers: This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.

This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum systems for pressures ranging from atmospheric to as low as 10−11 Pa.

ISO 3669:2020 is classified under the following ICS (International Classification for Standards) categories: 23.160 - Vacuum technology. The ICS classification helps identify the subject area and facilitates finding related standards.

ISO 3669:2020 has the following relationships with other standards: It is inter standard links to ISO 3669:2017. Understanding these relationships helps ensure you are using the most current and applicable version of the standard.

You can purchase ISO 3669:2020 directly from iTeh Standards. The document is available in PDF format and is delivered instantly after payment. Add the standard to your cart and complete the secure checkout process. iTeh Standards is an authorized distributor of ISO standards.

Standards Content (Sample)


INTERNATIONAL ISO
STANDARD 3669
Third edition
2020-02
Corrected version
2020-05
Vacuum technology — Dimensions of
knife-edge flanges
Technique du vide — Dimensions des brides à guillotine
Reference number
©
ISO 2020
© ISO 2020
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2020 – All rights reserved

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 1
5 Requirements . 2
5.1 Materials . 2
5.1.1 Flange . 2
5.1.2 Bolt holes . 2
5.1.3 Grooves . . 2
5.1.4 Gasket . 2
5.2 Dimensions . 2
Bibliography . 7
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared by Technical Committee ISO/TC 112, Vacuum technology.
This third edition cancels and replaces the second edition (ISO 3669:2017), of which it constitutes a
minor revision. The changes compared to the previous edition are as follows:
— the title has been updated;
— Clause 4 and Table 1: “l ” has changed to “l – Depth for pipe connection”;
7 7
— Reference [4] has been updated.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
This corrected version of ISO 3669:2020 incorporates the following correction:
— In Figure 2, the vertical dimension from the knife-edge to the surface of the flange has been corrected
from "0,98" to "0,65 ±0,05".
iv © ISO 2020 – All rights reserved

Introduction
This document is a minor revision of the second edition (ISO 3669:2017) and contains significant
technical changes from the first edition (ISO 3669:1986), which defined two series of “bakeable”
flanges:
— as a preferred series, the main dimensions of which ensure compatibility with already standardized
non-bakeable flanges (see ISO 1609);
— a secondary series corresponding to flanges in common use.
This document specifies only one series and is no longer dependent on the preferred number. Effectively,
the preferred series has been made obsolete, thereby promoting the secondary series to be the one and
only set of specified dimensions. Furthermore, several dimensions in what was formerly the secondary
series, have been modified to correspond to flanges in common use. Finally, detailed dimensions for the
knife-edge sealing profile have been incorporated.
1)
It is noted, however, that the original ConFlat® flange dimensions and tolerances, as developed by
Varian, were not available during the development stage of this specification. The intent of this document
is to ensure interchangeability of flanges. It is reasonable to accept that flanges manufactured to the
original Varian specifications are compatible with flanges manufactured according to this document,
even though they might not fall within all tolerances.
1) ConFlat® is the trademark of a product supplied by Varian, Inc. This information is given for the convenience of
users of this document and does not constitute an endorsement by ISO of the product named. Equivalent products
may be used if they can be shown to lead to the same results.
INTERNATIONAL STANDARD ISO 3669:2020(E)
Vacuum technology — Dimensions of knife-edge flanges
1 Scope
This document specifies the dimensions of fixed or rotatable bolted knife-edge flanges used in vacuum
−11
systems for pressures ranging from atmospheric to as low as 10 Pa.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC mainta
...

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ISO 3669:2020は、真空技術におけるナイフエッジフランジの寸法を規定した重要な標準である。この文書の範囲は、大気圧から10−11 Paまでの圧力条件下で使用される固定式または回転式のボルト締結型ナイフエッジフランジに関するものであり、真空システムにおける設計および製造の基準を提供する。 ISO 3669:2020の主な強みは、その精密な寸法規格にあり、ユーザーが信頼性の高い真空環境を維持できるように理解しやすく明確に定義されている点にある。また、異なるシステムでの互換性を保証することで、エンジニアや技術者の作業効率を向上させる役割も果たす。真空技術が進化する中で、この標準は切実に求められる品質基準を示しており、各業界での利用価値が高い。 さらに、ISO 3669:2020は、国際的に承認された標準であるため、世界中のさまざまな真空システムにおいて、一貫した品質管理と製品の信頼性を提供する基盤を形成している。このように、真空システムの設計者や製造者にとって、この標準は欠かせないものであり、技術革新に対応するための指針ともなる。 全体として、ISO 3669:2020は、真空技術におけるナイフエッジフランジの設計と製造に関する基本的なガイドラインを提供し、圧力範囲に応じた寸法の標準化を通じて、業界全体の発展に寄与するものである。

