ISO 5861:2024
(Main)Surface chemical analysis — X-ray photoelectron spectroscopy — Method of intensity calibration for quartz-crystal monochromated Al Kα XPS instruments
Surface chemical analysis — X-ray photoelectron spectroscopy — Method of intensity calibration for quartz-crystal monochromated Al Kα XPS instruments
This document specifies a procedure by which the intensity scale of an X-ray photoelectron spectrometer that employs a concentric hemispherical analyser can be calibrated using low-density poly(ethylene). This document is applicable to instruments using quartz-crystal-monochromated Al Kα X-rays and is suitable for all instrument geometries. The intensity calibration is only valid for the specific settings of the instrument (pass energy or retardation ratio, lens mode, slit and aperture settings) used during the calibration procedure. The intensity calibration is applicable at kinetic energies higher than 180 eV. The intensity calibration is suitable for instruments that do not have an ion gun for the purpose of cleaning metal specimens in-situ (i.e. Au, Ag, Cu), or exhibit detector saturation when these specimens are measured using standard instrument parameters. This document is not applicable to XPS instruments which do not have a system of charge compensation, or instruments that have a non-linear intensity response. This document is not applicable to instruments and operating modes which generate significant intensity from electrons scattered internally in the spectrometer (i.e. >1 % contribution of scattering intensity to the total spectral intensity).
Titre manque
General Information
Buy Standard
Standards Content (Sample)
International
Standard
ISO 5861
First edition
Surface chemical analysis — X-ray
2024-06
photoelectron spectroscopy —
Method of intensity calibration for
quartz-crystal monochromated Al
Kα XPS instruments
Reference number
ISO 5861:2024(en) © ISO 2024
---------------------- Page: 1 ----------------------
ISO 5861:2024(en)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2024
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
© ISO 2024 – All rights reserved
ii
---------------------- Page: 2 ----------------------
ISO 5861:2024(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms. 1
5 Requirements . 3
5.1 General .3
5.2 X-ray photoelectron spectrometer .3
5.2.1 Operating requirements .3
5.2.2 Instrument geometry .3
5.3 Reference material .4
5.4 Frequency of intensity scale calibration .5
6 Data acquisition . 5
6.1 General .5
6.2 Preparation .5
6.2.1 XPS Instrument . .5
6.2.2 LDPE reference sample .5
...
International
Standard
ISO 5861
First edition
Surface chemical analysis — X-ray
photoelectron spectroscopy —
Method of intensity calibration for
quartz-crystal monochromated Al
Kα XPS instruments
PROOF/ÉPREUVE
Reference number
ISO 5861:2024(en) © ISO 2024
---------------------- Page: 1 ----------------------
ISO 5861:2024(en)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2024
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
PROOF/ÉPREUVE
© ISO 2024 – All rights reserved
ii
---------------------- Page: 2 ----------------------
ISO 5861:2024(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms. 1
5 Requirements . 3
5.1 General .3
5.2 X-ray photoelectron spectrometer .3
5.2.1 Operating requirements .3
5.2.2 Instrument geometry .3
5.3 Reference material .4
5.4 Frequency of intensity scale calibration .5
6 Data acquisition . 5
6.1 General .5
6.2 Preparation .5
6.2.1 XPS Instrument . .5
6.2.2 LDPE reference sample .
...
ISO/DISPRF 5861:2023(E)
ISO /TC 201/SC 7/WG 2
Secretariat: BSI
Date: 2023-07-062024-04-03
Surface chemical analysis — X-ray photoelectron spectroscopy —
Method of intensity calibration for quartz-crystal monochromated Al
Kα XPS instruments
PROOF
---------------------- Page: 1 ----------------------
ISO/DISPRF 5861:2023(E2024(en)
© ISO 20232024
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication
may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying,
or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO
at the address below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: + 41 22 749 01 11
EmailE-mail: copyright@iso.org
Website: www.iso.orgwww.iso.org
Published in Switzerland
ii © ISO 2023 – All rights reserved
© ISO 2024 – All rights reserved
ii
---------------------- Page: 2 ----------------------
ISO/DISPRF 5861:2023(E2024(en)
Contents
Foreword . vi
Introduction . vii
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 2
5 Requirements . 3
5.1 General . 3
5.2 X-ray photoelectron spectrometer . 3
5.2.1 Operating requirements . 3
5.2.2 Instrument geometry . 3
5.3 Reference material . 5
5.4 Frequency of intensity scale calibration . 5
6 Data acquisition . 6
6.1 General . 6
6.2 Preparation . 6
6.2.1 XPS Instrument . 6
6.2.2 LDPE reference sample . 6
6.2.3 X-ray source and electron flood source . 6
6.2.4 Noise spectrum . 6
6.3 LDPE intensity measurement . 7
6.3.1 Spectra . 7
6.3.2 Data preparation . 8
7 Relative response .
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.