SIST EN ISO 25178-606:2015

SLOVENSKI STANDARD
SIST EN ISO 25178-606:2015
01-september-2015
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Geometrical product specification (GPS) - Surface texture: Areal - Part 606: Nominal
characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 606: Merkmale von berührungslos messenden Geräten (Fokusvariation) (ISO 25178
-606:2015)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 606:
Caractéristiques nominales des instruments sans contact (à variation focale) (ISO 25178
-606:2015)
Ta slovenski standard je istoveten z: EN ISO 25178-606:2015
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.30 Merila Measuring instruments
SIST EN ISO 25178-606:2015 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 25178-606:2015

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SIST EN ISO 25178-606:2015

EUROPEAN STANDARD
EN ISO 25178-606

NORME EUROPÉENNE

EUROPÄISCHE NORM
June 2015
ICS 17.040.20
English Version
Geometrical product specification (GPS) - Surface texture: Areal
- Part 606: Nominal characteristics of non-contact (focus
variation) instruments (ISO 25178-606:2015)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 606: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 606:
nominales des instruments sans contact (à variation focale) Merkmale von berührungslos messenden Geräten
(ISO 25178-606:2015) (Fokusvariation) (ISO 25178-606:2015)
This European Standard was approved by CEN on 21 February 2015.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2015 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-606:2015 E
worldwide for CEN national Members.

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SIST EN ISO 25178-606:2015
EN ISO 25178-606:2015 (E)
Contents Page
European foreword .3

2

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SIST EN ISO 25178-606:2015
EN ISO 25178-606:2015 (E)
European foreword
This document (EN ISO 25178-606:2015) has been prepared by Technical Committee ISO/TC 213
“Dimensional and geometrical product specifications and verification” in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by December 2015, and conflicting national standards shall be withdrawn
at the latest by December 2015.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece,
Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal,
Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-606:2015 has been approved by CEN as EN ISO 25178-606:2015 without any
modification.

3

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SIST EN ISO 25178-606:2015

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SIST EN ISO 25178-606:2015
INTERNATIONAL ISO
STANDARD 25178-606
First edition
2015-06-15
Geometrical product specification
(GPS) — Surface texture: Areal —
Part 606:
Nominal characteristics of non-contact
(focus variation) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 606: Caractéristiques nominales des instruments sans contact
(à variation de focale)
Reference number
ISO 25178-606:2015(E)
©
ISO 2015

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SIST EN ISO 25178-606:2015
ISO 25178-606:2015(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2015, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
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ISO copyright office
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Tel. +41 22 749 01 11
Fax +41 22 749 09 47
copyright@iso.org
www.iso.org
ii © ISO 2015 – All rights reserved

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SIST EN ISO 25178-606:2015
ISO 25178-606:2015(E)

Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
3.1 Terms and definitions related to all areal surface texture measurement methods . 2
3.2 Terms and definitions related to x- and y-scanning systems . 9
3.3 Terms and definitions related to optical systems .11
3.4 Terms and definitions related to optical properties of the workpiece .13
3.5 Terms and definitions specific to focus variation instruments .13
4 Description of the influence quantities .16
4.1 General .16
4.2 Overview .17
4.3 Influence quantities .17
Annex A (informative) Components of a focus variation microscope .19
Annex B (informative) Relation to the GPS matrix model .25
Bibliography .27
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SIST EN ISO 25178-606:2015
ISO 25178-606:2015(E)

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any
patent rights identified during the development of the document will be in the Introduction and/or on
the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity
assessment, as well as information about ISO’s adherence to the WTO principles in the Technical Barriers
to Trade (TBT), see the following URL: Foreword — Supplementary information.
The committee responsible for this document is ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specification
(GPS) — Surface texture: Areal:
— Part 1: Indication des états de surface
— Part 2: Terms, definitions and surface texture parameters
— Part 3: Specification operators
— Part 6: Classification of methods for measuring surface texture
— Part 70: Material measures
— Part 71: Software measurement standards
— Part 72: Format de fichier XML x3p
— Part 601: Nominal characteristics of contact (stylus) instruments
— Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
— Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
— Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
— Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments
— Part 606: Nominal characteristics of non-contact (focus variation) instruments
— Part 701: Calibration and measurement standards for contact (stylus) instruments

