SIST EN ISO 25178-600:2019

SLOVENSKI STANDARD
SIST EN ISO 25178-600:2019
01-junij-2019
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 600.
del: Meroslovne lastnosti topografskih metod za merjenje ravnih površin (ISO
25178-600:2019)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 600:
Metrological characteristics for areal-topography measuring methods (ISO 25178-
600:2019)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 600: Messtechnische Merkmale für flächentopographische Messverfahren (ISO
25178-600:2019)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 600:
Caractéristiques métrologiques pour les méthodes de mesure par topographie
surfacique (ISO 25178-600:2019)
Ta slovenski standard je istoveten z: EN ISO 25178-600:2019
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
SIST EN ISO 25178-600:2019 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 25178-600:2019

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SIST EN ISO 25178-600:2019


EN ISO 25178-600
EUROPEAN STANDARD

NORME EUROPÉENNE

April 2019
EUROPÄISCHE NORM
ICS 17.040.20
English Version

Geometrical product specifications (GPS) - Surface texture:
Areal - Part 600: Metrological characteristics for areal-
topography measuring methods (ISO 25178-600:2019)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 600: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 600:
métrologiques pour les méthodes de mesure par Messtechnische Merkmale für flächentopographische
topographie surfacique (ISO 25178-600:2019) Messverfahren (ISO 25178-600:2019)
This European Standard was approved by CEN on 15 February 2019.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and United Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-600:2019 E
worldwide for CEN national Members.

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SIST EN ISO 25178-600:2019
EN ISO 25178-600:2019 (E)
Contents Page
European foreword . 3

2

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SIST EN ISO 25178-600:2019
EN ISO 25178-600:2019 (E)
European foreword
This document (EN ISO 25178-600:2019) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2019, and conflicting national standards shall
be withdrawn at the latest by October 2019.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,
Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-600:2019 has been approved by CEN as EN ISO 25178-600:2019 without any
modification.

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SIST EN ISO 25178-600:2019
INTERNATIONAL ISO
STANDARD 25178-600
First edition
2019-02
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 600:
Metrological characteristics for areal
topography measuring methods
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 600: Caractéristiques métrologiques pour les méthodes de
mesure par topographie surfacique
Reference number
ISO 25178-600:2019(E)
©
ISO 2019

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SIST EN ISO 25178-600:2019
ISO 25178-600:2019(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
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Phone: +41 22 749 01 11
Fax: +41 22 749 09 47
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2019 – All rights reserved

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ISO 25178-600:2019(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
3.1 All areal topography measuring methods . 1
3.2 x- and y-scanning systems . 10
3.3 Optical systems .11
3.4 Optical properties of the workpiece .14
4 Standard metrological characteristics for surface texture measurement .15
Annex A (informative) Maximum measurable local slope vs. A .16
N
Annex B (informative) Relation to the GPS matrix model .19
Bibliography .20
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Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www .iso
.org/iso/foreword .html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/members .html.
iv © ISO 2019 – All rights reserved

