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ISO 21360-6:2023

(Main)

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Technique du vide — Méthodes normalisées pour mesurer les performances des pompes à vide — Partie 6: Pompes à vide cryogéniques

General Information

Status
Published
Publication Date
05-Dec-2023
ICS
23.160 - Vacuum technology
Technical Committee
ISO/TC 112 - Vacuum technology
Drafting Committee
ISO/TC 112/WG 1 - Vacuum pumps
Current Stage
6060 - International Standard published
Start Date
06-Dec-2023
Due Date
03-Mar-2024
Completion Date
06-Dec-2023
Ref Project

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ISO 21360-6:2023 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps Released:6. 12. 2023ISO 21360-6:2023 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps Released:6. 12. 2023
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ISO 21360-6:2023 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps Released:6. 12. 2023
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ISO 21360-6 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryo vacuum pumps Released:5. 07. 2023ISO 21360-6 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryo vacuum pumps Released:5. 07. 2023
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REDLINE ISO 21360-6 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryo vacuum pumps Released:5. 07. 2023REDLINE ISO 21360-6 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryo vacuum pumps Released:5. 07. 2023
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REDLINE ISO 21360-6 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryo vacuum pumps Released:5. 07. 2023
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Standards Content (Sample)

INTERNATIONAL ISO
STANDARD 21360-6
First edition
2023-12
Vacuum technology — Standard
methods for measuring vacuum-pump
performance —
Part 6:
Cryogenic vacuum pumps
Technique du vide — Méthodes normalisées pour mesurer les
performances des pompes à vide —
Partie 6: Pompes à vide cryogéniques
Reference number
ISO 21360-6:2023(E)
© ISO 2023

---------------------- Page: 1 ----------------------
ISO 21360-6:2023(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii
  © ISO 2023 – All rights reserved

---------------------- Page: 2 ----------------------
ISO 21360-6:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols . 2
5 Test methods . 3
5.1 Test gas . 3
5.2 Measurement of the volume flow rate (pumping speed) . 3
5.2.1 General . 3
5.2.2 Pretreatment procedure . 3
5.2.3 Volume flow rate (pumping speed) measurement by the throughput method . 3
5.2.4 Volume flow rate (pumping speed) measurement by the orifice method . 3
5.2.5 Measurement of water vapour volume flow rate (pumping speed) . 4
5.3 Maximum throughput measurement . 4
5.3.1 General . 4
5.3.2 Measurement method . 4
5.3.3 Measurement setup . 4
5.3.4 Measuring procedure . 4
5.4 Pumping capacity measurement . 4
5.4.1 General .
...

FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 21360-6
ISO/TC 112
Vacuum technology — Standard
Secretariat: DIN
methods for measuring vacuum-pump
Voting begins on:
2023-07-19 performance —
Voting terminates on:
Part 6:
2023-09-13
Cryo vacuum pumps
Technique du vide — Méthodes normalisées pour mesurer les
performances des pompes à vide —
Partie 6: Pompes à vide cryogéniques
RECIPIENTS OF THIS DRAFT ARE INVITED TO
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
Reference number
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 21360-6:2023(E)
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
NATIONAL REGULATIONS. © ISO 2023

---------------------- Page: 1 ----------------------
ISO/FDIS 21360-6:2023(E)
FINAL
INTERNATIONAL ISO/FDIS
DRAFT
STANDARD 21360-6
ISO/TC 112
Vacuum technology — Standard
Secretariat: DIN
methods for measuring vacuum-pump
Voting begins on:
performance —
Voting terminates on:
Part 6:
Cryo vacuum pumps
Technique du vide — Méthodes normalisées pour mesurer les
performances des pompes à vide —
Partie 6: Pompes à vide cryogéniques
COPYRIGHT PROTECTED DOCUMENT
© ISO 2023
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
RECIPIENTS OF THIS DRAFT ARE INVITED TO
ISO copyright office
SUBMIT, WITH THEIR COMMENTS, NOTIFICATION
OF ANY RELEVANT PATENT RIGHTS OF WHICH
CP 401 • Ch. de Blandonnet 8
THEY ARE AWARE AND TO PROVIDE SUPPOR TING
CH-1214 Vernier, Geneva
DOCUMENTATION.
Phone: +41 22 749 01 11
IN ADDITION TO THEIR EVALUATION AS
Reference number
Email: copyright@iso.org
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/FDIS 21360-6:2023(E)
Website: www.iso.org
LOGICAL, COMMERCIAL AND USER PURPOSES,
DRAFT INTERNATIONAL STANDARDS MAY ON
Published in Switzerland
OCCASION HAVE TO BE CONSIDERED IN THE
LIGHT OF THEIR POTENTIAL TO BECOME STAN-
DARDS TO WHICH REFERENCE MAY BE MADE IN
ii
  © ISO 2023 – All rights reserved
NATIONAL REGULATIONS. © ISO 2023

