Geometrical product specifications (GPS) - Surface texture: Areal - Part 601: Design and characteristics of contact (stylus) instruments (ISO 25178-601:2025)

This document specifies the design, metrological characteristics and nominal characteristics of contact stylus instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 601: Aufbau und Merkmale von berührend messenden Geräten (mit Taster) (ISO 25178-601:2025)

Dieses Dokument legt die Konstruktion, metrologischen Merkmale und Merkmale von berührend messenden Geräten (mit Taster) zur Messung von flächenhaften Oberflächentopographien fest. Da Oberflächenprofile aus Daten von Oberflächentopographien extrahiert werden können, sind die meisten Begriffe, die in diesem Dokument festgelegt sind, auch auf Profilmessungen anwendbar.

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 601: Conception et caractéristiques des instruments à contact (à stylet) (ISO 25178-601:2025)

Le présent document spécifie la conception, les caractéristiques métrologiques et les caractéristiques nominales des instruments à contact à stylet pour le mesurage surfacique de la topographie de surface. Comme les profils de surface peuvent être extraits des données de topographie de surface surfacique, les méthodes décrites dans le présent document s'appliquent également aux mesurages de profil.

Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 601. del: Konstrukcije in značilnosti kontaktnih (s tipalom) instrumentov (ISO 25178-601:2025)

Ta dokument določa konstrukcije ter meroslovne in nominalne značilnosti kontaktnih instrumentov s tipalom za ploskovno merjenje topografije površine. Ker je mogoče profile površine izluščiti iz ploskovnih podatkov topografije površine, se metode, opisane v tem dokumentu, uporabljajo tudi za meritve profiliranja.

General Information

Status
Published
Public Enquiry End Date
26-Dec-2023
Publication Date
12-Mar-2025
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
10-Mar-2025
Due Date
15-May-2025
Completion Date
13-Mar-2025

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SIST EN ISO 25178-601:2025
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Standards Content (Sample)


SLOVENSKI STANDARD
01-maj-2025
Specifikacija geometrijskih veličin izdelka - Tekstura površine: ploskovna - 601.
del: Konstrukcije in značilnosti kontaktnih (s tipalom) instrumentov (ISO 25178-
601:2025)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 601: Design and
characteristics of contact (stylus) instruments (ISO 25178-601:2025)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 601: Aufbau und Merkmale von berührend messenden Geräten (mit Taster) (ISO
25178-601:2025)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 601:
Conception et caractéristiques des instruments à contact (à stylet) (ISO 25178-
601:2025)
Ta slovenski standard je istoveten z: EN ISO 25178-601:2025
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EN ISO 25178-601
EUROPEAN STANDARD
NORME EUROPÉENNE
February 2025
EUROPÄISCHE NORM
ICS 17.040.20 Supersedes EN ISO 25178-601:2010
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 601: Design and characteristics of contact
(stylus) instruments (ISO 25178-601:2025)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 601: Conception et Oberflächenbeschaffenheit: Flächenhaft - Teil 601:
caractéristiques des instruments à contact (palpeur) Aufbau und Merkmale von berührend messenden
(ISO 25178-601:2025) Geräten (mit Taster) (ISO 25178-601:2025)
This European Standard was approved by CEN on 21 February 2025.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2025 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-601:2025 E
worldwide for CEN national Members.

Contents Page
European foreword . 3

European foreword
This document (EN ISO 25178-601:2025) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by August 2025, and conflicting national standards shall
be withdrawn at the latest by August 2025.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes EN ISO 25178-601:2010.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 25178-601:2025 has been approved by CEN as EN ISO 25178-601:2025 without any
modification.
International
Standard
ISO 25178-601
Second edition
Geometrical product specifications
2025-02
(GPS) — Surface texture: Areal —
Part 601:
Design and characteristics of
contact (stylus) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 601: Conception et caractéristiques des instruments à
contact (palpeur)
Reference number
ISO 25178-601:2025(en) © ISO 2025

