IEC 62047-21:2014

IEC 62047-21 ®
Edition 1.0 2014-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 21: Test method for Poisson's ratio of thin film MEMS materials

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 21: Méthode d'essai relative au coefficient de Poisson des matériaux
MEMS en couche mince
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IEC 62047-21 ®
Edition 1.0 2014-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –

Part 21: Test method for Poisson's ratio of thin film MEMS materials

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –

Partie 21: Méthode d'essai relative au coefficient de Poisson des matériaux

MEMS en couche mince
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX M
ICS 31.080.99 ISBN 978-2-8322-1650-7

– 2 – IEC 62047-21:2014 © IEC 2014
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms, definitions, symbols and designations . 5
3.1 Terms and definitions. 5
3.2 Symbols and designations . 5
4 Test piece . 6
4.1 General . 6
4.2 Shape of the test piece . 7
4.3 Measurement of dimensions . 7
5 Testing method and test apparatus . 7
5.1 Test principle . 7
5.2 Test machine . 7
5.3 Test procedure. 7
5.3.1 Test procedure for type 1 test piece . 7
5.3.2 Test procedure for type 2 test piece . 8
5.4 Test environment . 8
6 Test report . 8
Annex A (informative) Measurement example of Poisson's ratio using type 1 test piece . 9
A.1 Fabrication of the test piece . 9
A.2 Dimensions of the test piece . 9
A.3 Test procedures . 9
A.4 Test results . 10
Annex B (informative) Analysis of test results obtained from a type 2 test piece . 11
B.1 General . 11
B.2 Evaluation of stress and strain in circular and rectangular membranes . 11
B.3 Evaluation of Poisson’s ratio . 12
Bibliography . 13

Figure 1 – Two types of test pieces for the measurement of Poisson's ratio . 6
Figure A.1 − Optical images of markers for strain measurement by DIC . 9
Figure A.2 – Graphs of load and strain in the longitudinal and transverse directions . 10

Table 1 – Symbols and designations of a test piece . 6

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 21: Test method for Poisson's ratio
of thin film MEMS materials
FOREWORD
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International Standard IEC 62047-21 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47F/185/FDIS 47F/189/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.

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