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Introduction
This document is a geometrical product specification standard and is to be regarded as a general GPS
standard (see ISO 14638). It influences the chain link F of the chains of standards on areal surface
texture and profile surface texture.
The ISO/GPS matrix model given in ISO 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex B.
This document describes the metrological characteristics of areal topography methods designed for
the measurement of surface topography maps. Several standards (ISO 25178-601, ISO 25178-602,
ISO 25178-603, ISO 25178-604, ISO 25178-605 and ISO 25178-606) have already been developed
to define terms and metrological characteristics for individual methods. Although we have striven
for consistency throughout the series, some slight differences can appear between them. Therefore
Technical Committee ISO/TC 213 decided in 2012 to concentrate all common aspects into one standard
– this document – and to describe in ISO 25178-601 to ISO 25178-606 only the terms relevant to each
individual method. For the existing standards of ISO 25178-601 to ISO 25178-606 it will be necessary
to adapt this decision within the next revision. Until then it will be possible to have different definitions
for a single term. Further, if any differences between the current ISO 25178-601 to ISO 25178-606 are
discovered that give rise to conflict, then parties involved in the conflict should agree how to handle the
differences.
NOTE Portions of this document describe patented systems and methods. This information is provided
only to assist users in understanding basic principles of areal surface topography measuring instruments. This
document is not intended to establish priority for any intellectual property, nor does it imply a license to any
proprietary technologies described herein.
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SIST EN ISO 25178-600:2019
INTERNATIONAL STANDARD ISO 25178-600:2019(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 600:
Metrological characteristics for areal topography
measuring methods
1 Scope
This document specifies the metrological characteristics of areal instruments for measuring surface
topography. Because surface profiles can be extracted from surface topography images, most of the
terms defined in this document can also be applied to profiling measurements.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https: //www .iso .org/obp
— IEC Electropedia: available at http: //www .electropedia .org/
3.1 All areal topography measuring methods
3.1.1
areal reference
component of the instrument that generates a reference surface with respect to which the surface
topography is measured
3.1.2
coordinate system of the instrument
right handed orthogonal system of axes (x,y,z) consisting of:
— the z-axis oriented nominally parallel to the z-scan axis (for optical systems with z-scan), the
optical axis (for non-scanning optical systems) or the stylus trajectory (for stylus or scanning probe
instruments);
— an (x,y) plane perpendicular to the z-axis.
Note 1 to entry: See Figure 1.
Note 2 to entry: Normally, the x-axis is the tracing axis and the y-axis is the stepping axis. (Valid for instruments
that scan in the horizontal plane.)
Note 3 to entry: See also specification coordinate system [ISO 25178-2:2012, 3.1.2] and measurement coordinate
system [ISO 25178-6:2010, 3.1.1].
Note 4 to entry: Certain types of optical instruments do not possess a physical areal guide.
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Note 5 to entry: The z-axis is sometimes referred to as the vertical axis, and the x- and y-axes are sometimes
referred to as the horizontal axes.
3.1.3
z-scan axis
instrument axis used to scan in the z-direction to measure the surface
topography
Note 1 to entry: The z-scan axis is nominally but not necessarily parallel to the z-axis of the coordinate system of
the instrument.
3.1.4
measurement area
area that is measured by a surface topography instrument
Note 1 to entry: For point optical sensors and stylus methods, the measurement area is typically the scan area of
the lateral translation stage(s). For topography microscopes the measurement area can be a single field of view
as determined by the objective or a larger area realized by stitching or only part of a field of view as specified by
the operator.
Note 2 to entry: For related concepts, evaluation area and definition area, see ISO 25178-2:2012, 3.1.9 and 3.1.10.
Key
1 coordinate system of the instrument
2 measurement loop
3 z-scan axis
Figure 1 — Coordinate system and measurement loop of the instrument
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3.1.5
measurement loop
closed chain which comprises all components connecting the workpiece and the probe, for example the
means of positioning, the work holding fixture, the measuring stand, the drive unit and the probing system
Note 1 to entry: See Figure 1.
Note 2 to entry: The measurement loop will be subjected to external and internal disturbances that influence the
measurement uncertainty.
3.1.6
real surface
set of features which physically exist and separate the entire workpiece from the
surrounding medium
Note 1 to entry: The real surface is a mathematical representation of the surface that is independent of the
measurement process.
Note 2 to entry: See also mechanical surface [ISO 25178-2:2012, 3.1.1.1 or ISO 14406:2010, 3.1.1] and
