ISO 18114:2021

INTERNATIONAL ISO
STANDARD 18114
Second edition
2021-05
Surface chemical analysis —
Secondary-ion mass spectrometry —
Determination of relative sensitivity
factors from ion-implanted reference
materials
Analyse chimique des surfaces — Spectrométrie de masse des ions
secondaires — Détermination des facteurs de sensibilité relative à
l'aide de matériaux de référence à ions implantés
Reference number
©
ISO 2021
© ISO 2021
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ii © ISO 2021 – All rights reserved

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols and abbreviated terms . 1
5 Principle . 2
6 Apparatus . 2
7 Ion-implanted reference materials . 2
8 Procedure. 3
9 Test report . 3
Bibliography . 4
Foreword
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This document was prepared by Technical Committee ISO/TC 201, Surface chemical analysis,
Subcommittee SC 6, Secondary ion mass spectrometry.
This second edition cancels and replaces the first edition (ISO 18114:2003), which has been technically
revised.
The main changes compared to the previous edition are as follows:
— Formula (1) has been corrected;
— in Clause 5, Notes 1 and 2 have been modified.
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complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2021 – All rights reserved

Introduction
Ion-implanted materials are commonly used in secondary-ion mass spectrometry for the calibration of
instruments. This document was prepared to provide a uniform method for determining the relative
sensitivity factor of an element in a specified matrix from an ion-implanted reference material, and to
show how the concentration of the element in a different sample of the same matrix material can be
determined.
INTERNATIONAL STANDARD ISO 18114:2021(E)
Surface chemical analysis — Secondary-ion mass
spectrometry — Determination of relative sensitivity
factors from ion-implanted reference materials
1 Scope
This document specifies a method of determining relative
...