SIST EN ISO 25178-701:2010

SLOVENSKI STANDARD
01-oktober-2010
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Geometrical product specifications (GPS) - Surface texture: Areal - Part 701: Calibration
and measurement standards for contact (stylus) instruments (ISO 25178-701:2010)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 701: Kalibrierung und Normale für berührend messende Geräte (mit Taster) (ISO
25178-701:2010)
Spécification géométrique des produits (GPS) - État de surface: surfacique - Partie 701:
Étalonnage et étalons pour les instruments à contact (palpeur) (ISO 25178-701:2010)
Ta slovenski standard je istoveten z: EN ISO 25178-701:2010
ICS:
17.040.20 Lastnosti površin Properties of surfaces
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN ISO 25178-701
NORME EUROPÉENNE
EUROPÄISCHE NORM
July 2010
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 701: Calibration and measurement standards for
contact (stylus) instruments (ISO 25178-701:2010)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 701: Étalonnage et étalons de Oberflächenbeschaffenheit: Flächenhaft - Teil 701:
mesure pour les instruments à contact (à palpeur) (ISO Kalibrierung und Normale für berührend messende Geräte
25178-701:2010) (mit Taster) (ISO 25178-701:2009)
This European Standard was approved by CEN on 6 May 2010.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN Management Centre has the same status as the
official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland,
Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.

EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2010 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-701:2010: E
worldwide for CEN national Members.

Contents Page
Foreword .3

Foreword
This document (EN ISO 25178-701:2010) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by January 2011, and conflicting national standards shall be withdrawn at
the latest by January 2011.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain,
Sweden, Switzerland and the United Kingdom.
Endorsement notice
The text of ISO 25178-701:2010 has been approved by CEN as a EN ISO 25178-701:2010 without any
modification.
INTERNATIONAL ISO
STANDARD 25178-701
First edition
2010-07-01
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 701:
Calibration and measurement standards
for contact (stylus) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 701: Étalonnage et étalons de mesure pour les instruments à
contact (à palpeur)
Reference number
ISO 25178-701:2010(E)
©
ISO 2010
ISO 25178-701:2010(E)
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ii © ISO 2010 – All rights reserved

ISO 25178-701:2010(E)
Contents Page
Foreword .iv
Introduction.v
1 Scope.1
2 Normative references.1
3 Terms and definitions .2
4 General .2
5 Measurement standards .2
6 Calibration and periodical verification procedures .11
Annex A (informative) Assessment of the residual errors .18
Annex B (informative) Example of an instrument data sheet.20
Annex C (informative) Relation with the GPS matrix .23
Bibliography.25

ISO 25178-701:2010(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 25178-701 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 25178 consists of the following parts, under the general title Geometrical product specifications (GPS) —
Surface texture: Areal:
⎯ Part 2: Terms, definitions and surface texture parameters
⎯ Part 3: Specification operators
⎯ Part 6: Classification of methods for measuring surface texture
⎯ Part 7: Software measurement standards
⎯ Part 601: Nominal characteristics of contact (stylus) instruments
⎯ Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
⎯ Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
⎯ Part 701: Calibration and measurement standards for contact (stylus) instruments
The following parts are under preparation:
⎯ Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
⎯ Part 605: Nominal characteristics of non-contact (point autofocusing) instruments
iv © ISO 2010 – All rights reserved

ISO 25178-701:2010(E)
Introduction
This part of ISO 25178 is a geometrical product specification standard and is to be regarded as a general
GPS standard (see ISO/TR 14638). It influences chain link 6 of the chains of standards on areal surface
texture.
For more detailed information of the relation of this standard to the GPS matrix model, see Annex C.
This part of ISO 25178 concerns the areal surface texture measuring instruments for which it defines
⎯ the systematic errors linked with main metrological characteristics of the instrument if they are not given
by the manufacturer,
⎯ the calibration operation mode,
⎯ the analysis of the results for the assessment of the potential errors, and
⎯ the decision rules for corrective actions.
It allows the evaluation of the part of the measurement uncertainty which is linked with the metrological
characteristics of the instrument and which influences the assessment of areal surface texture parameters.
These metrological characteristics are verified by testing the instrument with the measurement standards
defined hereafter or with the measurement standards described in ISO 5436-1 and ISO 5436-2, and with
complementary standards like optical flats.
The aim is to assess the errors in the corrected X, Y and Z quantities by using material measurement
standards having simple geometry (i.e. optical flat, sphere, etc.) for which
⎯ the uncertainty is lower than for surface texture standards,
⎯ their characteristics are independent of the surface texture parameters.
The calibration procedure reports on the status of the measurement equipment. Depending on the report, the
user can decide to perform the corrective actions or to alert the equipment manufacturer.
The method is as follows:
a) assessment of the errors on the fundamental corrected quantities X, Y and Z;
b) assessment of the uncertainty due to the mathematical algorithms used for filtering and for computation of
parameters, checked with the help of software measurement standards as defined in ISO 5436-2 and
ISO 25178-7.
INTERNATIONAL STANDARD ISO 25178-701:2010(E)

