Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Methods used to determine peak intensities and information required when reporting results

This document specifies the necessary information required in a report of analytical results based on measurements of the intensities of peaks in Auger electron and X-ray photoelectron spectra. Information on methods for the measurement of peak intensities and on uncertainties of derived peak areas is also provided.

Analyse chimique des surfaces — Spectroscopie des électrons Auger et spectroscopie de photoélectrons par rayons X — Méthodes utilisées pour la détermination de l'intensité des pics et informations requises pour l'expression des résultats

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Status
Published
Publication Date
12-Feb-2019
Current Stage
9060 - Close of review
Start Date
02-Sep-2029
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ISO 20903:2019 - Surface chemical analysis -- Auger electron spectroscopy and X-ray photoelectron spectroscopy -- Methods used to determine peak intensities and information required when reporting results
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INTERNATIONAL ISO
STANDARD 20903
Third edition
2019-02
Surface chemical analysis — Auger
electron spectroscopy and X-ray
photoelectron spectroscopy —
Methods used to determine peak
intensities and information required
when reporting results
Analyse chimique des surfaces — Spectroscopie des électrons Auger
et spectroscopie de photoélectrons par rayons X — Méthodes utilisées
pour la détermination de l'intensité des pics et informations requises
pour l'expression des résultats
Reference number
ISO 20903:2019(E)
©
ISO 2019

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ISO 20903:2019(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
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Published in Switzerland
ii © ISO 2019 – All rights reserved

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ISO 20903:2019(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 1
5 Methods for peak-intensity determination — direct spectrum .2
5.1 General . 2
5.2 Selection and subtraction of an inelastic background . 3
5.3 Measurement of peak intensity . 4
5.3.1 Measurement of peak height . 4
5.3.2 Measurement of peak area . 4
5.4 Measurement of a peak intensity with computer software . 5
5.5 Measurement of peak intensities for a spectrum with overlapping peaks . 5
5.6 Uncertainty in measurement of peak area . 6
6 Methods for peak intensity determination — Auger-electron differential spectrum .7
6.1 General . 7
6.2 Measurement of Auger-electron differential intensity . 7
6.3 Uncertainties in measurement of Auger-electron differential intensity . 8
7 Reporting of methods used to measure peak intensities .10
7.1 General requirements .
...

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