IEC 62047-44:2024

IEC 62047-44 ®
Edition 1.0 2024-02
INTERNATIONAL
STANDARD
Semiconductor devices – Micro-electromechanical devices –
Part 44: Test methods for dynamic performances of MEMS resonant electric-
field-sensitive devices
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IEC 62047-44 ®
Edition 1.0 2024-02
INTERNATIONAL
STANDARD
Semiconductor devices – Micro-electromechanical devices –

Part 44: Test methods for dynamic performances of MEMS resonant electric-

field-sensitive devices
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99  ISBN 978-2-8322-8274-8

– 2 – IEC 62047-44:2024 © IEC 2024
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Essential ratings and characteristics . 7
4.1 Composition of MEMS resonant electric‑field‑sensitive devices . 7
4.2 Identification and types . 7
4.3 Description of application and specification . 7
4.4 Recommended operating conditions . 7
4.5 Additional information . 8
5 Dynamic characteristics . 8
5.1 Resonant frequency . 8
5.2 Quality factor Q . 8
5.3 Response time . 8
6 Measuring methods . 8
6.1 General . 8
6.2 Resonant frequency . 9
6.2.1 Purpose . 9
6.2.2 Optical test method . 9
6.2.3 Electrical test method . 11
6.2.4 Data processing method . 12
6.2.5 Specified conditions . 12
6.3 Quality factor (Q) . 12
6.3.1 Purpose . 12
6.3.2 Circuit diagram . 12
6.3.3 Principle of measurement . 12
6.3.4 Precaution to be observed . 13
6.3.5 Measurement procedure . 13
6.3.6 Data processing method . 13
6.3.7 Specified conditions . 13
6.4 Response time . 13
6.4.1 Purpose . 13
6.4.2 Circuit diagram . 13
6.4.3 Principle of measurement . 13
6.4.4 Precaution to be observed . 13
6.4.5 Measurement procedure . 13
6.4.6 Data processing method . 14
6.4.7 Specified conditions . 14
Annex A (informative) Work principle and general description of MEMS resonant
electric‑field‑sensitive devices . 15
Annex B (informative) Sensitive structure and test of typical MEMS resonant
electric‑field‑sensitive devices . 17
B.1 Electrostatically driven MEMS resonant electric‑field‑sensitive devices . 17
B.2 Thermally driven MEMS resonant electric‑field‑sensitive devices . 18
B.3 Piezoelectrically driven MEMS resonant electric‑field‑sensitive devices . 19

Figure 1 – Terminals of MEMS resonant electric‑field‑sensitive devices . 7
Figure 2 – Diagram of the MEMS resonant electric‑field‑sensitive device on the parallel
plate system . 9
Figure 3 – Test system diagram of optical test method . 10
Figure 4 – Test system diagram of electrical test method . 11
Figure A.1 – Example for working principle of MEMS resonant electric‑field‑sensitive
device . 16
Figure B.1 – Example for electrostatically driven MEMS resonant
electric‑field‑sensitive device . 17
Figure B.2 – Circuit diagram of electrical test system of electrostatic comb type
electric‑field‑sensitive device . 18
Figure B.3 – Example for thermally driven MEMS resonant electric‑field‑sensitive
devices . 18
Figure B.4 – Example for piezoelectrically driven MEMS resonant
electric‑field‑sensitive devices . 19

– 4 – IEC 62047-44:2024 © IEC 2024
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 44: Test methods for dynamic performances of MEMS resonant
electric‑field‑sensitive devices

FOREWORD
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IEC 62047-44 has been prepared by subcommittee 47F: Micro-electromechanical systems, of
IEC technical committee 47: Semiconductor devices. It is an International Standard.
The text of this International Standard is based on the following documents:
Draft Report on voting
47F/456/FDIS 47F/463/RVD
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this International Standard i
...