ISO 21360-5:2023
(Main)Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those: — with the shape of pill, disk, ring, strip, module, cartridge; — with pump structures; — and NEG coatings on inner surface of pipes and vacuum chamber. A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs. WARNING It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.
Technique du vide — Méthodes normalisées pour mesurer les performances des pompes à vide — Partie 5: Pompes à piégeur non évaporable (NEG)
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FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 21360-5
ISO/TC 112
Vacuum technology — Standard
Secretariat: DIN
methods for measuring vacuum-pump
Voting begins on:
2023-06-19 performance —
Voting terminates on:
Part 5:
2023-08-14
Non-evaporable getter (NEG) vacuum
pumps
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 21360-5:2023(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
NATIONAL REGULATIONS. © ISO 2023
---------------------- Page: 1 ----------------------
ISO/FDIS 21360-5:2023(E)
FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 21360-5
ISO/TC 112
Vacuum technology — Standard
Secretariat: DIN
methods for measuring vacuum-pump
Voting begins on:
performance —
Voting terminates on:
Part 5:
Non-evaporable getter (NEG) vacuum
pumps
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
RECIPIENTS OF THIS DRAFT ARE INVITED TO
ISO copyright office
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
CP 401 • Ch. de Blandonnet 8
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
CH-1214 Vernier, Geneva
DOCUMENTATION.
Phone: +41 22 749 01 11
IN ADDITION TO THEIR EVALUATION AS
Reference number
Email: copyright@iso.org
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 21360-5:2023(E)
Website: www.iso.org
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
Published in Switzerland
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
ii
© ISO 2023 – All rights reserved
NATIONAL REGULATIONS. © ISO 2023
---------------------- Page: 2 ----------------------
ISO/FDIS 21360-5:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms.3
5 Test methods . 4
5.1 General . 4
5.1.1 Test gases . 4
5.1.2 Vacuum chamber . 4
5.1.3 Orifice . 4
5.1.4 Vacuum pumping system for rough pumping . 4
5.1.5 Vacuum gauges .
...
ISO/TC 112/SC
Date: 2023-04-21
ISO/DIS FDIS 21360-5:20222023(E)
ISO/TC 112/SC /WG 1
Secretariat: DIN
Date: 2023-06-02
Vacuum technology — Standard methods for measuring vacuum-pump
performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
Élément introductif — Élément central — Partie 5: Élément complémentaire
---------------------- Page: 1 ----------------------
COPYRIGHT PROTECTED DOCUMENT
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ISO/DIS FDIS 21360-5:20222023(E)
© ISO 2023
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or
utilized otherwise in any form or by any means, electronic or mechanical, including photocopying,
or posting on the internet or an intranet, without prior written permission. Permission can be
requested from either ISO at the address below or ISO’s member body in the country of the
requester.
ISO copyright office
Ch. de Blandonnet 8 • CP 401
CH-1214 Vernier, Geneva, Switzerland
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
copyright@iso.org
www.iso.org
www.iso.org
ii © ISO 2022 2023 – All rights reserved
---------------------- Page: 3 ----------------------
ISO/DIS FDIS 21360-5:20222023(E)
Contents Page
Foreword . v
Introduction . vvi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 4
5 Test methods . 5
5.1 General . 5
5.1.1 Test gases. 5
5.1.2 Vacuum chamber . 5
5.1.3 Orifice . 5
5.1.4 Vacuum pumping system for rough pumping . 5
5.1.5 Vacuum gauges . 6
5.1.6 Temperature . 6
5.1.7 Activation method of NEG . 6
5.1.8 Procedure of sample installation and activation . 6
5.2 Throughput method for small NEG samples . 7
5.2.1 Experimental setup . 7
5.2.2 Sample . 8
5.2.3 Determination of getter pumping speed S and sorption quantity C . 8
q
5.2.4 Determination of sticking probability α . 10
5.2.5 Measurement procedure . 11
5.2.6 Measurement uncertainty . 11
5.3 Throughput method with test dome .
...
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