ISO 15471:2016

INTERNATIONAL ISO
STANDARD 15471
Second edition
2016-09-01
Surface chemical analysis — Auger
electron spectroscopy — Description
of selected instrumental performance
parameters
Analyse chimique des surfaces — Spectroscopie d’électrons Auger
— Description de certains paramètres relatifs à la performance
instrumentale
Reference number
©
ISO 2016
© ISO 2016, Published in Switzerland
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ii © ISO 2016 – All rights reserved

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 1
5 Description of selected instrumental performance parameters . 1
5.1 Method of analysis . 1
5.2 Samples . 2
5.3 System configuration . 2
5.4 Electron gun cathode . 2
5.4.1 Cathode type . 2
5.4.2 Cathode lifetime . 2
5.5 Lateral resolution and beam current . 2
5.5.1 General. 2
5.5.2 Method 1 . 2
5.5.3 Method 2 . 3
5.5.4 Method 3 . 3
5.6 Spectrometer intensity performance and energy resolution . 3
5.6.1 General. 3
5.6.2 Method 1 . 3
5.6.3 Method 2 . 4
5.7 Spectrometer energy scale . 4
5.8 Spectrometer intensity linearity. 4
5.9 Spectrometer response function . 4
5.10 Spectrometer parameters . . 4
5.10.1 Spectrometer aberration . 4
5.10.2 Analytical area . 4
5.11 Image drift . 4
5.12 Vacuum environment . 4
Bibliography . 5
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
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electrotechnical standardization.
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described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
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The committee responsible for this document is ISO/TC 201, Surface chemical analysis, Subcommittee
SC 7, Electron spectroscopies.
This second edition cancels and replaces the first edition (ISO 15471:2004), of which it constitutes a
minor revision with the following modifications:
— addition of a Bibliography;
— minor editorial changes to the text.
iv © ISO 2016 – All rights reserved

Introduction
Auger electron spectrometers (AESs) and scanning Auger electron microscopes (SAMs) are produced
by many manufacturers throughout the world. While the basic principles of the AES analytical method
in each instrument are the same, the specific designs of the instruments and the way that performance
specifications are provided differ widely. As a result, it is often difficult to compare the performance
of instruments from one manufacturer with those from another. This International Standard provides
a basic list of items devised to enable all Auger electron spectrometers to be described in a common
manner. This International Standard is not intended to replace the manufacturer’s specification,
which may extend to 30 or more pages. It is intended that, where certain items are contained in that
specification, there are agreed and defined meanings to those items.
INTERNATIONAL STANDARD ISO 15471:2016(E)
Surface chemical analysis — Auger electron spectroscopy
— Description of selected instrumental performance
parameters
1 Scope
This International Standard specifies the requirements for the description of specific aspects of the
performance of an Auger electron spectrometer.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
ISO 18115-1, Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in
spectroscopy
3 Terms and definitions
For the purposes of this document, the terms
...