Piezoelectric and dielectric devices for frequency control and selection - Glossary - Part 4-4: Materials - Materials for Surface Acoustic Wave (SAW) devices

Specifies the terms and definitions for single crystal wafers applied for surface acoustic wave (SAW) devices representing the state of the art, which are intended for use in the standards and documents of IEC technical committee 49.

General Information

Status
Published
Publication Date
29-May-2005
Current Stage
DELPUB - Deleted Publication
Start Date
24-Jun-2010
Completion Date
26-Oct-2025
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Overview

IEC TS 61994-4-4:2005 is an important technical specification published by the International Electrotechnical Commission (IEC) that defines the terms and definitions related to materials used for Surface Acoustic Wave (SAW) devices. This document forms part of the IEC 61994 series titled “Piezoelectric and dielectric devices for frequency control and selection – Glossary” and specifically addresses single crystal wafers applied in SAW devices. The scope of this standard includes state-of-the-art materials such as synthetic quartz, lithium niobate, lithium tantalate, lithium tetraborate, and lanthanum gallium silicate.

This specification supports the work of IEC Technical Committee 49, which focuses on piezoelectric and dielectric devices used in frequency control and selection applications. By providing a clear and unified glossary of terminology, IEC TS 61994-4-4 helps ensure consistency and clarity in international standards and technical documentation concerning SAW materials.

Key Topics

Material Definitions for SAW Crystals:

  • As-grown synthetic quartz crystal – Hydrothermally grown single-crystal quartz prior to mechanical fabrication.
  • Lithium niobate (LN) – Single crystals characterized by the chemical formula LiNbO, grown by Czochralski or similar methods.
  • Lithium tantalate (LT) – Crystals described by LiTaO formula, also produced by Czochralski or equivalent processes.
  • Lithium tetraborate (LBO) – Crystals with formula Li2B4O7, grown by Czochralski or Bridgman techniques.
  • Lanthanum gallium silicate (LGS) – Crystals with La3Ga5SiO14 composition, grown by Czochralski method.

Key Terminologies in SAW Wafer Production:

  • Manufacturing lot – Agreed batch of wafers between supplier and customer.
  • Curie temperature – Temperature marking the transition between ferroelectric and paraelectric phases, essential in LN and LT crystal behavior.
  • Single domain crystal – Crystal with uniform electrical polarization, often achieved by a polarization or poling process.
  • Lattice constant – Unit cell length measured by X-ray techniques, crucial for crystal quality inspection.
  • Orientation flats (Primary and Secondary Flats) – Flat edges on wafers indicating crystallographic orientation and polarity, which correlate with SAW propagation directions.

Wafer Quality and Surface Characteristics:

  • Flatness metrics such as Total Thickness Variation (TTV), Thickness Variation for five points (TV5), Warp, Sori, and Local Thickness Variation (LTV) define wafer surface uniformity and deformation.
  • Back surface roughness and surface orientation are measured following ISO 4287 standards.
  • Bevel (edge profile) specifications indicate wafer perimeter shaping important for handling and device fabrication.
  • Appearance defects definitions include contamination and particulate classifications, guiding quality control.

Applications

IEC TS 61994-4-4 is essential for manufacturers, designers, and researchers involved in the development and production of SAW devices. These devices find widespread use in:

  • Frequency control components such as filters, oscillators, and resonators within telecommunications.
  • High-precision timing devices in mobile phones, GPS, and RF systems.
  • Sensors and signal processing units leveraging SAW technology for detection and measurement.
  • Establishing quality control benchmarks for single crystal wafers to ensure consistent device performance and reliability.
  • Facilitating international standard harmonization in terminology and measurement, aiding global supply chains and technology exchange.

The glossary standard enables clear communication on material properties and their implications on device functionality, helping engineers optimize SAW device performance based on crystal characteristics and wafer quality parameters.

Related Standards

IEC TS 61994-4-4 complements and references multiple international standards that collectively govern frequency control materials and devices:

  • IEC 60050-561 – International Electrotechnical Vocabulary for piezoelectric devices.
  • IEC 60758 – Specifications and usage guide for synthetic quartz crystals.
  • IEC 61994-4-1 – Glossary for piezoelectric materials focusing on synthetic quartz.
  • IEC 62276 – Specifications and measurement methods for single crystal wafers used in SAW devices.
  • ISO 4287 – Standard for surface texture and roughness assessment using profile methods.