---------------------- Page: 2 ----------------------
ISO/FDIS 21360-6:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols . 2
5 Test methods . 3
5.1 Test gas . 3
5.2 Measurement of the volume flow rate (pumping speed) . 3
5.2.1 General . 3
5.2.2 Pretreatment procedure .
...

Style Definition: Heading 1: Indent: Left: 0 pt, First line:
ISO/TC 112/SC
0 pt, Tab stops: Not at 21.6 pt
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Date: 2023-05-24
18 pt
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ISO/DIS FDIS 21360-6:20222023(E)
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ISO/TC 112/SC /WG 1
Style Definition: Heading 5: Font: Bold
Style Definition: Heading 6: Font: Bold
Secretariat: DIN
Style Definition: ANNEX
Date: 2023-07-04 Style Definition: AMEND Terms Heading: Font: Bold
Style Definition: AMEND Heading 1 Unnumbered: Font:
Vacuum technology — Standard methods for measuring vacuum-pump Bold
performance — Part 6: CryoCryogenic vacuum pumps Style Definition: IneraTableMultiPar: Font color: Black,
Check spelling and grammar
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Formatted: Adjust space between Latin and Asian text,
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Formatted: Font: Bold
Formatted: Adjust space between Latin and Asian text,
Adjust space between Asian text and numbers

---------------------- Page: 1 ----------------------
COPYRIGHT PROTECTED DOCUMENT
Technique du vide — Méthodes normalisées pour mesurer les performances des
pompes à vide — Partie 6: Pompes à vide cryogéniques

---------------------- Page: 2 ----------------------
ISO/DIS FDIS 21360-6:2023(E)
Formatted: Font: 11.5 pt
Formatted: Font: 11.5 pt
Formatted: Justified, Space After: 37 pt
Formatted: English (United Kingdom)
© ISO 2023
Formatted
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or
utilized otherwise in any form or by any means, electronic or mechanical, including photocopying,
or posting on the internet or an intranet, without prior written permission. Permission can be
requested from either ISO at the address below or ISO’s member body in the country of the
requester.
ISO copyright office
Ch. de Blandonnet 8 • CP 401
CH-1214 Vernier, Geneva, Switzerland
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
copyright@iso.org
www.iso.org
www.iso.org
Formatted: English (United Kingdom)
Formatted: Space Before: 18 pt, After: 0 pt, Line
spacing: Exactly 12 pt
Formatted: English (United Kingdom)
Formatted: Font: 11 pt, English (United Kingdom)
Formatted: Indent: Left: 0 pt, Space Before: 18 pt, After:
0 pt, Line spacing: Exactly 12 pt
Formatted: Font: 11 pt, English (United Kingdom)
Formatted: Font: 11 pt, English (United Kingdom)
ii © ISO 2023 – All rights reserved

---------------------- Page: 3 ----------------------
ISO/DIS FDIS 21360-6:2023(E)
Formatted: Font: 11.5 pt
Formatted: Font: 11.5 pt
Formatted: Tab stops: Not at 487.6 pt
Contents Page
Foreword . iv
Introduction . v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 2
5 Test methods . 3
5.1 Test gas . 3
5.2 Measurement of the volume flow rate (pumping speed) . 3
5.2.1 General . 3
5.2.2 Volume flow rate (pumping speed) measurement by the throughput method . 3
5.2.3 Volume flow rate (pumping speed) measurement by the orifice method . 3
5.2.4 Pretreatment procedure . 3
5.2.5 Measurement of wat
...

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