IEC 62047-7:2011

IEC 62047-7 ®
Edition 1.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des
fréquences radioélectriques
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IEC 62047-7 ®
Edition 1.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 7: Filtre et duplexeur BAW MEMS pour la commande et le choix des
fréquences radioélectriques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX U
ICS 31.080.99 ISBN 978-2-88912-537-1

– 2 – 62047-7  IEC:2011
CONTENTS
FOREWORD . 4
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 Related with BAW filter . 7
3.3 Related with BAW duplexer . 9
3.4 Characteristic parameters . 10
3.4.1 BAW resonator . 10
3.4.2 BAW filter and duplexer . 13
3.4.3 Temperature characteristics . 16
4 Essential ratings and characteristic parameters . 16
4.1 Resonator, filter and duplexer marking . 16
4.2 Additional information . 17
5 Test methods . 17
5.1 Test procedure . 17
5.2 RF characteristics . 19
5.2.1 Insertion attenuation, IA . 19
5.2.2 Return attenuation, RA . 20
5.2.3 Bandwidth . 21
5.2.4 Isolation . 21
5.2.5 Ripple . 22
5.2.6 Voltage standing wave ratio (VSWR) . 22
5.2.7 Impedances of input and output . 23
5.3 Reliability test method . 23
5.3.1 Test procedure . 23
Annex A (informative) Geometries of BAW resonators . 25
Annex B (informative) Operation of BAW resonators . 26
Bibliography . 28

Figure 1 – Basic structure of BAW resonator . 7
Figure 2 – Topologies for BAW filter design . 8
Figure 3 – Frequency responses of ladder and lattice type BAW filters . 8
Figure 4 – An example of BAW duplexer configuration . 9
Figure 5 – Equivalent circuit of BAW resonator (one-port resonator) . 10
Figure 6 – Measurement procedure of BAW filters and duplexers . 18
Figure 7 – Electrical measurement setup of BAW resonators, filters and duplexers . 19
Figure 8 – Insertion attenuation of BAW filter . 20
Figure 9 – Return attenuation of BAW filter . 21
Figure 10 – Isolation (Tx-Rx) of BAW duplexer . 22
Figure 11 – Ripple of BAW filter . 22
Figure 12 – Smith chart plot of input and output impedances of BAW filter . 23
Figure 13 – Block diagram of a test setup for evaluating the reliability of BAW
resonators and filters . 24

62047-7  IEC:2011 – 3 –
Figure A.1 – Geometry comparison of BAW resonators . 25
Figure B.1 – Modified BVD (Butterworth-Van Dyke) equivalent circuit model . 27

– 4 – 62047-7  IEC:2011
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 7: MEMS BAW filter and duplexer
for radio frequency control and selection

FOREWORD
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International Standard IEC 62047-7 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
...