EN ISO 25178-606:2015

SLOVENSKI STANDARD
01-september-2015
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Geometrical product specification (GPS) - Surface texture: Areal - Part 606: Nominal
characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 606: Merkmale von berührungslos messenden Geräten (Fokusvariation) (ISO 25178
-606:2015)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 606:
Caractéristiques nominales des instruments sans contact (à variation focale) (ISO 25178
-606:2015)
Ta slovenski standard je istoveten z: EN ISO 25178-606:2015
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.30 Merila Measuring instruments
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN ISO 25178-606
NORME EUROPÉENNE
EUROPÄISCHE NORM
June 2015
ICS 17.040.20
English Version
Geometrical product specification (GPS) - Surface texture: Areal
- Part 606: Nominal characteristics of non-contact (focus
variation) instruments (ISO 25178-606:2015)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 606: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 606:
nominales des instruments sans contact (à variation focale) Merkmale von berührungslos messenden Geräten
(ISO 25178-606:2015) (Fokusvariation) (ISO 25178-606:2015)
This European Standard was approved by CEN on 21 February 2015.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2015 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-606:2015 E
worldwide for CEN national Members.

Contents Page
European foreword .3

European foreword
This document (EN ISO 25178-606:2015) has been prepared by Technical Committee ISO/TC 213
“Dimensional and geometrical product specifications and verification” in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by December 2015, and conflicting national standards shall be withdrawn
at the latest by December 2015.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-606:2015 has been approved by CEN as EN ISO 25178-606:2015 without any
modification.
INTERNATIONAL ISO
STANDARD 25178-606
First edition
2015-06-15
Geometrical product specification
(GPS) — Surface texture: Areal —
Part 606:
Nominal characteristics of non-contact
(focus variation) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 606: Caractéristiques nominales des instruments sans contact
(à variation de focale)
Reference number
ISO 25178-606:2015(E)
©
ISO 2015
ISO 25178-606:2015(E)
© ISO 2015, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
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copyright@iso.org
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ii © ISO 2015 – All rights reserved

ISO 25178-606:2015(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
3.1 Terms and definitions related to all areal surface texture measurement methods . 2
3.2 Terms and definitions related to x- and y-scanning systems . 9
3.3 Terms and definitions related to optical systems .11
3.4 Terms and definitions related to optical properties of the workpiece .13
3.5 Terms and definitions specific to focus variation instruments .13
4 Description of the influence quantities .16
4.1 General .16
4.2 Overview .17
4.3 Influence quantities .17
Annex A (informative) Components of a focus variation microscope .19
Annex B (informative) Relation to the GPS matrix model .25
Bibliography .27
ISO 25178-606:2015(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any
patent rights identified during the development of the document will be in the Introduction and/or on
the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical Barriers
to Trade (TBT), see the following URL: Foreword — Supplementary information.
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specification
(GPS) — Surface texture: Areal:
— Part 1: Indication des états de surface
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Material measures
— Part 71: Software measurement standards
— Part 72: Format de fichier XML x3p
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments

iv © ISO 2015 – All rights reserved

ISO 25178-606:2015(E)
The following parts are planned:
— Part 73: Defects on material measures — Terms and definitions
— Part 600: Metrological characteristics for areal-topography measuring methods
— Part 607: Nominal characteristics of non-contact (imaging confocal microscopy) instruments
ISO 25178-606:2015(E)
Introduction
This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as
a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on
areal surface texture.
The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this
part of ISO 25178 is a part of. The fundamental rules of ISO/GPS given in ISO 8015 apply to this part of
ISO 25178 and the default decision rules given in ISO 14253-1 apply to specifications made in accordance
with this part of ISO 25178, unless otherwise indicated.
For more detailed information of the relation of this part of ISO 25178 to other standards and the GPS
matrix model, see Annex B.
This part of ISO 25178 describes the metrological characteristics of focus variation microscopes
designed for the measurement of surface topography maps.
For more detailed information on the focus variation technique, see Annex A.
NOTE Portions of this part of ISO 25178, particularly the informative sections, describe patented systems
and methods. This information is provided only to assist users in understanding the operating principles of focus
variation. This part of ISO 25178 is not intended to establish priority for any intellectual property, nor does it
imply a license to proprietary
...