ISO 25178-601:2025(en)
© ISO 2025
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii
ISO 25178-601:2025(en)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Instrument requirements . 4
5 Metrological characteristics . 4
6 Design features . 5
6.1 General .5
6.2 Nominal values for characteristics of a contact stylus instrument .5
6.2.1 Stylus tip geometry .5
6.2.2 Static measuring force.5
7 General information . 5
Annex A (informative) Principles of contact stylus instruments for areal surface topography
measurement . 6
Annex B (informative) Sources of measurement error for contact stylus instruments .11
Annex C (informative) Background regarding changes from ISO 3274 .13
Annex D (informative) Relationship to the GPS matrix model .15
Bibliography .16

iii
ISO 25178-601:2025(en)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
ISO technical committees. Each member body interested in a subject for which a technical committee
has been established has the right to be represented on that committee. International organizations,
governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely
with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described
in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types
of ISO document should be noted. This document was drafted in accordance with the editorial rules of the
ISO/IEC Directives, Part 2 (see www.iso.org/directives).
ISO draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent
rights in respect thereof. As of the date of publication of this document, ISO had not received notice of (a)
patent(s) which may be required to implement this document. However, implementers are cautioned that
this may not represent the latest information, which may be obtained from the patent database available at
www.iso.org/patents. ISO shall not be held responsible for identifying any or all such patent rights.
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and expressions
related to conformity assessment, as well as information about ISO's adherence to the World Trade
Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification, in collaboration with the European Committee for Standardization (CEN)
Technical Committee CEN/TC 290, Dimensional and geometrical product specification and verification, in
accordance with the Agreement on technical cooperation between ISO and CEN (Vienna Agreement).
This second edition cancels and replaces the first edition (ISO 25178-601:2010), which has been technically
revised, and cancels and replaces ISO 3274:1996, whose contents have been revised and incorporated into
this document and others, see Annex C for more information.
The main changes are as follows:
— removal of information about the general metrological characteristics for the areal topography measuring
method, which are specified in ISO 25178-600;
— removal of the terms and definitions now specified in ISO 25178-600;
— revision of all terms and definitions for clarity and consistency with other ISO standards documents;
— addition of Clause 4 for instrument requirements, which summarizes normative features and
characteristics;
— addition of an information flow concept diagram in Clause 4;
— addition of Clause 5 on metrological characteristics;
— addition of Clause 6 on design features, which clarifies the types of instruments relevant to this document;
— revision of Annex A describing the principles of instruments addressed by this document;
— addition of Annex B on the metrological characteristics and influence quantities; replacement of the
normative table of influence quantities with an informative description of common error sources and
how these relate to the metrological characteristics in ISO 25178-600;

iv
ISO 25178-601:2025(en)
— inclusion of nominal characteristics of a contact stylus instrument, which have been transferred from
ISO 3274 to this document.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.

v
ISO 25178-601:2025(en)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general GPS
standard (see ISO 14638). It influences chain link F of the chains of standards on profile and areal surface
texture.
The ISO GPS matrix model given in ISO 14638 gives an overview of the ISO GPS system of which this
document is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this document and the
default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information on the relation of this document to other standards and the GPS matrix model,
see Annex D.
This document includes terms and definitions relevant to contact stylus instruments for the measurement
of areal surface topography. Annex A briefly summarizes contact stylus instruments and methods to clarify
the definitions and to provide a foundation for Annex B, which describes common sources of uncertainty
and their relation to the metrological characteristics of contact stylus instruments.
The stylus instrument for the profile method was previously defined in ISO 3274. Based on this, this
document was published in 2010. Since this is the more modern instrument standard and stylus instruments
for the profile method and the areal method differ only in the presence of a y-axis (drive unit y), this edition
of this document replaces not only the previous version of ISO 25178-601 but also ISO 3274:1996 (and the
Technical Corrigendum of 1998), see Annex C for more details.
NOTE Portions of this document, particularly the informative sections, describe patented systems and methods.
This information is provided only to assist users in understanding the operating principles of contact stylus
instruments. This document is not intended to establish priority for any intellectual property, nor does it imply a
license to proprietary technologies described herein.

vi
International Standard ISO 25178-601:2025(en)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 601:
Design and characteristics of contact (stylus) instruments
1 Scope
This document specifies the design, metrological characteristics and nominal characteristics of contact
stylus instruments for the areal measurement of surface topography. Because surface profiles can be
extracted from areal surface topography data, the methods described in this document are also applicable
to profiling measurements.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content constitutes
requirements of this document. For dated references, only the edition cited applies. For undated references,
the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600: Metrological
characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the following apply.
ISO and IEC maintain terminology databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
contact stylus instrument
measuring instrument that explores surfaces using a stylus (3.5) that physically moves along the surface to
acquire a representation of the surface and provide the data for further computation (analytics)
Note 1 to entry: The method of using a contact stylus instrument is defined in ISO 25178-6, and is called “contact
stylus scanning”.
Note 2 to entry: See Figure 2 for an information flow concept diagram for a contact stylus instrument.
3.2
probing system
component of the instrument consisting of a probe (3.3), a stylus (3.5) and an optional
stylus changing interface (3.7)
Note 1 to entry: See Figures A.2 to A.4 for examples of probing systems.