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SIST EN ISO 25178-606:2015
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The following parts are planned:
— Part 73: Defects on material measures — Terms and definitions
— Part 600: Metrological characteristics for areal-topography measuring methods
— Part 607: Nominal characteristics of non-contact (imaging confocal microscopy) instruments
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SIST EN ISO 25178-606:2015
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Introduction
This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as
a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on
areal surface texture.
The ISO/GPS Masterplan given in ISO/TR 14638 gives an overview of the ISO/GPS system of which this
part of ISO 25178 is a part of. The fundamental rules of ISO/GPS given in ISO 8015 apply to this part of
ISO 25178 and the default decision rules given in ISO 14253-1 apply to specifications made in accordance
with this part of ISO 25178, unless otherwise indicated.
For more detailed information of the relation of this part of ISO 25178 to other standards and the GPS
matrix model, see Annex B.
This part of ISO 25178 describes the metrological characteristics of focus variation microscopes
designed for the measurement of surface topography maps.
For more detailed information on the focus variation technique, see Annex A.
NOTE Portions of this part of ISO 25178, particularly the informative sections, describe patented systems
and methods. This information is provided only to assist users in understanding the operating principles of focus
variation. This part of ISO 25178 is not intended to establish priority for any intellectual property, nor does it
imply a license to proprietary technologies described herein.
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SIST EN ISO 25178-606:2015
INTERNATIONAL STANDARD ISO 25178-606:2015(E)
Geometrical product specification (GPS) — Surface
texture: Areal —
Part 606:
Nominal characteristics of non-contact (focus variation)
instruments
1 Scope
This part of ISO 25178 defines the metrological characteristics of a particular non-contact method
measuring surface texture using a focus variation (FV) sensor.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
ISO 3274:1996, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal
characteristics of contact (stylus) instruments
ISO 4287:1997, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms,
definitions and surface texture parameters
ISO 10934-2:2007, Optics and optical instruments — Vocabulary for microscopy — Part 2: Advanced
techniques in light microscopy
ISO 14978:2006, Geometrical product specifications (GPS) — General concepts and requirements for GPS
measuring equipment
ISO 17450-1, Geometrical product specifications (GPS) — General concepts — Part 1: Model for geometrical
specification and verification
ISO 25178-2:2012, Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms,
definitions and surface texture parameters
ISO 25178-3:2012, Geometrical product specifications (GPS) — Surface texture: Areal — Part 3:
Specification operators
ISO 25178-6:2010, Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification
of methods for measuring surface texture
ISO 25178-601, Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal
characteristics of contact (stylus) instruments
ISO 25178-602, Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal
characteristics of non-contact (confocal chromatic probe) instruments
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 3274, ISO 4287, ISO 10934-2
ISO 17450-1, ISO 14978, ISO 25178-2, ISO 25178-3, ISO 25178-6, ISO 25178-601, ISO 25178-602, and the
following apply.
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3.1 Terms and definitions related to all areal surface texture measurement methods
3.1.1
areal reference
component of the instrument that generates a reference surface with respect to which the surface
topography is measured
3.1.2
coordinate system of the instrument
right hand orthonormal system of axes (x, y, z) defined as:
— (x, y) is the plane established by the areal reference (3.1.1) of the instrument (note that there are
optical instruments that do not posses a physical areal guide);
— z-axis is mounted parallel to the optical axis and is perpendicular to the (x, y) plane for an
optical instrument
Note 1 to entry: See Figure 1.
Note 2 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis (this note is valid for
instruments that scan in the horizontal plane).
Note 3 to entry: See also specification coordinate system [ISO 25178-2:2012, 3.1.2] and measurement coordinate
system [ISO 25178-6:2010, 3.1.1].
3.1.3
measurement loop
closed chain which comprises of all the components connecting the workpiece and the probe, e.g. the
means of positioning, the work holding fixture, the measuring stand, the drive unit, and the probing
system (3.5.3)
Note 1 to entry: See Figure 1.
Note 2 to entry: The measurement loop will be subjected to external and internal disturbances that influence the
measurement uncertainty.
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Key
1 coordinate system of the instrument
2 measurement loop
Figure 1 — Coordinate system and measurement loop of the instrument
3.1.4
real surface of a workpiece
set of features which physically exist and separate the entire workpiece from the surrounding medium
Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the
measurement process.
Note 2 to entry: See also mechanical surface [ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1] and
electromagnetic surface [ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2].