ISO 3669:2020은 진공 기술 분야에서 중요한 기준으로, 고정형 또는 회전형 볼트식 나이프 엣지 플랜지의 치수를 구체적으로 규정하고 있습니다. 이 표준의 적용 범위는 대기압에서 10−11 Pa에 이르는 극저압 범위의 진공 시스템에 사용되는 플랜지에 대한 것입니다. 이 문서의 강점은 정확한 치수 및 설계 기준을 제공하여 사용자가 호환 가능한 부품을 손쉽게 선택할 수 있도록 하고, 진공 시스템의 효율성을 높이는 데 기여한다는 점입니다. 또한, 고정형 플랜지와 회전형 플랜지의 다양한 유형에 대한 치수를 명확히 규명함으로써, 사용자는 시스템 설계 시 더욱 일관적이고 신뢰성 있는 성능을 보장받을 수 있습니다. ISO 3669:2020은 진공 기술 산업의 현재 및 미래의 요구사항을 반영하고 있으며, 진공 시스템의 안전성과 신뢰성을 강화하는 데 중요한 역할을 수행합니다. 이 표준의 채택은 제품 간의 호환성을 높여주며, 전 세계적으로 통일된 기준을 확립함으로써 산업 발전에 기여합니다. 따라서, 이 문서는 진공 기술 분야에서 필수적인 참고자료로, 관련 업계 종사자들에게 매우 유용한 정보源으로 자리잡고 있습니다. ISO 3669:2020을 통해 사용자는 진공 시스템의 설계 및 설치 시 최고의 효율성을 달성할 수 있을 것입니다.

Die Norm ISO 3669:2020 legt klare und präzise Dimensionen für feststehende oder drehbare bolzbare Messerflansche in Vakuumsystemen fest. Diese Flansche sind entscheidend für den Betrieb von Vakuumsystemen, die in einem Druckbereich von Umgebungsdruck bis hinunter zu 10–11 Pa arbeiten. Die Standardisierung in dieser Norm gewährleistet nicht nur eine einheitliche Qualität und Kompatibilität der Bauteile, sondern trägt auch zur Sicherheit und Effizienz von Vakuumanwendungen bei. Ein wesentlicher Vorteil der ISO 3669:2020 liegt in ihrer umfassenden Definition der Dimensionen, die für Ingenieure und Hersteller unverzichtbar ist, um die Interoperabilität zwischen verschiedenen Vakuumsystemen zu gewährleisten. Die Norm schafft dadurch eine solide Grundlage für die Konstruktion und den Austausch von Bauteilen, was insbesondere in Hochtechnologieanwendungen, wie in der Halbleiter- oder Forschungstechnologie, von großer Bedeutung ist. Die Relevanz dieser Norm erstreckt sich zudem auf die gesamte Industrie, da sie nicht nur die Herstellungsprozesse standardisiert, sondern auch Rahmenbedingungen für Tests und Qualitätskontrollen bietet. Mit der ISO 3669:2020 wird sichergestellt, dass Vakuumflansche den höchsten Anforderungen entsprechen, was nicht nur die Lebensdauer der Systeme verlängert, sondern auch eine zuverlässige Leistung unter extremen Bedingungen ermöglicht. Insgesamt stellt die ISO 3669:2020 einen wichtigen Schritt in der Standardisierung der Vakuumtechnik dar, da sie die Dimensionierung von Messerflanschen klar regelt und dadurch die Integration neuer Technologien und Produkte in bestehende Systeme erleichtert.

ISO 3669:2020 provides a comprehensive standard for the dimensions of knife-edge flanges used within vacuum technology. This document serves as an essential guideline for manufacturers and users of vacuum systems, ensuring compatibility and proper functioning of components under varying pressure conditions, from atmospheric levels to as low as 10−11 Pa. One of the primary strengths of ISO 3669:2020 is its clear specification of dimensional requirements for both fixed and rotatable bolted knife-edge flanges. By establishing a standardized set of dimensions, the document promotes interoperability among different vacuum components, reducing the risks of leaks and malfunctions, which are critical in maintaining system integrity. The relevance of this standard is particularly significant in industries relying heavily on vacuum technology, such as semiconductor manufacturing, material processing, and high-energy physics. These sectors demand precise engineering solutions, and ISO 3669:2020 addresses these needs by facilitating the consistent design and manufacturing of knife-edge flanges. Overall, ISO 3669:2020 stands out for its focus on technical accuracy and its contribution to enhancing operational efficiency in vacuum systems. Its implementation can lead to improved performance and durability of vacuum applications, making it an invaluable resource for engineers and manufacturers engaged in this specialized field.

La norme ISO 3669:2020, qui traite des dimensions des brides à bord tranchant en technologie du vide, présente un intérêt crucial pour les systèmes à vide. Son champ d'application est clairement défini, spécifiant les dimensions des brides fixes ou rotatives utilisées dans des systèmes de vide fonctionnant sous des pressions allant de l'atmosphérique jusqu'à des valeurs extrêmement basses de 10−11 Pa. L'une des forces majeures de cette norme réside dans sa capacité à établir des critères précis et unifiés pour la fabrication et l'utilisation des brides à bord tranchant. Cela permet de garantir l'interopérabilité et la compatibilité entre les différents composants des systèmes à vide, ce qui est essentiel pour optimiser la performance et réduire les fuites. De plus, la norme ISO 3669:2020 répond à la variété croissante des applications en technologie du vide, en fournissant des spécifications qui sont non seulement pertinentes pour les fabricants de systèmes à vide, mais aussi pour les utilisateurs finaux. Cela assure une meilleure compréhension des exigences techniques et une standardisation qui facilite les échanges commerciaux à l’échelle mondiale. En somme, la norme ISO 3669:2020 est non seulement pertinente, mais elle est également indispensable pour le développement et l'utilisation efficace de technologies avancées dans le domaine du vide, garantissant des standards de qualité et de performance élevés.