Geometrical product specifications (GPS) — Surface texture:
Areal —
Part 701:
Calibration and measurement standards for contact (stylus)
instruments
1 Scope
This part of ISO 25178 specifies
⎯ the characteristics of material measures used as measurement standards,
⎯ the estimation methods of the residual errors, and
⎯ the calibration methods and tests for acceptance and periodical re-verification
for areal surface texture contact (stylus) measurement instruments.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 3274, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal
characteristics of contact (stylus) instruments
ISO 5436-1:2000, Geometrical Product Specifications (GPS) — Surface texture: Profile method;
Measurement standards — Part 1: Material measures
ISO 5436-2, Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement
standards — Part 2: Software measurement standards
ISO 12085, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Motif parameters
ISO 12179:2000, Geometrical Product Specifications (GPS) — Surface texture: Profile method — Calibration
of contact (stylus) instruments
ISO/TS 12181-1, Geometrical Product Specifications (GPS) — Roundness — Part 1: Vocabulary and
parameters of roundness
ISO/TS 12780-1, Geometrical Product Specifications (GPS) — Straightness — Part 1: Vocabulary and
parameters of straightness
ISO/TS 12781-1, Geometrical Product Specifications (GPS) — Flatness — Part 1: Vocabulary and
parameters of flatness
ISO 25178-701:2010(E)
ISO/TS 14253-2, Geometrical Product Specifications (GPS) — Inspection by measurement of workpieces and
measuring equipment — Part 2: Guide to the estimation of uncertainty in GPS measurement, in calibration of
measuring equipment and in product verification
ISO 25178-2, Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions
and surface texture parameters
ISO 25178-601, Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal
characteristics of contact (stylus) instruments
ISO/IEC Guide 99:2007, International vocabulary of metrology — Basic and general concepts and associated
terms (VIM)
3 Terms and definitions
For the purpose of this document, the terms and definitions given in ISO 3274, ISO 25178-2, ISO 25178-601
and ISO/IEC Guide 99 apply.
4 General
A material measurement standard can be used for two different purposes:
⎯ calibration of the metrological characteristics, followed by assessment of the measurement uncertainty;
⎯ user adjustment of the instrument (see ISO 25178-601), which establishes correction factors of the
measured quantities.
Both of these depend on the metrological characteristics of the measurement standards.
The measurement standards presented below are suitable for both purposes; nevertheless, they have been
especially designed for the assessment and for the correction of systematic errors. This is due to the fact that
the characteristics of those standards permit the calibration of quantities such as X, Y and Z through the
assessment and the verification of adjustment coefficients C , C and C (see ISO 25178-601).
x y z
However, these material measurement standards do not permit the assessment of errors due to filtering and
computation algorithms. These algorithms can be tested using software measurement standards
(see ISO 5436-2 and ISO 25178-7).
Moreover, most of the material measurement standards presented below permit the verification and the
correction of the perpendicular deviation between X and Y drive units.
The measurement standards defined in ISO 5436-1 are designed for the calibration of quantities which permit
the assessment of profile parameters.
This part of ISO 25178 provides default methods for the assessment of the software measurement standards.
Nevertheless, the method and the characteristics of the measurement standard should be supplied by the
manufacturer.
5 Measurement standards
5.1 Types of standards
The different types of measurement standards are given in Table 1.
2 © ISO 2010 – All rights reserved