Together, this network of standards forms a comprehensive framework that supports the design, manufacturing, and quality assurance of SAW materials and devices worldwide.


Keywords: IEC TS 61994-4-4, SAW device materials, single crystal wafers, lithium niobate, lithium tantalate, synthetic quartz, wafer flatness, thickness variation, piezoelectric materials, frequency control devices, international standards, surface acoustic wave devices glossary.

Technical specification
IEC TS 61994-4-4:2005 - Piezoelectric and dielectric devices for frequency control and selection - Glossary - Part 4-4: Materials - Materials for Surface Acoustic Wave (SAW) devices Released:5/30/2005 Isbn:2831879442
English language
11 pages
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Standards Content (Sample)


TECHNICAL IEC
SPECIFICATION TS 61994-4-4
First edition
2005-05
Piezoelectric and dielectric devices
for frequency control and selection –
Glossary –
Part 4-4:
Materials – Materials for Surface
Acoustic Wave (SAW) devices
Reference number
IEC/TS 61994-4-4:2005(E)
Publication numbering
As from 1 January 1997 all IEC publications are issued with a designation in the

60000 series. For example, IEC 34-1 is now referred to as IEC 60034-1.

Consolidated editions
The IEC is now publishing consolidated versions of its publications. For example,

edition numbers 1.0, 1.1 and 1.2 refer, respectively, to the base publication, the

base publication incorporating amendment 1 and the base publication incorporating

amendments 1 and 2.
Further information on IEC publications
The technical content of IEC publications is kept under constant review by the IEC,
thus ensuring that the content reflects current technology. Information relating to
this publication, including its validity, is available in the IEC Catalogue of
publications (see below) in addition to new editions, amendments and corrigenda.
Information on the subjects under consideration and work in progress undertaken
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TECHNICAL IEC
SPECIFICATION TS 61994-4-4
First edition
2005-05
Piezoelectric and dielectric devices
for frequency control and selection –
Glossary –
Part 4-4:
Materials – Materials for Surface
Acoustic Wave (SAW) devices
 IEC 2005  Copyright - all rights reserved
No part of this publication may be reproduced or utilized in any form or by any means, electronic or
mechanical, including photocopying and microfilm, without permission in writing from the publisher.
International Electrotechnical Commission, 3, rue de Varembé, PO Box 131, CH-1211 Geneva 20, Switzerland
Telephone: +41 22 919 02 11 Telefax: +41 22 919 03 00 E-mail: inmail@iec.ch Web: www.iec.ch
PRICE CODE
Commission Electrotechnique Internationale L

International Electrotechnical Commission
МеждународнаяЭлектротехническаяКомиссия
For price, see current catalogue

– 2 – TS 61994-4-4  IEC:2005(E)

INTERNATIONAL ELECTROTECHNICAL COMMISSION

____________
PIEZOELECTRIC AND DIELECTRIC DEVICES

FOR FREQUENCY CONTROL AND SELECTION –

GLOSSARY –
Part 4-4: Materials –
Materials for Surface Acoustic Wave (SAW) devices

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,
Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC
Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested
in the subject dealt with may participate in this preparatory work. International, governmental and non-
governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely
with the International Organization for Standardization (ISO) in accordance with conditions determined by
agreement between the two organizations.
2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
interested IEC National Committees.
3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC
Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any
misinterpretation by any end user.
4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications
transparently to the maximum extent possible in their national and regional publications. Any divergence
between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in
the latter.
5) IEC provides no marking procedure to indicate its approval and cannot be rendered responsible for any
equipment declared to be in conformity with an IEC Publication.
6) All users should ensure that they have the latest edition of this publication.
7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and
members of its technical committees and IEC National Committees for any personal injury, property damage or
other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and
expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC
Publications.
8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of

patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
The main task of IEC technical committees is to prepare International Standards. In
exceptional circumstances, a technical committee may propose the publication of a technical
specification when
• the required support cannot be obtained for the publication of an International Standard,
despite repeated efforts, or
• the subject is still under technical development or where, for any other reason, there is the
future but no immediate possibility of an agreement on an International Standard.
Technical specifications are subject to review within three years of publication to decide
whether they can be transformed into International Standards.
IEC 61994-4-4, which is a technical specification, has been prepared by IEC technical
committee 49: Piezoelectric and dielectric devices for frequency control and selection.