Note 3 to entry: The electromagnetic surface considered for one type of optical instrument can be different from
the electromagnetic surface for other types of optical instruments.
[SOURCE: ISO 17450-1:2011]
3.1.5
surface probe
device that converts the surface height into a signal during measurement
Note 1 to entry: In earlier International Standards, this was termed transducer.
3.1.6
measuring volume
range of the instrument stated in terms of the limits on all three coordinates measured by the instrument
Note 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by the
measuring range of the x- and y- drive units and the measuring range of the z-probing system.
[SOURCE: ISO 25178-601:2010, 3.4.1]
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3.1.7
response curve
F , F , F
x y z
graphical representation of the function that describes the relation between the actual quantity and the
measured quantity
Note 1 to entry: See Figure 2.
Note 2 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity x
M
(respectively y or z ).
M M
Note 3 to entry: The response curve can be used for adjustments and error corrections.
[SOURCE: ISO 25178-601:2010, 3.4.2]
3.1.8
amplification coefficient
α , α , α
x y z
slope of the linear regression curve obtained from the response curve (3.1.7)
Note 1 to entry: See Figure 3.
Note 2 to entry: There will be amplification coefficients applicable to the x, y, and z quantities.
Note 3 to entry: The ideal response is a straight line with a slope equal to 1, which means that the values of the
measurand are equal to the values of the input quantities.
Note 4 to entry: See also sensitivity of a measuring system (ISO/IEC Guide 99:2007, 4.12).
[SOURCE: ISO 25178-601:2010, 3.4.3, modified — Note 4 to entry has been added.]
Key
1 response curve
2 assessment of the linearity deviation by polynomial approximation
3 measured quantities
4 input quantities
Figure 2 — Example of a non-linear response curve
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Key
1 measured quantities
2 input quantities
3 ideal response curve
4 linearization of the response curve of Figure 2
5 line from which the amplification coefficient α (slope) is derived
6 local residual correction error
Figure 3 — Example of the linearization of a response curve
3.1.9
instrument noise
N
I
internal noise added to the output signal caused by the instrument, if ideally placed in a noise-free environment
Note 1 to entry: Internal noise can be due to electronic noise, e.g. amplifiers, or to optical noise, e.g. stray light.
Note 2 to entry: This noise typically has high frequencies and it limits the ability of the instrument to detect small
scale spatial wavelengths of the surface texture.
Note 3 to entry: The S-filter, according to ISO 25178-3:2012, can reduce this noise.
Note 4 to entry: For some instruments, instrument noise cannot be estimated because the instrument only takes
data while moving.
3.1.10
measurement noise
N
M
noise added to the output signal occurring during the normal use of the instrument
Note 1 to entry: Notes 2 and 3 of 3.1.9 apply as well to this definition.
Note 2 to entry: Measurement noise includes the instrument noise (3.1.9).
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3.1.11
surface topography measurement repeatability
repeatability of topography map in successive measurements of the same surface under the same
conditions of measurement
Note 1 to entry: Surface topography measurement repeatability provides a measure of the likely agreement
between repeated measurements normally expressed as a standard deviation.
Note 2 to entry: See ISO/IEC Guide 99:2007, 2.15, and 2.21 for the general discussion of repeatability and
related concepts.
Note 3 to entry: Evaluation of surface topography repeatability is a common method for determining the
measurement noise (3.1.10).
3.1.12
sampling interval in x (respectively y)
D (D )
x y
distance between two adjacent measured points along the x-axis (respectively y-axis)
Note 1 to entry: In many microscopy systems, the sampling interval is determined through the optical
magnification by the distance between sensor elements in a camera called pixels. For such systems, the terms
pixel pitch and pixel spacing are often used interchangeably with the term sampling interval. Another term, pixel
width, indicates a length associated with one side (x or y) of the sensitive area of a single pixel and is always
smaller than the pixel spacing. Yet another term, sampling zone, may be used to indicate the length or region over
which a height sample is determined. This quantity could either be larger or smaller than the sampling interval.
3.1.13
digitisation step in z
D
Z
smallest height variation along the z-axis between two ordinates of the extracted surface
3.1.14
lateral resolution
R
l
smallest distance between two features which can be detected
[SOURCE: ISO 25178-601:2010, 3.4.10]
3.1.15
width limit for full height transmission
W
l
width of the narrowest rectangular groove whose measured height remains unchanged by the measurement
[SOURCE: ISO 25178-601:2010, 3.4.11]
Note 1 to entry: Instrument properties such as the sampling interval in x and y, the digitization step in z, and
the short wavelength cut-off filter can influence the lateral resolution (3.1.14) and the width limit for full height
transmission.
Note 2 to entry: When determining this parameter by measurement, the depth of the rectangular groove should
be close to that of the surface to be measured.
EXAMPLE 1 Measuring a grid, for which the grooves are wider than the width limit for full height transmission,
leads to a correct measurement of the groove depth (see Figure 4 and Figure 5).

