EN ISO 15367-1:2003

SLOVENSKI STANDARD
01-december-2003
Laserji in laserska oprema – Preskusne metode za ugotavljanje oblike valovne
fronte laserskega žarka – 1. del: Izrazje in temeljni vidiki (ISO 15367-1:2003)
Lasers and laser-related equipment - Test methods for determination of the shape of a
laser beam wavefront - Part 1: Terminology and fundamental aspects (ISO 15367-
1:2003)
Laser und Laseranlagen - Prüfverfahren für die Bestimmung der Wellenfrontform von
Laserstrahlen - Teil 1: Begriffe und grundlegende Aspekte (ISO 15367-1:2003)
Lasers et équipements associés aux lasers - Méthodes d'essai pour la détermination de
la forme du front d'onde du faisceau laser - Partie 1: Terminologie et aspects
fondamentaux (ISO 15367-1:2003)
Ta slovenski standard je istoveten z: EN ISO 15367-1:2003
ICS:
01.040.31 Elektronika (Slovarji) Electronics (Vocabularies)
31.260 Optoelektronika, laserska Optoelectronics. Laser
oprema equipment
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN ISO 15367-1
NORME EUROPÉENNE
EUROPÄISCHE NORM
September 2003
ICS 01.040.31; 31.260
English version
Lasers and laser-related equipment - Test methods for
determination of the shape of a laser beam wavefront - Part 1:
Terminology and fundamental aspects (ISO 15367-1:2003)
Lasers et équipements associés aux lasers - Méthodes Laser und Laseranlagen - Prüfverfahren für die
d'essai pour la détermination de la forme du front d'onde du Bestimmung der Wellenfrontform von Laserstrahlen - Teil
faisceau laser - Partie 1: Terminologie et aspects 1: Begriffe und grundlegende Aspekte (ISO 15367-1:2003)
fondamentaux (ISO 15367-1:2003)
This European Standard was approved by CEN on 1 September 2003.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the Management Centre or to any CEN member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the Management Centre has the same status as the official
versions.
CEN members are the national standards bodies of Austria, Belgium, Czech Republic, Denmark, Finland, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Luxembourg, Malta, Netherlands, Norway, Portugal, Slovakia, Spain, Sweden, Switzerland and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
Management Centre: rue de Stassart, 36  B-1050 Brussels
© 2003 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 15367-1:2003 E
worldwide for CEN national Members.

Foreword
This document (EN ISO 15367-1:2003) has been prepared by Technical Committee ISO/TC 172
"Optics and optical instruments" in collaboration with Technical Committee CEN/TC 123 "Lasers
and laser-related equipment", the secretariat of which is held by DIN.
This European Standard shall be given the status of a national standard, either by publication of
an identical text or by endorsement, at the latest by March 2004, and conflicting national
standards shall be withdrawn at the latest by March 2004.
According to the CEN/CENELEC Internal Regulations, the national standards organizations of
the following countries are bound to implement this European Standard: Austria, Belgium, Czech
Republic, Denmark, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Luxembourg, Malta, Netherlands, Norway, Portugal, Slovakia, Spain, Sweden, Switzerland and
the United Kingdom.
NOTE FROM CMC  The foreword is susceptible to be amended on reception of the German
language version. The confirmed or amended foreword, and when appropriate, the normative
annex ZA for the references to international publications with their relevant European
publications will be circulated with the German version.
Endorsement notice
The text of ISO 15367-1:2003 has been approved by CEN as EN ISO 15367-1:2003 without any
modifications.
INTERNATIONAL ISO
STANDARD 15367-1
First edition
2003-09-15
Lasers and laser-related equipment —
Test methods for determination of the
shape of a laser beam wavefront —
Part 1:
Terminology and fundamental aspects
Lasers et équipements associés aux lasers — Méthodes d'essai pour la
détermination de la forme du front d'onde du faisceau laser —
Partie 1: Terminologie et aspects fondamentaux

Reference number
ISO 15367-1:2003(E)
©
ISO 2003
ISO 15367-1:2003(E)
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ii © ISO 2003 — All rights reserved

ISO 15367-1:2003(E)
Contents Page
Foreword. iv
Introduction . v
1 Scope. 1
2 Normative references. 1
3 Terms and definitions. 2
3.1 General definitions. 2
3.2 Definitions associated with power (energy) density distribution . 4
3.3 Definitions associated with astigmatism. 4
3.4 Definitions related to the characteristics and topography of the wavefront. 5
3.5 Definitions related to wavefront gradient measurements . 7
4 Test methods. 8
4.1 Laser types. 8
4.2 Safety. 8
4.3 Test environment. 8
4.4 Beam modification. 9
4.5 Detector system. 10
4.6 Wavefront measuring instruments. 10
5 Test and measurement procedures . 11
5.1 Alignment. 11
5.2 Calibration. 11
5.3 Visual inspection of automated data analysis . 11
5.4 Measurement procedures. 12
6 Analysis of wavefront quality . 12
6.1 Polynomial representation of wavefronts . 12
6.2 Computation of wavefront quality. 12
7 Uncertainty. 13
7.1 Requirements for uncertainty estimation. 13
7.2 Sources of uncertainty . 14
8 Test report. 14
Annex A (informative) Astigmatism and laser beams . 15
Bibliography . 20

ISO 15367-1:2003(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 15367-1 was prepared by Technical Committee ISO/TC 172, Optics and optical instruments,
Subcommittee SC 9, Electro-optical systems.
ISO 15367 consists of the following parts, under the general title Lasers and laser-related equipment — Test
methods for determination of the shape of a laser beam wavefront:
 Part 1: Terminology and fundamental aspects
 Part 2: Hartmann-Shack sensors

iv © ISO 2003 — All rights reserved

ISO 15367-1:2003(E)
Introduction
It is important, when designing, operating or maintaining a laser system, to be able to ensure repeatability,
predict the propagation behaviour of the laser beam and to assess the safety hazards. There are four sets of
parameters that could be measured for the characterization of a laser beam:
 power (energy) density distribution (ISO 13694);
 beam width, divergence angle and beam propagation factor (ISO 11146);
 phase distribution (ISO 15367);
 spatial beam coherence.
This part of ISO 15367 defines the terminology and symbols to be used when making reference to or
measuring the phase distribution in a transverse plane of a laser beam. It specifies the procedures required
for the measurement of
 the azimuth of the principal planes of the phase distribution;
 the magnitude of astigmatic aberrations;
 evaluation of the wavefront aberration function and the RMS wavefront deformation.
A useful technique for qualitative assessment of a beam is visual inspection of the fringe pattern in
interferograms or an isometric view of a wavefront surface. However, more quantitative methods are needed
for quality assurance and transfer of process technology. The measurement techniques indicated in this part
of ISO 15367 allow numerical analysis of the phase distribution in a propagating beam and can provide
recordable quantitative results.
While it is quite possible to ascribe other conventional aberrations (e.g. coma or spherical aberration) as well
as astigmatism to a laser beam, these are not commonly used. Departure of the wavef
...