ASTM F1569-94(1999)

NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
Contact ASTM International (www.astm.org) for the latest information.
Designation: F 1569 – 94 (Reapproved 1999)
Standard Guide for
Generation of Consensus Reference Materials for
Semiconductor Technology
This standard is issued under the fixed designation F 1569; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope 3. Terminology
1.1 This guide covers the procedures for producing a single 3.1 Definitions (see Fig. 1 for a schematic presentation of
set of consensus reference materials (ConRefs) in the absence the hierarchy of reference materials):
of suitable certified reference materials from an established 3.1.1 certified reference material (CRM)—a reference ma-
source. terial one or more of whose property values are certified by a
1.2 This guide covers the steps to be taken to generate a set technically valid procedure, accompanied by or traceable to a
of ConRefs for a specific property or family of related certificate or other documentation that is issued by a certifying
properties required in semiconductor technology. body (ISO Guide 30:1981).
1.3 The procedure for generating the set of ConRefs is 3.1.2 consensus reference material (ConRef)—a reference
based on interlaboratory testing in accordance with Practice material one or more of whose property values have been
E 691. It is assumed for the purposes of this guide that the test established by a documented ILS that is based on a technically
method evaluated by the interlaboratory study (ILS) is appro- valid test method.
priate for determining the property values of the ConRef. This 3.1.3 reference material (RM)—a material or substance one
guide does not cover the selection of one of several possible or more properties of which are sufficiently well established to
test methods nor does it cover the case for which other be used for the calibration of an apparatus, (for) the assessment
reference materials must be used in the measurement of the of a measurement method, or for assigning values to materials
properties of the ConRef. (ISO Guide 30:1981; ISO 10012-1).
1.4 This guide also describes procedures that may be used to 3.1.3.1 Discussion—A reference material made by a labo-
generate consensus property values that may form the basis for ratory for its own use is referred to as a working reference
the generation of multiple sets of CRMs or reference materials material (WRM). This term is gradually replacing the term,
(RMs). secondary reference material, which has been used widely in
the past.
2. Referenced Documents 4
3.1.4 Standard Reference Materials (SRM )—a certified
2.1 ASTM Standards: reference material issued by the U.S. National Institute of
E 456 Terminology Relating to Quality and Statistics
Standards and Technology.
E 691 Practice for Conducting an Interlaboratory Study to 3.1.5 traceability—the ability to trace the history, applica-
Determine the Precision of a Test Method
tion, or location of an item or activity, or similar items or
2.2 ISO Standards: activities, by means of recorded identification (ISO 8402).
Guide 30:1981 Terms and Definitions Used in Connection 3.1.5.1 Discussion—ISO 8402 states that in a calibration
with Reference Materials
sense, traceability relates measuring equipment to national or
ISO 8402 Quality—Vocabulary international standards, primary standards, or basic physical
ISO 10012-1 Quality Assurance Requirements for Measur-
constants or properties. In this guide, as in ISO 10012-1, the
ing Equipment—Part 1: Management of Measuring term “measuring equipment” is extended to include both
Equipment
measuring instruments and measurement standards (including
reference wafers).
3.2 Terminology related to the conduct and analysis of the
ILS may be found in Terminology E 456 and Practice E 691.
This guide is under the jurisdiction of ASTM Committee F-1 on Electronics and
is the direct responsibility of Subcommittee F01.06 on Silicon Materials and Process
4. Summary of Guide (See Fig. 2 for a flow chart of the
Control.
steps covered.)
Current edition approved Dec. 15, 1994. Published February 1995.
Annual Book of ASTM Standards, Vol 14.02.
4.1 The test method to be used is selected or developed, and
ISO Central Secretariat, C. P. 56, CH-1211 Genève 20, Switzerland; available
in the U.S. from American National Standards Institute, 11 West 42nd Street, 13th
Floor, New York, NY 10036.
SRMt is a registered trademark of the U.S. National Institute of Standards and
Technology and the U.S. Government.
Copyright © ASTM, 100 Barr Harbor Drive, West Conshohocken, PA 19428-2959, United States.
NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
Contact ASTM International (www.astm.org) for the latest information.
F 1569
in a location accessible for future use in preparing replicate sets
of reference materials.
5. Significance and Use
5.1 The generated ConRefs can be used by a single labora-
tory for internal use or for interlaboratory comparison of
related equipment and materials.
5.2 Most often, however, they are used for replicating
multiple sets of reference materials. In such a case, the property
values of these reference materials are traceable to the values
of the property value of the ConRefs. Depending on the nature
of the preparing organization, these multiple sets may be
certified reference materials or working reference materials.
For this purpose, a guide for generation of reference materials
specific to the materials and property may be required; Annex
A1 outlines the requirements for preparing a guide for genera-
tion of multiple sets of reference materials.
6. Procedure
FIG. 1 Reference Material Hierarchy
6.1 Select or establish the test method to be used.
6.1.1 Determine feasibility of proposed test method.
6.1.2 Conduct screening experiments (ruggedness tests) of
the proposed test method in a single laboratory.
6.1.3 Define acceptable levels of repeatability and reproduc-
ibility for the proposed test method.
6.1.4 Draft test method.
6.1.5 Obtain consensus within a representative task group or
subcommittee.
6.2 Design and initiate the ILS.
6.2.1 Design the experiment i
...