ISO 10810:2019

INTERNATIONAL ISO
STANDARD 10810
Second edition
2019-08
Surface chemical analysis — X-ray
photoelectron spectroscopy —
Guidelines for analysis
Analyse chimique des surfaces — Spectroscopie de photoélectrons par
rayons X — Lignes directrices pour l'analyse
Reference number
©
ISO 2019
© ISO 2019
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ii © ISO 2019 – All rights reserved

Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviations . 1
5 Overview of sample analysis . 2
6 Specimen characterization . 4
6.1 General . 4
6.2 Specimen forms . 5
6.2.1 General. 5
6.2.2 Single crystal . 5
6.2.3 Adsorbed or segregated layers, films and residues . 5
6.2.4 Interfaces and multilayered samples . 6
6.2.5 Non-porous . 6
6.2.6 Porous . 6
6.2.7 Powder . . 6
6.2.8 Fibres and textiles . 6
6.2.9 Internal interface . 6
6.3 Material types . 6
6.3.1 General. 6
6.3.2 Metals and alloys . 6
6.3.3 Polymers . 7
6.3.4 Semiconductors . 7
6.3.5 Magnetic materials . 7
6.3.6 Ceramics . 7
6.3.7 Catalysts . 7
6.3.8 Glass and insulators . 7
6.3.9 Biological . 7
6.3.10 Nanoparticles . 7
6.4 Handling and mounting of specimens . 7
6.5 Specimen treatments . 8
6.5.1 General. 8
6.5.2 Heating and cooling . 8
6.5.3 Scraping and fracture . . 8
6.5.4 Ion bombardment for analysing thin films . 8
6.5.5 Exposure to gases and liquids . 8
[8]
7 Instrument characterization . 8
7.1 General . 8
7.2 Instrument checks . 9
[9]
7.2.1 System health check . 9
7.2.2 Mechanical . 9
7.2.3 Sample holder . 9
7.2.4 Vacuum . 9
7.3 Instrument calibration .10
7.3.1 Calibration of binding energy scale .10
7.3.2 Intensity repeatability and intensity/energy response function (IERF).11
7.3.3 Linearity of intensity scale test .12
7.3.4 Lateral resolution .13
[21][22]
7.3.5 Depth resolution .13
7.3.6 Charge correction .16
7.4 Instrument set-up.16
7.4.1 Optimum settings .16
7.4.2 System configuration .17
8 The wide-scan spectrum .17
8.1 Data acquisition .17
8.1.1 General.17
8.1.2 Sample loading .18
8.1.3 Energy resolution .18
8.1.4 Energy range, step size and acquisition mode .18
8.1.5 X-ray source and conditions .18
8.1.6 Charge correction .19
8.1.7 Spectrum acquisition .19
8.1.8 X-ray degradation .19
8.1.9 Thin surface layer .19
8.2 Data analysis .19
8.2.1 Calibration of the binding energy scale .19
8.2.2 Peak table .20
8.2.3 Quantification .20
8.2.4 Assessment of the composition employing the Tougaard extrinsic
[42]
background  .21
8.2.5 Requirement for narrow scans .21
9 The narrow scan .21
9.1 General .
...