IEC 62047-28:2017

IEC 62047-28 ®
Edition 1.0 2017-01
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 28: Performance testing method of vibration-driven MEMS electret energy
harvesting devices
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IEC 62047-28 ®
Edition 1.0 2017-01
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices – Micro-electromechanical devices –

Part 28: Performance testing method of vibration-driven MEMS electret energy

harvesting devices
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99 ISBN 978-2-8322-3819-6

– 2 – IEC 62047-28:2017  IEC 2017
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
4 Vibration testing equipment . 5
4.1 General . 5
4.2 Vibration exciter . 6
4.3 Mounting bracket . 6
4.4 Vibration or acceleration detector . 6
4.5 Output detector . 7
4.6 Data recorder . 7
5 Vibration-driven MEMS energy harvesting devices for testing . 7
5.1 General . 7
5.2 Electrical output . 7
6 Test conditions . 7
6.1 Vibration frequency . 7
6.2 Vibration acceleration . 7
6.3 Waveform . 7
6.4 External load. 7
6.5 Testing time . 7
6.6 Test environment . 8
7 Measuring procedures . 8
7.1 General . 8
7.2 Vibration frequency response . 8
7.3 Vibration acceleration response . 8
7.4 Measuring conditions and electric characteristics of the external load . 8
8 Test report . 8
Annex A (informative) Example of measurement for electret energy harvester . 10
A.1 General . 10
A.2 Numerical model of electret energy harvester . 10
A.3 An example of in-plane electret energy harvester with comb drives . 14
A.4 Experimental setup and procedure . 15
A.5 Experimental result . 16
Bibliography . 17

Figure 1 – Testing equipment for vibration driven MEMS electret energy harvesting
devices . 6
Figure A.1 – Basic configuration of in-plane electret energy harvester . 11
Figure A.2 – Alternative configuration of in-plane electret energy harvester with
patterned electrets and electrodes . 13
Figure A.3 – In-plane electret energy harvester with comb drives . 14
Figure A.4 – In-plane electret energy harvester with comb drives mounted onto a PC
board . 14
Figure A.5 – Output detector for electret energy harvester . 15
Figure A.6 – Experimental results . 16

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 28: Performance testing method of vibration-driven
MEMS electret energy harvesting devices

FOREWORD
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International Standard IEC 62047-28 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
FDIS Report on voting
47F/266/FDIS 47F/271/RVD
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

– 4 – IEC 62047-28:2017  IEC 2017
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devices – Micro-electromechanical devices, can be found on the IEC website.
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SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 28: Performance testing method of vibration-driven
MEMS electret energy harvesting devices

1 Scope
This part of IEC 62047 specifies terms and definitions, and a performance testing method of
vibration driven MEMS electret energy harvesting devices to determine the characteristic
parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose
electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges
and are fabricated by MEMS processes such as etching, photolithography or deposition.
2 Normative references
There are no norm
...