ISO 25178-701:2010(E)
Table 1 — Type of measurement standards
Type Name
ER1 Measurement standard with two parallel grooves
ER2 Measurement standard with four grooves forming a rectangle
ER3 Measurement standard with a circular groove
ES Measurement standard with a sphere/plane intersection
CS Measurement standard with a contour profile
CG Crossed-grating measurement standard

It is necessary to choose a measurement standard having characteristics in accordance with the metrological
characteristics of the instrument under consideration. Therefore, a non-exhaustive list of significant
characteristics is supplied below for each measurement standard.
5.2 Description of the measurement standards
5.2.1 Type ER: Groove standard
5.2.1.1 General
The ER standards contain two or more triangular grooves.
These grooves are characterized by:
⎯ the depth, d;
⎯ the angle between the flanks, α;
⎯ the intersection line of their respective flanks.
The parallelism and the perpendicularity of grooves and the distance between grooves are determined from
the intersection line of the flanks.
The angle α should be greater than the cone angle of the stylus.
The groove bottom radius r should be greater than the tip radius r of the stylus.
f tip
The depth d of the grooves is defined according to ISO 5436-1:2000, 7.2.
5.2.1.2 Requirements for the ER measurement standard
The design characteristics of the measurement standards shall be compatible with the considered application
(e.g. geometry of stylus tips).
The following geometrical characteristics shall not significantly affect the measurement:
⎯ flatness of the real integral surface relative to the reference plane, P, of the standard;
⎯ form deviation of the groove(s);
⎯ groove bottom radius, r ;
f
⎯ form deviation of the flanks of the triangles;
ISO 25178-701:2010(E)
⎯ parallelism between grooves;
⎯ perpendicularity between grooves;
⎯ local slope at any point.
Roughness shall be considered not to affect the measurement.
The bisector of the groove(s) or the triangles (line, plane or cylinder) shall be nominally perpendicular to the
reference plane of the standard.
For type ER2 measurement standards, an orientation mark with an angle of 45° with respect to the grooves
can be added on the standard to identify a preferred measurement direction.
5.2.1.3 Type ER1: Two-parallel-grooves standards
5.2.1.3.1 Purpose
The two-parallel-grooves standards are used for calibrating the vertical and the horizontal amplification
coefficients of the measuring instrument.
5.2.1.3.2 Design characteristics
This measurement standard has two parallel grooves (see Figure 1).

Key
d depth of grooves
l distance between grooves
α angle of the groove flanks
P reference plane
r groove bottom radius
f
Figure 1 — Two-parallel-grooves standard, ER1
5.2.1.3.3 Definition of the measurands
The measurands are:
l the groove spacing,
d the depth of the grooves, defined according to ISO 5436-1:2000, 7.2.
4 © ISO 2010 – All rights reserved

ISO 25178-701:2010(E)
5.2.1.4 Type ER2: Rectangular-groove measurement standards
5.2.1.4.1 Purpose
The rectangular-groove standards are used for calibrating:
⎯ the vertical amplification α ;
z
⎯ the horizontal amplification, α , α ;
x y
⎯ the perpendicularity of both X- and Y-axes of the measuring instrument, ∆ .
PER
5.2.1.4.2 Design characteristics
This measurement standard is composed of four grooves forming a rectangle (see Figure 2).

Key
1, 2 symmetry lines of parallel grooves
d depth of grooves
l , l groove spacing
1 2
θ angle between the grooves
P reference plane
r groove bottom radius
f
Figure 2 — Rectangular-groove measurement standard, ER2
5.2.1.4.3 Definition of the measurands
The measurands are:
l , l the spacing between the grooves;

1 2
d the depth of the grooves, defined according to ISO 5436-1:2000, 7.2;
θ the angle between the grooves, defined as the intersection of the two median lines of the two sets of
parallel grooves (see Figure 2).
ISO 25178-701:2010(E)
5.2.1.5 Type ER3: Circular-groove standards
5.2.1.5.1 Purpose
The circular-groove standards are used for calibrating the vertical and the horizontal amplification coefficients
and the perpendicularity of both X- and Y-axes of the measuring instrument.
5.2.1.5.2 Design characteristics
This measurement standard has a circular groove (see Figure 3).

