IEC 60747-14-11:2021

IEC 60747-14-11 ®
Edition 1.0 2021-03
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet, illumination and
temperature
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.

IEC Central Office Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland
About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.

IEC publications search - webstore.iec.ch/advsearchform IEC online collection - oc.iec.ch
The advanced search enables to find IEC publications by a Discover our powerful search engine and read freely all the
variety of criteria (reference number, text, technical publications previews. With a subscription you will always
committee, …). It also gives information on projects, replaced have access to up to date content tailored to your needs.
and withdrawn publications.
Electropedia - www.electropedia.org
IEC Just Published - webstore.iec.ch/justpublished
The world's leading online dictionary on electrotechnology,
Stay up to date on all new IEC publications. Just Published
containing more than 22 000 terminological entries in English
details all new publications released. Available online and
and French, with equivalent terms in 18 additional languages.
once a month by email.
Also known as the International Electrotechnical Vocabulary

(IEV) online.
IEC Customer Service Centre - webstore.iec.ch/csc

If you wish to give us your feedback on this publication or
need further assistance, please contact the Customer Service
Centre: sales@iec.ch.
IEC 60747-14-11 ®
Edition 1.0 2021-03
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 14-11: Semiconductor sensors – Test method of surface acoustic

wave-based integrated sensors for measuring ultraviolet, illumination and

temperature
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.01 ISBN 978-2-8322-9465-9

– 2 – IEC 60747-14-11:2021 © IEC 2021
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 SAW-based integrated light sensors . 7
3.3 Characteristics parameters . 7
4 Device structure and characteristics . 8
4.1 General . 8
4.2 Device structure . 8
4.2.1 SAW based resonator type light-sensor elements . 8
4.2.2 SAW-based delay line type light sensor elements . 9
4.3 Characteristics of integrated UV and visible-light sensors . 9
4.4 Key points of integrated UV and visible-light sensors . 10
4.4.1 UV sensitive layer . 10
4.4.2 Visible-light sensitive layer . 10
5 Test conditions . 10
5.1 Test environmental conditions . 10
5.2 Darkroom condition . 11
5.3 Setup conditions . 11
5.3.1 Starting conditions of test . 11
5.3.2 Conditions of UV and visible light measurement equipment . 11
6 Test methods . 11
6.1 General . 11
6.2 Test methods of DC-characteristics for the light sensor element . 12
6.3 Test methods of RF characteristics for integrated light sensors . 14
6.3.1 Direct mode . 14
6.3.2 Differential amplifier mode . 14
Annex A (informative) Ultraviolet and visible light characteristics of the sensitive layer . 18
Annex B (informative) Hysteresis of frequency shift according to the on/off state light
condition . 20
Bibliography . 21

Figure 1 – Configuration of an interdigital transducer (IDT) . 7
Figure 2 – Conceptual diagram for SAW based resonator type light sensor elements . 9
Figure 3 – Conceptual diagram for SAW based delay line type light sensor elements . 9
Figure 4 – Conceptual diagram for integrated multi UV and visible light sensors . 10
Figure 5 – Measurement procedure for the semiconductor light sensor . 12
Figure 6 – Test setup to measure the I-V characteristics of semiconductor light sensor . 13
Figure 7 – Example of I-V characteristics of a UV sensor element as a function of UV
intensity . 13
Figure 8 – Test setup to measure the frequency shift of semiconductor light sensor . 14
Figure 9 – Differential amplifier mode method . 16
Figure 10 – Measurement results of UV and visible light sensors using differential
amplifier mode . 17

Figure A.1 – Operation principle of the ZnO sensitive layer for UV sensing . 18
Figure A.2 – Operation principle in terms of band theory . 19
Figure B.1 – Hysteresis of the frequency shift under optimal light conditions . 20

– 4 – IEC 60747-14-11:2021 © IEC 2021
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet,
illumination and temperature
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote international
co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and
in addition to other activities, IEC publishes International Standards, Technical Specifications, Technical Reports,
Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their
preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with
may participate in this preparatory work. International, governmental and non-governmental organizations liaising
with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for
Standardization (ISO) in accordance with conditions determined by agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence between
any IEC Publication and the corresponding national or regional publication shall be clearly indicated in the latter.
5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity
assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any
services carried out by independent certification bodies.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent
rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 60747-14-11 has been prepared by subcommittee 47E: Discrete
semiconductor devices, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
CDV Report on voting
47E/674/CDV 47E/709/RVC
Full information on the voting for the approval of this International Standard can be found in the
report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 60747 series, published under the general title Semiconductor
devices, can be found on the IEC website.

The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The "colour inside" logo on the cover page of this document indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this document using a colour printer.

– 6 – IEC 60747-14-11:2021 © IEC 2021
SEMICONDUCTOR DEVICES –
Part 14-11: Semiconductor sensors – Test method of surface acoustic
wave-based integrated sensors for measuring ultraviolet,
illumination and temperature
1 Scope
This part of IEC 60747 defines the terms, definitions, configuration, and test methods can be
used to evaluate and determine the performance characteristics of surface acoustic wave-
based semiconductor sensors integrated with ultraviolet, illuminance, and temperature sensors.
The measurement methods are for DC characteristics and RF characteristics, and the
measurement method for RF characteristics includes a direct mode and differential amplifier
mode based on feedback oscillation. This document excludes devices dealt with by TC 49:
piezoelectric, dielectric and electrostatic devices and associated materials for frequency control,
selection and detection.
2 Normative references
The following
...