ISO 25178-601:2025(en)
3.3
probe
device that generates the signals during scanning (3.4)
Note 1 to entry: In earlier standards, “transducer” was a separate term and a part of the probe.
3.4
scanning
moving the probe (3.3) over the surface to be measured while the stylus tip (3.6) contacts
the surface
3.5
stylus
mechanical device consisting of a stylus tip (3.6) and a probe (3.3) arm
Note 1 to entry: For coordinate measuring machines, the term “shaft” is used instead of “probe arm”, see
ISO 10360-1:2000, 4.1.
Note 2 to entry: A typical stylus is shown in Figure 1. Other designs are also used, e.g. flexures, linear probes.
Key
1 stylus tip H height of the probe arm
2 pivot r tip radius
tip
L length of the probe arm γ cone angle of the tip
Figure 1 — Characterization of the typical stylus
3.6
stylus tip
element that consists of a nominally right circular cone of defined cone angle and of a
nominally spherical tip of defined radius
3.7
stylus changing interface
element that enables the change of the stylus (3.5)
Note 1 to entry: There are probing systems (3.2) without a stylus changing interface.
3.8
linear reference guide
component of the instrument that generates the intersection plane and the reference profile, in which
the probing system (3.2) moves relative to the surface being measured according to a theoretically exact
trajectory
ISO 25178-601:2025(en)
3.9
areal reference guide
component(s) of the instrument that generate(s) the reference surface, in which the probing system (3.2)
moves relative to the surface being measured according to a theoretically exact trajectory
Note 1 to entry: In the case of x- and y-scanning areal surface texture measuring instruments, the areal reference
guide establishes a reference surface (see ISO 25178-2:2021, 3.1.10).
Note 2 to entry: The areal reference guide can be achieved through the use of two perpendicular linear reference guides
(3.8) or one reference surface guide.
[SOURCE: ISO 25178-600:2019, 3.2.1, modified — Note 1 to entry has been modified and Note 2 to entry has
been added.]
3.10
lateral scanning system
system that performs the scanning (3.4) of the surface to be measured in the (x, y) plane
Note 1 to entry: There are essentially four components to a surface texture scanning instrument system: the x-axis
drive, the y-axis drive, the z-measurement probe (3.3) and the surface to be measured.
[SOURCE: ISO 25178-600:2019, 3.2.2. modified — Note 2 to entry has been deleted.]
3.11
drive unit x
component of the instrument that moves the probing system (3.2) or the surface being measured along the
reference guide on the x-axis and returns the horizontal position of the measured point in terms of the
lateral x-coordinate
[SOURCE: ISO 25178-600:2019, 3.2.3, modified — “x-drive unit” has been replaced by “drive unit x” as the
term and “of the profile” has been deleted from the definition. Note 1 to entry has been deleted.]
3.12
drive unit y
component of the instrument that moves the probing system (3.2) or the surface being measured along the
reference guide on the y-axis and returns the horizontal position of the measured point in terms of the
lateral y-coordinate
[SOURCE: ISO 25178-600:2019, 3.2.3, modified — “x-drive unit” has been replaced by “drive unit y” as the
term, "x-axis" has been replaced by "y-axis", " x-coordinate" has been replaced by "y-coordinate" and “of the
profile” has been deleted from the definition. Note 1 to entry has been deleted.]
3.13
lateral position sensor
component of the drive unit that provides the lateral position of the measured point
Note 1 to entry: The lateral position is customarily measured or inferred by using, for example, a linear encoder, a
laser interferometer or a rotary encoder coupled with a micrometer screw.
[SOURCE: ISO 25178-600:2019, 3.2.4]
3.14
critical dynamic of the probing system
v
dyn,c
maximum value of the scanning (3.4) speed above which the output signal is distorted
Note 1 to entry: : The critical dynamic of the probing system depends on the mechanical inertia of the moving parts
and the surface to be measured.
Note 2 to entry: Below the critical dynamic of the probing system, a range of measurement speeds is generally
acceptable.
ISO 25178-601:2025(en)
4 Instrument requirements
To perform surface topography measure
...

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