Key
d depth of grooves
D diameter of the groove
f
P reference plane
r groove bottom radius
f
Figure 3 — Circular-groove standard, ER3
5.2.1.5.3 Definition of the measurands
The measurands are:
D the diameter of the groove, defined as the diameter of the intersection circle of the two flanks of the
f
groove;
d the depth of the grooves, defined according to ISO 5436-1:2000, 7.2.
5.2.2 Type ES: Sphere/plane measurement standard
5.2.2.1 Purpose
The sphere/plane standards are used for calibrating:
⎯ the vertical amplification, α ;
z
⎯ the horizontal amplification, α , α ;
x y
6 © ISO 2010 – All rights reserved

ISO 25178-701:2010(E)
⎯ the perpendicularity of both X- and Y-axes of the measuring instrument, ∆ ;
PER
, F ;
⎯ the response curve of the probing system, F
x y
⎯ the geometry of the stylus (H and L);
⎯ the radius of the stylus tip, r ;
tip
⎯ the cone angle, γ.
5.2.2.1.1 Requirements for the ES measurement standards
The following geometrical characteristics shall not significantly affect the measurement:
⎯ the flatness of the real integral surface relative to the plane P;
⎯ the form deviation of the real integral surface relative to the sphere S;
⎯ the roughness of the real integral surface relative to the plane P and the sphere S.
5.2.2.2 Design characteristics
This measurement standard is composed of a part of a sphere S and a plane P (see Figure 4).

Key
d distance from the top of the sphere to the plane P r radius of the sphere
S
S part of a sphere D intersection diameter
i
P datum plane
Figure 4 — Sphere/plane measurement standard, ES
ISO 25178-701:2010(E)
5.2.2.3 Definition of the measurands
The measurands are:
d the largest distance of a point of the sphere to the plane P;
r the radius of the sphere;
S
D the diameter of the circle obtained by the intersection between the sphere S and the plane P
i
(see Figure 4). It is a function of the height d and the radius r of the sphere. Its assessment is obtained as
follows:
Dr=−2 r −d
()
i S S
5.2.3 Type CS: Contour standard
5.2.3.1 Purpose
The contour standards are used for overall calibration along one lateral axis of the measuring instrument.
5.2.3.2 Requirements for the CS measurement standards
The following geometrical characteristics shall be considered not to affect the measurement:
⎯ flatness of the real integral surface relative to the reference plane, P;
⎯ flatnesses of the two flanks of the groove(s);
⎯ roundness of the real integral line relative to the portions of circles;
⎯ groove bottom radius, r ;
f
⎯ flatnesses of the two flanks of the wedges/triangles;
⎯ local slope at any point;
⎯ roughness of the real integral surface relative to the reference plane, P, and portions of circles and flanks
of the wedges/triangles and the grooves.
5.2.3.3 Design characteristics
This measurement standard is composed of a profile including different geometrical patterns (see Figure 5):
⎯ at least two circular arcs (1 convex, 1 concave);
⎯ at least two wedges/triangles (1 convex, 1 concave).
8 © ISO 2010 – All rights reserved

ISO 25178-701:2010(E)
Key
r radii of the circular arcs
i
α angles of the triangles
P reference plane
l ,…, l distances between the different patterns
1 n
h ,…, h heights between the different patterns with respect to the reference plane P
1 n
Figure 5 — Example of a contour standard, CS
5.2.3.4 Definition of the measurands
The measurands are:
r the radius of the circular arcs;
α the angle between the flanks of the wedges/triangles and grooves;
l ,…, l the distances (measured in a parallel direction to the plane P) between the centres of the circles

1 n
and/or the intersections of the flanks of the triangles;
h ,…, h the heights (measured in a perpendicular direction to the plane P) between the centres of the circles

1 n
and/or the intersections of the flanks of the triangles.
5.2.4 Type CG: Crossed-grating measurement standard
5.2.4.1 General
The CG standards are orthogonal crossed gratings or two-dimensional array patterns with nominally equal
pitch in each direction.
The standards are characterized by
⎯ the average pitch in the X-axis,
⎯ the average pitch in the Y-axis,
⎯ the angle between the X- and Y-axes.
The profile of the standards for XY measurements is not prescribed. Waffle pattern gratin
...