TS 61994-4-4  IEC:2005(E) – 3 –

The text of this technical specification is based on the following documents:

Enquiry draft Report on voting

49/691/DTS 49/700/RVC
Full information on the voting for the approval of this technical specification can be found in

the report on voting indicated in the above table.

This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.

IEC 61994 consists of the following parts under the general title Piezoelectric and dielectric
devices for frequency control and selection – Glossary:
Part 1: Piezoelectric and dielectric resonators
Part 2: Piezoelectric and dielectric filters
Part 3: Piezoelectric and dielectric oscillators
Part 4-1: Piezoelectric materials – Synthetic quartz crystal
Part 4-2: Piezoelectric and dielectric materials – Piezoelectric ceramics
Part 4-4: Materials – Materials for Surface Acoustic Wave (SAW) devices

The committee has decided that the contents of this publication will remain unchanged until
the maintenance result date indicated on the IEC web site under "http://webstore.iec.ch" in
the data related to the specific publication. At this date, the publication will be
• transformed into an International standard,
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.

– 4 – TS 61994-4-4  IEC:2005(E)

PIEZOELECTRIC AND DIELECTRIC DEVICES

FOR FREQUENCY CONTROL AND SELECTION –

GLOSSARY –
Part 4-4: Materials –
Materials for Surface Acoustic Wave (SAW) devices

1 Scope
This part of IEC 61994 specifies the terms and definitions for single crystal wafers applied for
surface acoustic wave (SAW) devices representing the state of the art, which are intended for
use in the standards and documents of IEC TC 49.
2 Normative references
The following referenced documents are indispensable for the application of this document.
For dated references, only the edition cited applies. For undated references, the latest edition
of the referenced document (including any amendments) applies.
IEC 60050-561:1991, International Electrotechnical Vocabulary (IEV) – Chapter 561: Piezo-
electric devices for frequency control and selection
Amendment 1 (1995)
Amendment 2 (1997)
IEC 60758:2004, Synthetic quartz crystal – Specifications and guide to the use
IEC 61994-4-1:2001, Piezoelectric and dielectric devices for frequency control and selection –
Glossary – Part 4-1: Piezoelectric materials – Synthetic quartz crystal
IEC 62276:2005, Single crystal wafers for surface acoustic wave (SAW) device applications –
Specifications and measuring methods
ISO 4287, Geometrical Product Specifications (GPS) – Surface texture: Profile method –
Terms, definitions and surface texture parameters

3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1 Single crystals for SAW wafer
3.1.1
as-grown synthetic quartz crystal
single-crystal quartz grown hydrothermally. “As-grown” refers to the state of processing and
indicates a state prior to mechanica
...

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IEC TS 61994-4-4:2005 is a technical specification published by the International Electrotechnical Commission (IEC). Its full title is "Piezoelectric and dielectric devices for frequency control and selection - Glossary - Part 4-4: Materials - Materials for Surface Acoustic Wave (SAW) devices". This standard covers: Specifies the terms and definitions for single crystal wafers applied for surface acoustic wave (SAW) devices representing the state of the art, which are intended for use in the standards and documents of IEC technical committee 49.

Specifies the terms and definitions for single crystal wafers applied for surface acoustic wave (SAW) devices representing the state of the art, which are intended for use in the standards and documents of IEC technical committee 49.

IEC TS 61994-4-4:2005 is classified under the following ICS (International Classification for Standards) categories: 01.040.31 - Electronics (Vocabularies); 31.140 - Piezoelectric devices. The ICS classification helps identify the subject area and facilitates finding related standards.

IEC TS 61994-4-4:2005 has the following relationships with other standards: It is inter standard links to IEC TS 61994-4-4:2010. Understanding these relationships helps ensure you are using the most current and applicable version of the standard.

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