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IEC 62047-20:2014

(Main)

Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

IEC 62047-20:2014 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes.

Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 20: Gyroscopes

L'IEC 62047-20:2014 spécifie les termes et définitions, les valeurs assignées et les caractéristiques, ainsi que les méthodes de mesure des gyroscopes. Les gyroscopes sont principalement utilisés dans des applications grand public, des applications industrielles générales et des applications aérospatiales. Les dispositifs microélectromécaniques (MEMS, Micro-Electrical-Mechanical Systems) et les lasers à semiconducteur sont largement utilisés dans la technologie des dispositifs de gyroscopes.

General Information

Status
Published
Publication Date
25-Jun-2014
ICS
01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
31.080.99 - Other semiconductor devices
Technical Committee
SC 47F - Micro-electromechanical systems
Drafting Committee
WG 1 - TC 47/SC 47F/WG 1
Current Stage
PPUB - Publication issued
Start Date
31-Jul-2014
Completion Date
26-Jun-2014
Ref Project

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IEC 62047-20:2014 - Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
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IEC 62047-20 ®
Edition 1.0 2014-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 20: Gyroscopes
Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 20: Gyroscopes
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
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IEC 62047-20 ®
Edition 1.0 2014-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –

Part 20: Gyroscopes
Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –

Partie 20: Gyroscopes
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX XA
ICS 31.080.99 ISBN 978-2-8322-1667-5

– 2 – IEC 62047-20:2014  IEC 2014
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
4 Essential ratings and characteristics . 6
4.1 Categorization of gyro . 6
4.2 Absolute maximum ratings . 7
4.3 Normal operating rating . 8
4.4 Characteristics . 8
5 Measuring methods . 10
5.1 Scale factor . 10
5.1.1 Purpose . 10
5.1.2 Measuring circuit (circuit diagram) . 10
5.1.3 Measuring principle . 12
5.1.4 Measurement procedures . 21
5.1.5 Specified conditions . 23
5.2 Cross axis sensitivity . 24
5.2.1 Purpose . 24
5.2.2 Measuring circuit (circuit diagram) . 24
5.2.3 Principle of measurement . 25
5.2.4 Precautions to be observed during the measurements of the angular
rate applied . 27
5.2.5 Measurement procedures . 27
5.2.6 Specified conditions . 27
5.3 Bias . 28
5.3.1 Purpose . 28
5.3.2 Measuring circuit . 28
5.3.3 Principle of measurement . 30
5.3.4 Measurement procedures . 35
5.3.5 Specified conditions . 37
5.4 Output noise . 38
5.4.1 Purpose . 38
5.4.2 Measuring circuit . 38
5.4.3 Principle of measurement . 39
5.4.4 Precautions during measurement . 40
5.4.5 Measurement procedures . 40
5.4.6 Specified conditions . 43
5.5 Frequency band . 43
5.5.1 Purpose . 43
5.5.2 Measuring circuit . 43
5.5.3 Principle of measurement . 45
5.5.4 Precautions during measurement . 47
5.5.5 Measurement procedure . 47
5.5.6 Specified conditions . 49
5.6 Resolution . 49
5.6.1 Purpose . 49

5.6.2 Measuring circuit . 49
5.6.3 Principle of measurement . 49
5.6.4 Measurement procedures . 50
5.6.5 Specified conditions . 51
Annex A (informative) Accuracy of measured value of gyro characteristics . 52
A.1 General . 52
A.2 Angle and angular rate . 52
A.3 Example of angular deviation occurring after calibration . 52
Bibliography . 53

Figure 1 – Example of measuring circuit . 11
Figure 2 – Example of wiring configuration . 12
Figure 3 – Example of measurement data when the angular rate is applied . 13
Figure 4 – Example of scale factor data at each temperature . 15
Figure 5 – Example of relationship between scale factor and scale factor temperature
coefficient at each temperature . 16
Figure 6 – Example of measurement of ratiometric error for the scale factor . 17
Figure 7 – Example measurement of scale factor stability . 19
Figure 8 – Example of measurement of scale factor symmetry . 20
Figure 9 – Measuring circuit for cross axis sensitivity . 25
Figure 10 – Principle of measurement for cross axis sensitivity . 26
Figure 11 – Measuring circuit 1 for bias . 29
Figure 12 – Measuring circuit 2 for bias .
...

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