IEC 60747-18-1:2019

IEC 60747-18-1 ®
Edition 1.0 2019-05
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 18-1: Semiconductor bio sensors – Test method and data analysis for
calibration of lens-free CMOS photonic array sensors

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.

IEC Central Office Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.

IEC publications search - webstore.iec.ch/advsearchform Electropedia - www.electropedia.org
The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology,
variety of criteria (reference number, text, technical containing more than 22 000 terminological entries in English
committee,…). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages.
and withdrawn publications. Also known as the International Electrotechnical Vocabulary

(IEV) online.
IEC Just Published - webstore.iec.ch/justpublished
Stay up to date on all new IEC publications. Just Published IEC Glossary - std.iec.ch/glossary
details all new publications released. Available online and 67 000 electrotechnical terminology entries in English and
once a month by email. French extracted from the Terms and Definitions clause of
IEC publications issued since 2002. Some entries have been
IEC Customer Service Centre - webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and
If you wish to give us your feedback on this publication or CISPR.

need further assistance, please contact the Customer Service

Centre: sales@iec.ch.
IEC 60747-18-1 ®
Edition 1.0 2019-05
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 18-1: Semiconductor bio sensors – Test method and data analysis for

calibration of lens-free CMOS photonic array sensors

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99 ISBN 978-2-8322-6909-1

– 2 – IEC 60747-18-1:2019 © IEC 2019
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 8
2 Normative references . 8
3 Terms and definitions . 8
4 Measurement setup . 9
4.1 General . 9
4.2 Measurement system . 9
4.2.1 Overall system . 9
4.2.2 Dark box . 11
4.2.3 Light source . 11
4.2.4 Sensor board . 11
4.2.5 Configuration parameters . 12
5 Measurement . 12
5.1 General . 12
5.2 Case 1: Fixed wavelength (λ) of light . 12
5.2.1 Planarization: At fixed λ and incident light intensity . 12
5.2.2 Linearity: Varying the incident light intensity with a fixed wavelength . 14
5.3 Case 2: Various wavelength (λ) of light . 14
6 Data analysis . 14
6.1 Data plot . 14
6.1.1 General . 14
6.1.2 Sensor screening . 16
6.2 Planarization characteristics . 16
6.2.1 Criterion of determining the reference pixel . 16
6.2.2 Lookup table of representative value for planarization calibration of
each pixel . 17
6.3 Linearity . 17
6.3.1 Criterion of linear region of each pixel . 17
6.3.2 Criterion of light intensity effective area for linearity. 18
6.3.3 Lookup table of the representative value for linearity calibration of each
pixel . 18
7 Calibration . 19
7.1 Calibration lookup table . 19
7.2 Reference for establishing the representative output value in the effective
area . 20
8 Test report . 21
Annex A (informative) Test report . 23
Test environment specification . 23
Specification of CMOS photonic array sensor . 24
A.3 Calibration lookup table . 24
Representative value look up table for planarization calibration of the sensor . 24
Representative value look up table for linearity calibration of the sensor . 25
Bibliography . 26

Figure 1 – Example of box plot. 9

Figure 2 – Example of measurement system with integrating sphere . 10
Figure 3 – Example of measurement system with incident parallel light . 10
Figure 4 – Example of photoelectric measurement schematic . 11
Figure 5 – Measurement flow . 12
Figure 6 – n trial data of frame capture . 13
Figure 7 – Two frame subtracted data . 13
Figure 8 – Dark frame subtracted data . 14
Figure 9 – Example of output electric signal non-linearity of 2D pixel array . 15
Figure 10 – Example of output electric signal non-linearity of one row of pixels . 15
Figure 11 – Example of one pixel’s output electric signal according to input light power . 16
Figure 12 – Example of determining the reference pixel . 17
Figure 13 – Example of the representative value for planarization . 17
Figure 14 – Example of light intensity effective area for linearity . 18
Figure 15 – Example of the representative value for linearity . 19
Figure 16 – Example of a simplified pixel structure and cross-sectional view with bio
reaction . 19
Figure 17 – Example of the representative value of the sensor . 21

Table 1 – Calibration lookup table . 20
Table 2 – Representative value table of the sensor . 21

– 4 – IEC 60747-18-1:2019 © IEC 2019
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
Part 18-1: Semiconductor bio sensors – Test method and data analysis
for calibration of lens-free CMOS photonic array sensors

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 60747-18-1 has been prepared by subcommittee 47E: Discrete
semiconductor devices, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
FDIS Report on voting
47E/643A/FD
...