IEC
IEC 62047-10:2011/COR1:2012
(Corrigendum)Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
Corrigendum 1 - Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 10: Essai de compression utilisant la technique des micro-piliers pour les matériaux des MEMS
General Information
Status
Published
Publication Date
27-Feb-2012
Technical Committee
Current Stage
PPUB - Publication issued
Start Date
29-Feb-2012
Completion Date
28-Feb-2012
Relations
Standards Content (Sample)
IEC 62047-10 CEI 62047-10
(First edition – 2011) (Première édition – 2011)
Semiconductor devices – Dispositifs à semiconducteur –
Micro-electromechanical devices – Dispositifs microélectromécaniques –
Part 10: Micro-pillar compression test for MEMS Partie 10: Essai de compression utilisant
materials la technique des micro-piliers pour les
matériaux des MEMS
CO RR
...
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