ISO/TC 206/WG 12 - Engineering applications

This document specifies a method for measuring the thermal resistance between a heater chip and a cold plate with the heater chip mounted on a metalized ceramic substrate, imitating a silicon carbide (SiC) high-output power module. This measurement represents an index of the heat dissipation characteristics of a metallized ceramic substrate used in a high-output power module.

This document specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma-resistant components in dry etching chambers used in semiconductor manufacturing.

ISO 26602:2017 specifies the requirements for preprocessed silicon nitride materials for rolling bearing balls and rollers. ISO 26602:2017 provides a classification defining physical and mechanical properties of silicon nitride preprocessed bearing rolling element materials. The materials are classified in three categories by the specification of characteristics and microstructures. Methods for sample preparation and observation of microstructures are provided in Annex A. NOTE 1 The silicon nitride product means the sintered body of which the main component is silicon nitride material. NOTE 2 ISO 26602:2017 can be used for processed rolling bearing balls and rollers upon consultation between the parties concerned.

ISO 17841:2015 describes the test methods for determining thermal fatigue property of fine ceramic substrates applied to power modules, electronic control unit and similar devices.

ISO 14627:2012 describes a test method that covers the determination of fracture resistance of silicon nitride bearing balls at room temperature by the indentation fracture (IF) method, as specified in ISO 26602. ISO 14627:2012 is intended for use with monolithic silicon nitride ceramics for bearing balls. It does not include other ceramic materials. ISO 14627:2012 is for material comparison and quality assurance.

ISO 14628:2012 specifies a test method for rolling contact fatigue of silicon nitride ceramics under stepwise loading that is carried out at room temperature. This test may be used as follows: relative comparison of the rolling contact fatigue performance, a pass/fail test for material qualification of rolling elements or choosing an appropriate load level for RCF testing under constant load.

ISO 26602:2009 specifies the requirements for preprocessed silicon nitride materials for rolling bearing balls. ISO 26602:2009 provides a classification defining physical and mechanical properties of silicon nitride preprocessed bearing ball materials. The materials are classified in three categories by the specification of characteristics and microstructures.