electromagnetic surface [ISO 25178-2:2012, 3.1.1.2 or ISO 14406:2010, 3.1.2].
Note 3 to entry: The electro-magnetic surface determined with different optical methods can be different.
Examples of optical methods are found in ISO 25178-602 to ISO 25178-607.
[SOURCE: ISO 17450-1:2011, 3.1, modified — Notes to entry added.]
3.1.7
surface probe
device that converts the surface height into a signal during measurement
Note 1 to entry: In earlier standards this was termed transducer.
3.1.8
measuring volume
range of the instrument stated in terms of the limits on all three coordinates measurable by the
instrument
Note 1 to entry: For areal surface texture measuring instruments, the measuring volume is defined by:
— the measuring range of the x- and y- drive units;
— the measuring range of the z-probing system.
3.1.9
response function
F , F , F
x y z
function that describes the relation between the actual quantity and the measured quantity
Note 1 to entry: The response curve is the graphical representation of the response function. See Figure 2.
Note 2 to entry: An actual quantity in x (respectively y or z) corresponds to a measured quantity x (respectively
M
y or z ).
M M
Note 3 to entry: The response function can be used for adjustments and error corrections.
3.1.10
amplification coefficient
α , α , α
x y z
slope of the linear regression line obtained from the response function
Note 1 to entry: See Figure 2.
Note 2 to entry: There will be amplification coefficients applicable to the x, y and z quantities.
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Note 3 to entry: The ideal response is a straight line with a slope equal to 1, which means that the values of the
measurand are equal to the values of the input quantities.
[10]
Note 4 to entry: See also sensitivity of a measuring system (VIM, 4.12 ).
Note 5 to entry: This quantity is also termed scaling factor.
3.1.11
linearity deviation
l , l , l
x y z
maximum local difference between the line from which the amplification coefficient is derived and the
response function
Note 1 to entry: For example, see element 4 in Figure 2.
Key
a actual input quantities
b measured quantities
0 coordinate origin
1 ideal response curve
2 actual response curve of the instrument
3 line from which the amplification coefficient α (slope) is calculated
4 local linearity deviation (l)
Figure 2 — Example of linearity deviation of a response curve
3.1.12
flatness deviation
z
FLT
deviation of the measured topography of an ideally flat object from a plane
Note 1 to entry: Flatness deviation can be caused by residual flatness of an imperfect areal reference or by
imperfection in the optical setup of an instrument.
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3.1.13
x-y mapping deviation
Δ (x,y), Δ (x,y)
x y
gridded image of x- and y-deviations of actual coordinate positions on a surface from their nominal
positions
Note 1 to entry: The mapping deviations can be used to calculate the x- and y- linearity deviations, and x-y axis
perpendicularity.
3.1.14
instrument noise
N
I
internal noise added to the output signal caused by the instrument if ideally placed in a noise-free
environment
Note 1 to entry: Internal noise can be due to electronic noise, such as that arising in amplifiers, or optical noise,
such as that arising from stray light.
Note 2 to entry: The S-filter according to ISO 25178-3 can reduce the high spatial frequency components of
this noise.
Note 3 to entry: For some instruments, instrument noise cannot be completely separated from other types of
measurement noise because the instrument only takes data while moving. If so, any measured noise includes a
dynamic component. See also static noise (3.2.6) and dynamic noise (3.2.7).
Note 4 to entry: Because noise is a bandwidth-related quantity, its magnitude depends on the time over which it
is measured or averaged.
3.1.15
measurement noise
N
M
noise added to the output signal occurring during the normal use of the instrument
Note 1 to entry: 3.1.14 Notes to entry 2 and 4 also apply to this definition.
Note 2 to entry: Measurement noise includes the instrument noise as well as components arising from the
environment (thermal, vibration, air turbulence) and other sources.
Note 3 to entry: Figure 3 provides an illustration of typical sources of noise and shows the contrast between
laboratory conditions producing instrument noise and measurement noise.
3.1.16
surface topography repeatability
closeness of agreement between successive measurements of the same surface topography under the
same conditions of measurement
Note 1 to entry: Surface topography repeatability provides a measure of the likely agreement between repeated
measurements normally expressed as a standard deviation.
[10]
Note 2 to entry: See VIM , 2.15 and 2.21, for a general discussion of repeatability and related concepts.
Note 3 to entry: Evaluation of surface topography repeatability is a common method for estimating measurement
noise and other time-varying errors, such as drift.
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3.1.17
x-sampling interval
D
x
distance between two adjacent measured points along the x-axis
Note 1 to entry: In many microscopy systems the sampling interval is determined by the distance between
[11]
sensor elements in a camera, called pixels , and by the magnification of the optical setup. For such systems, the
