ISO/TC 112/WG 2 - Vacuum instrumentation

ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.

ISO 3529-3:2014 gives definitions of total and partial pressure vacuum gauges. lt is a continuation of ISO 3529‑1, which defines general terms used in vacuum technology, and of ISO 3529‑2, which gives definitions of vacuum pumps and related terms.

ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement. ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically /z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.

ISO 27893:2011 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge carried out in accordance with ISO/TS 3567. ISO 27893:2011 describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with the guidelines given in ISO 27893:2011 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used. ISO 27893:2011 defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges.

ISO 27894:2009 defines terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.

ISO/TS 27893:2009 gives guidelines for the determination and reporting of measurement uncertainties arising during vacuum gauge calibration by direct comparison with a reference gauge in accordance with ISO/TS 3567. It describes methods for uniform reporting of uncertainties in vacuum gauge certificates. Uncertainties reported in accordance with ISO/TS 27893:2009 are transferable in the sense that the uncertainty evaluated for one result can be used as a component in the uncertainty evaluation of another measurement or calibration in which the first result is used. This specification defines two measurement models that are sufficient to cover most practical cases. However, it is possible that the models given cannot be applied to newly developed vacuum gauges. The final uncertainty to be reported in a certificate is evaluated from the uncertainties of the input quantities and influence quantities. The principal quantities that may affect the result of a vacuum calibration are described; however, a complete list of the possible quantities that may have an influence on the final result lies outside the scope of ISO/TS 27893:2009.

ISO/TS 3567:2005 lays down the physical, technical and metrological conditions to be fulfilled when calibrations of vacuum gauges are performed by direct comparison with a reference gauge.