IEC 60749-7:2011

IEC 60749-7 ®
Edition 2.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Semiconductor devices – Mechanical and climatic test methods –
Part 7: Internal moisture content measurement and the analysis of other residual
gases
Dispositifs à semiconducteurs – Méthodes essais mécaniques et climatiques –
Partie 7: Mesure de la teneur en humidité interne et analyse des autres gaz
résiduels
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IEC 60749-7 ®
Edition 2.0 2011-06
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Semiconductor devices – Mechanical and climatic test methods –
Part 7: Internal moisture content measurement and the analysis of other residual
gases
Dispositifs à semiconducteurs – Méthodes essais mécaniques et climatiques –
Partie 7: Mesure de la teneur en humidité interne et analyse des autres gaz
résiduels
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX L
ICS 31.080.01 ISBN 978-2-88912-532-6

– 2 – 60749-7  IEC:2011
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
4 Test apparatus . 5
4.1 Mass spectrometer method . 5
4.2 Mass spectrometer . 5
4.2.1 Spectra range . 5
4.2.2 Detection limit . 6
4.2.3 System calibration . 6
4.2.4 Calibration for other gases . 6
4.2.5 Daily calibration check . 7
4.2.6 Substitution . 7
4.2.7 Precision tuning . 7
4.2.8 Record keeping . 7
4.3 Vacuum opening chamber . 7
4.4 Piercing arrangement . 7
4.5 Pressure-sensing device . 7
5 Procedure . 8
6 Failure criteria . 9
7 Implementation . 9
8 Summary . 10
Bibliography . 11

60749-7  IEC:2011 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MECHANICAL AND CLIMATIC TEST METHODS –

Part 7: Internal moisture content measurement
and the analysis of other residual gases

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
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8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 60749-7 has been prepared by IEC technical committee 47:
Semiconductor devices.
This second edition cancels and replaces the first edition published in 2002 and constitutes a
technical revision. This second edition has been completely re-written so as to align it with the
text of the latest versions of MIL-STD-750, method 1018 and MIL-STD-883, method 1018.
The main change is the removal of the two alternative methods formerly designated method 2
and method 3.
– 4 – 60749-7  IEC:2011
The text of this standard is based on the following documents:
FDIS Report on voting
47/2087/FDIS 47/2098/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 60749 series, under the general title Semiconductor devices –
Mechanical and climatic test methods, can be found on the IEC website.
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
60749-7  IEC:2011 – 5 –
SEMICONDUCTOR DEVICES –
MECHANICAL AND CLIMATIC TEST METHODS –

Part 7: Internal moisture content measurement
and the analysis of other residual gases

1 Scope
This International Standard specifies the testing and measurement of water vapour and other
gas content of the atmosphere inside a metal or ceramic hermetically sealed device. The test
is used as a measure of the quality of the sealing process and to provide information about
the long-term chemical stability of the atmosphere inside the package. It is applicable to
semiconductor devices sealed in such a manner but generally only used for high reliability
applications such as military or aerospace. This test is destructive.
2 Normative references
The following referenced documents are indispensable for the application of this document.
For dated references, only the edition cited applies. For undated references, the latest edition
of the referenced document (including any amendments) applies.
None
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
parts per million by volume
ppmv
the concentration of one substance in another substance expressed as a ratio of parts of the
one substance in a million parts of the othe
...