IEC 62047-48:2024

IEC 62047-48 ®
Edition 1.0 2024-06
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 48: Test method for determining solution concentration by optical
absorption using MEMS fluidic device

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IEC 62047-48 ®
Edition 1.0 2024-06
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Micro-electromechanical devices –

Part 48: Test method for determining solution concentration by optical

absorption using MEMS fluidic device

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99  ISBN 978-2-8322-8930-3

– 2 – IEC 62047-48:2024 © IEC 2024
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Test method . 6
4.1 General . 6
4.1.1 Principle of the absorption method . 6
4.1.2 Molar absorption coefficient, a . 8
4.1.3 Optical path length, b . 8
4.1.4 Absorbance, A . 8
4.1.5 Surface temperature of MEMS fluidic device . 8
4.1.6 Molar concentration, c . 8
5 Test specimen . 9
5.1.1 Test specimen . 9
5.1.2 Configuration of concentration measuring unit for test specimen . 9
5.1.3 Layer stack of the MEMS fluidic device . 9
5.1.4 Size and shape of the micro-channel . 10
5.1.5 Configuration of solution concentration measuring system . 11
5.2 Test procedure . 13
6 Data analysis . 14
6.1 Calculating results . 14
6.2 Test report . 14
Bibliography . 16

Figure 1 – Schematic drawing of micro components in a MEMS fluidic device (top view) . 5
Figure 2 – Optical absorption method for determining the concentration of the solution
using a conventional cuvette (side view) . 7
Figure 3 – Schematic graph with the x-axis as the concentration, c and the y-axis as
absorbance A . 8
Figure 4 – Schematic drawing of a concentration measuring unit for a test specimen
based on a MEMS fluidic device . 9
Figure 5 – Schematic structure and process for preparation of MEMS fluidic device . 10
Figure 6 – Configurations and dimensions for measuring unit of MEMS fluidic device . 11
Figure 7 – Schematic drawing for a MEMS fluidic device layout with microfluidic
concentration measuring unit and additional MEMS components on a single device . 12
Figure 8 – Schematic drawing for stand-alone measuring unit connected with another
MEMS fluidic device through tubing . 13

Table 1 – Test unit for determining solution concentration using MEMS fluidic device . 10
Table 2 – Table for test report for determining solution concentration by absorption
method in MEMS fluidic device . 15

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 48: Test method for determining solution concentration
by optical absorption using MEMS fluidic device

FOREWORD
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IEC 62047-48 has been prepared by subcommittee 47F: Micro-electromechanical systems, of
IEC technical committee 47: Semiconductor devices. It is an International Standard.
The text of this International Standard is based on the following documents:
Draft Report on voting
47F/466/FDIS 47F/472/RVD
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
– 4 – IEC 62047-48:2024 © IEC 2024
The language used for the development of this International Standard is English.
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devices – Micro-electromechanical devices, can be found on the IEC website.
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INTRODUCTION
A MEMS fluidic device is one of the key devices in MEMS technologies, including bio-MEMS,
chemical MEMS, and micro TAS (total analytical system). A MEMS fluidic device, in general,
consists of several micro components such as inlet ports for injection of a filtered sample and
reagents to induce a sample to have the optical absorption at specific wavelength, a microfluidic
mixer for physical mixing, a micro-reactor for chemical or biological reaction, a detection area
for determining the concentration of solution using optical source and detector from the outside,
as well as outlet ports for waste-out as shown in Figure 1. All components in a MEMS fluidic
device are connected with microfluidic channels. In case there is a synthesizing solution with
absorption at a specific wavelength in a MEMS fluidic device, it is possible to determine the
concentration by using an absorption method at specific absorption wavelength based on the
Beer-Lambert law [1] . MEMS fluidic devices are more cost-effective than conventional analysis
tools and methods since expensive reagents and human power are used less and in-si
...