terms ‘pixel pitch’ and ‘pixel spacing’ are often used interchangeably with the term ‘sampling interval’. Another
term, ‘pixel width’, indicates a length associated with one side (x or y) of the sensitive area of a single pixel and is
always smaller than the pixel spacing.
Note 2 to entry: Another term, ‘sampling zone’, is sometimes used to indicate the length or region over which a
height sample is determined. This quantity can be different from the sampling interval.
Note 3 to entry: x is replaced by y in the term and the symbol when referring to the y-axis.
a) Conditions under which the instrument noise might be assessed for some types of
instruments
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b) Conditions under which the measurement noise might be assessed for some types of
instruments
Key
A instrument D signal
B sample E environmental vibration
B′ sample plus interaction F external light sources
C data processing G thermal changes
Figure 3 — Typical sources of instrument noise and measurement noise
3.1.18
digitisation step in z
D
z
smallest height variation along the z-axis between two ordinates of the extracted surface
Note 1 to entry: The term extracted surface is defined in ISO 12180-1:2011, 3.2.1.
3.1.19
instrument transfer function
ITF
f
ITF
curve describing an instrument’s height response as a function of the spatial frequency of the surface
topography
Note 1 to entry: Ideally, the ITF tells us what the measured height of a sinusoidal grating of a specified spatial
frequency ν would be relative to the true height of the grating.
Note 2 to entry: For several types of optical instruments, the ITF can be a nonlinear function of height except for
heights much smaller than the optical wavelength.
Note 3 to entry: A number of methods can be used to characterize properties of the instrument transfer function
with a single parameter. See 3.1.20 for an introduction.
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Note 4 to entry: See also References [12] and [13].
3.1.20
topographic spatial resolution
W
R
metrological characteristic describing the ability of a surface topography
measuring instrument to distinguish closely spaced surface features
Note 1 to entry: The topographic spatial resolution designates an important property of a surface topography
measuring instrument, but several parameters and functions can be used to actually quantify the topographic
spatial resolution, depending on the application and the method of measurement. These include:
— lateral period limit D (see 3.1.21 and ISO 25178-3);
LIM
— stylus tip radius r (see ISO 25178-601);
TIP
— lateral resolution R (see 3.1.22);
l
— width limit for full height transmission W (see 3.1.23);
l
— small scale fidelity limit T (see 3.1.27);
FIL
— Rayleigh criterion (see 3.3.8);
— Sparrow criterion (see 3.3.9);
— Abbe resolution limit (see 3.3.10).
Note 2 to entry: Other quantities can also be defined for characterizing topographic spatial resolution.
Note 3 to entry: Another related term is structural resolution.
3.1.21
lateral period limit
D
LIM
spatial period of a sinusoidal profile at which the height response of the instrument transfer function
falls to 50 %
Note 1 to entry: The lateral period limit is one measure for describing spatial or lateral resolution of a surface
topography measuring instrument and its ability to distinguish and measure closely spaced surface features.
The value of the lateral period limit depends on the heights of surface features and on the method used to probe
the surface. Maximum values for this parameter are listed in ISO 25178-3:2012, Table 3, in comparison with
recommended values for short wavelength (s-) filters and sampling intervals.
Note 2 to entry: Spatial period is the same concept as spatial wavelength and is the inverse of spatial frequency.
Note 3 to entry: One factor related to the value of D for optical tools is the Rayleigh criterion (3.3.8). Another
LIM
is the degree of focus of the objective on the surface.
Note 4 to entry: One factor related to the value of D for contact tools is the stylus tip radius, r (see
LIM TIP
ISO 25178-601). For a discussion of spatial resolution issues involving stylus instruments, see Reference [14].
3.1.22
lateral resolution
R
l
smallest distance between two features which can be recognized
3.1.23
width limit for full height transmission
W
l
width of the narrowest rectangular groove whose step height is measured within a given tolerance
Note 1 to entry: When evaluating R and W by measurement, instrument properties, such as
l l
— the sampling interval in x and y,
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— the digitisation step in z, and
— the S-filter (see ISO 25178-2:2012, 3.1.4.1),
are normally chosen so that they do not influence the result.
Note 2 to entry: Implementation of this concept depends on both the width and step height of the grooved surface
used. When evaluating W by measurement, the depth of the rectangular groove is normally chosen to be close to
l
that of the surface to be measured.
Note 3 to entry: This concept is mainly useful for contacting (stylus) instruments. See Figure 4 for examples.
Note 4 to entry: For a discussion of spatial resolution issues related to measurement of sinusoidal surfaces by
stylus instruments, see Reference [14].
a) Rectangular grid with groove width t and depth d
b) Profile measured with a stylus instrument when t is greater than W ; the depth of the
...