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Figure 4 — Grid with horizontal spacing where t is greater than or equal to W
l
Figure 5 — Measurement of the grid in Figure 4; the spacing and depth of the grid are
measured correctly
EXAMPLE 2 Measuring a grid, for which the grooves are narrower than the width limit for full height transmission
(3.1.15), leads to an incorrect groove depth (see Figure 6 and Figure 7). In this situation, the signal is generally
disturbed and may contain non-measured points.

l
Figure 6 — Grid with horizontal spacing t’ smaller than W
l

Figure 7 — Measurement of the grid in Figure 6; the spacing is measured correctly, but the
depth is smaller (d’ < d)
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3.1.16
lateral period limit
D
LIM
the spatial period of a sinusoidal profile at which the height response of an instrument falls to 50%
Note 1 to entry: The lateral period limit is one metric for describing spatial or lateral resolution of a surface
topography measuring instrument and its ability to distinguish and measure closely spaced surface features.
Its value depends on the heights of surface features and on the method used to probe the surface. Typical values,
mainly for noise suppression, are listed in ISO 25178-3:2012, Table 3, in comparison with the recommended values
for short wavelength (s-filters), and sampling intervals.
Note 2 to entry: Spatial period is the same concept as spatial wavelength and is the inverse of spatial frequency.
Note 3 to entry: One factor related to the value of D for optical tools is, e.g. the Rayleigh criterion (3.3.7);
LIM
another is the degree of focus of the objective on the surface.
Note 4 to entry: One factor related to the value of D for contact tools is the stylus tip radius, r
LIM TIP
(see ISO 25178-601).
Note 5 to entry: Other terms related to lateral period limit are structural resolution and topographic spatial resolution.
3.1.17
maximum local slope
greatest local slope of a surface feature that can be assessed by the probing system
Note 1 to entry: The term “local slope” is defined in ISO 4287:1997, 3.2.9.
3.1.18
instrument transfer function
ITF
f
ITF
function of spatial frequency describing how a surface topography measuring instrument responds to
an object surface topography having a specific spatial frequency
Note 1 to entry: Ideally, the ITF tells us what the measured amplitude of a sinusoidal grating of a specified spatial
frequency ν would be relative to the true amplitude of the grating.
Note 2 to entry: For several types of optical instruments, the ITF may be a non-linear function of height, except for
heights much smaller than the optical wavelength.
3.1.19
hysteresis
x , y , z
HYS HYS HYS
property of measuring equipment or characteristic, whereby the indication of the equipment or value of
the characteristic depends on the orientation of the preceding stimuli
Note 1 to entry: Hysteresis can also depend, for example, on the distance travelled after the orientation of
stimuli has changed.
Note 2 to entry: For lateral scanning systems (3.2.2), the hysteresis is mainly a repositioning error.
[SOURCE: ISO 14978:2006, 3.24]
3.1.20
metrological characteristic (of a measuring instrument)
characteristic of measuring equipment which may influence the results of
the measurement
Note 1 to entry: Calibration of metrological characteristics may be necessary.
Note 2 to entry: The metrological characteristics have an immediate contribution to measurement uncertainty.
Note 3 to entry: Metrological characteristics for areal surface texture measuring instruments are given in Table 1.
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[SOURCE ISO 14978:2006, 3.12]
Table 1 — List of metrological characteristics for surface texture measurement methods
Metrological Symbol Definition Main
characteristic potential
...