IEC 62047-15:2015

IEC 62047-15 ®
Edition 1.0 2015-03
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 15: Test method of bonding strength between PDMS and glass

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –
Partie 15: Méthode d'essai de la résistance de collage entre PDMS et verre

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IEC 62047-15 ®
Edition 1.0 2015-03
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –

Part 15: Test method of bonding strength between PDMS and glass

Dispositifs à semiconducteurs – Dispositifs microélectromécaniques –

Partie 15: Méthode d'essai de la résistance de collage entre PDMS et verre

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.080.99 ISBN 978-2-8322-2291-1

– 2 – IEC 62047-15:2015 © IEC 2015

CONTENTS
FOREWORD . 3

1 Scope . 5

2 Normative references . 5

3 Terms and definitions . 5

4 Testing method . 6

4.1 Visual test . 6

4.1.1 General . 6
4.1.2 Equipment . 6
4.1.3 Procedure . 6
4.1.4 Visual test results . 6
4.2 Bonding strength test . 6
4.2.1 General . 6
4.2.2 Sample preparation . 7
4.2.3 Procedure . 7
4.2.4 Result of blister test . 8
4.3 Contact angle measurement . 8
4.3.1 General . 8
4.3.2 Equipment . 8
4.3.3 Procedure . 8
4.3.4 Result of test . 9
4.4 Hermeticity test . 9
4.4.1 General . 9
4.4.2 Equipment . 9
4.4.3 Procedure . 10
4.4.4 Result of test . 10
Bibliography . 11

Figure 1 – Blister mask . 7
Figure 2 – PDMS blister . 8
Figure 3 – Contact angle measurement of water drop on PDMS . 9
Figure 4 – Test set-up for hermeticity . 10

Table 1 − Result of visual test . 6

INTERNATIONAL ELECTROTECHNICAL COMMISSION

____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 15: Test method of bonding

strength between PDMS and glass

FOREWORD
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International Standard IEC 62047-15 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47F/208/FDIS 47F/213/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted
...