IEC 62047-50:2025

IEC 62047-50 ®
Edition 1.0 2025-04
INTERNATIONAL
STANDARD
Semiconductor devices – Micro-electromechanical devices –
Part 50: MEMS capacitive microphones

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IEC 62047-50 ®
Edition 1.0 2025-04
INTERNATIONAL
STANDARD
Semiconductor devices – Micro-electromechanical devices –

Part 50: MEMS capacitive microphones

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99  ISBN 978-2-8327-0374-8

– 2 – IEC 62047-50:2025 © IEC 2025
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
4 Essential ratings and characteristics . 6
4.1 Ratings (limiting values) . 6
4.2 Characteristics . 6
5 Test methods of MEMS capacitive sensor performances . 6
6 Test methods of MEMS capacitive microphones performances . 7
6.1 Output impedance . 7
6.2 Sensitivity . 8
6.3 Noise floor . 9
6.4 Signal-to-noise ratio . 9
6.5 Dynamic range . 10
6.6 Frequency response . 10
6.7 Polarity . 10
6.8 Equivalent input noise . 10
6.9 Total harmonic distortion . 11
6.10 Power-supply rejection ratio . 11
6.11 Acoustic overload point . 12
Bibliography . 13

Figure 1 – Test system of MEMS capacitive sensor performances . 7
Figure 2 – Five-point sampling . 7
Figure 3 – Test connection graph of output impedance . 8

Table 1 – Performance parameters of the microphone . 6

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 50: MEMS capacitive microphones

FOREWORD
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IEC 62047-50 has been prepared by subcommittee 47F: Micro-electromechanical systems, of
IEC technical committee 47: Semiconductor devices. It is an International Standard.
The text of this International Standard is based on the following documents:
Draft Report on voting
47F/502/FDIS 47F/509/RVD
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this International Standard is English.

– 4 – IEC 62047-50:2025 © IEC 2025
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 62047 series, published under the general title Semiconductor
devices – Micro-electromechanical devices, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• revised.
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 50: MEMS capacitive microphones

1 Scope
This part of IEC 62047 defines the test conditions and test methods for the performance of
MEMS capacitive microphones.
This document applies to MEMS capacitive microphones.
2 Normat
...