ISO 16063-15:2006

INTERNATIONAL ISO
STANDARD 16063-15
First edition
2006-08-01
Methods for the calibration of vibration
and shock transducers —
Part 15:
Primary angular vibration calibration by
laser interferometry
Méthodes pour l'étalonnage des transducteurs de vibrations et de
chocs —
Partie 15: Étalonnage angulaire primaire de vibration par interférométrie
laser
Reference number
©
ISO 2006
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ii © ISO 2006 – All rights reserved

Contents Page
Foreword. iv
1 Scope . 1
2 Normative references . 2
3 Uncertainty of measurement . 2
4 Requirements for apparatus. 2
4.1 General. 2
4.2 Frequency generator and indicator . 3
4.3 Power amplifier/angular vibration exciter combination. 3
4.4 Seismic block(s) for vibration exciter and laser interferometer . 5
4.5 Laser. 5
4.6 Interferometer. 5
4.7 Instrumentation for interferometer signal processing. 8
4.8 Voltage instrumentation, measuring true r.m.s. accelerometer output. 9
4.9 Distortion-measuring instrumentation . 9
4.10 Oscilloscope (optional). 9
4.11 Other requirements. 9
5 Ambient conditions . 9
6 Preferred angular accelerations and frequencies . 10
7 Common procedure for all six methods. 10
8 Methods using fringe-counting (methods 1A and 1B). 11
8.1 General. 11
8.2 Common test procedure for methods 1A and 1B. 12
8.3 Expression of results . 12
9 Methods using minimum-point detection (methods 2A and 2B) . 16
9.1 General. 16
9.2 Common test procedure for methods 2A and 2B. 17
9.3 Expression of results . 17
10 Methods using sine approximation (methods 3A and 3B) . 21
10.1 General. 21
10.2 Procedure applied to methods 3A and 3B . 22
10.3 Data acquisition . 27
10.4 Data processing. 27
11 Reporting of calibration results . 29
Annex A (normative) Uncertainty components in primary angular vibration calibration of vibration
and shock transducers by laser interferometry . 30
Annex B (normative) Equations for the calculation of the angular quantities of rotational angle, Φ,
angular velocity, Ω, and angular acceleration, α, and of the sensitivities of angular
transducers: rotational angle transducers, S , of angular velocity transducers, S , and
Φ Ω
angular accelerometers, S . 36
α
Bibliography . 42

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 16063-15 was prepared by Technical Committee ISO/TC 108, Mechanical vibration and shock,
Subcommittee SC 3, Use and calibration of vibration and shock measuring instruments.
ISO 16063 consists of the following parts, under the general title Methods for the calibration of vibration and
shock transducers:
⎯ Part 1: Basic concepts
⎯ Part 11: Primary vibration calibration by laser interferometry
⎯ Part 12: Primary vibration calibration by the reciprocity method
⎯ Part 13: Primary shock calibration using laser interferometry
⎯ Part 15: Primary angular vibration calibration by laser interferometry
⎯ Part 21: Vibration calibration by comparison to a reference transducer
⎯ Part 22: Shock calibration by comparison to a reference transducer
The following additional parts are under preparation:
⎯ Part 23, addressing the angular vibration calibration by comparison to reference transducers
⎯ Part 31, addressing the testing of transverse vibration sensitivity
⎯ Part 32, addressing the resonance testing
⎯ Part 41, addressing the calibration of laser vibrometers
⎯ Part 42, addressing the calibration of seismometers

iv © ISO 2006 – All rights reserved

INTERNATIONAL STANDARD ISO 16063-15:2006(E)

Methods for the calibration of vibration and shock transducers —
Part 15:
Primary angular vibration calibration by laser interferometry
1 Scope
This part of ISO 16063 specifies the instrumentation and procedures used for primary angular vibration
calibration of angular transducers, i.e. angular accelerometers, angular velocity transducers and rotational
angle transducers (with or without amplifier) to obtain the magnitude and the phase shift of the complex
sensitivity by steady-state sinusoidal vibration and laser interferometry. The methods specified in this part of
ISO 16063 are applicable to measuring instruments (rotational laser vibrometers in particular) and to angular
transducers as defined in ISO 2041 for the quantities of rotational angle, angular velocity and angular
acceleration.
It is applicable to a frequency range from 1 Hz to 1,6 kHz and a dynamic range (amplitude) from 0,1 rad/s to
1 000 rad/s (frequency-dependent).
These ranges are covered with the uncertainty of measurement specified in Clause 3. Calibration frequencies
lower than 1 Hz (e.g. 0,4 Hz, which is a reference frequency used in other International Standards) and
angular acceleration amplitudes smaller than 0,1 rad/s can be achieved using method 3A or method 3B
specified in this part of ISO 16063, in conjunction with an appropriate low-frequency angular vibration
generator.
Method 1A (cf. Clause 8: fringe-counting, interferometer type A) and method 1B (cf. Clause 8: fringe-counting,
interferometer type B) are applicable to the calibration of the magnitude of complex sensitivity in the frequency
range of 1 Hz to 800 Hz and under special conditions, at higher frequencies. Method 2A (cf. Clause 9:
minimum-point method, interferometer type A) and method 2B (cf. Clause 9: minimum-point method,
interferometer type B) can be used for sensitivity magnitude calibration in the frequency range of 800 Hz to
1,6 kHz. Method 3A (cf. Clause 10: sine-approximation method, interferometer type A) and method 3B
(cf. Clause 10: sine-approximation method, interferometer type B) can be used for magnitude of sensitivity
and phase calibration in the frequency range of 1 Hz to 1,6 kHz. Methods 1A, 1B and 3A, 3B provide for
calibrations at fixed angular acceleration amplitudes at various frequencies. Methods 2A and 2B require
calibrations at fixed rotational angle amplitudes (angular velocity amplitude and angular acceleration
amplitude vary with frequency).
NOTE 1 The numbering 1 to 3 of the methods characterizes the handling of the interferometer output signal(s)
analogous to ISO 16063-11: number 1 for fringe counting, number 2 for minimum-point detection and number 3 for sine-
approximation. Each of these signal handling procedures can be used together with interferometer types A and B specified
in this part of ISO 16063.
Interferometer type A designates a Michelson or Mach-Zehnder interferometer with retro-reflector(s) located at a radius, R,
from the axis of rotation of the angular exciter. This interferometer type is limited to rotational angle amplitudes of 3°
maximum. Interferometer type B designates a Michelson or a Mach-Zehnder interferometer using a circular diffraction
grating implemented on the lateral surface of the circular measuring table. This interferometer type is not limited as
regards the rotational angle amplitude if the diffraction grating covers the whole lateral surface of the disk (i.e. 360°).
Usually, the maximum angular vibration is, in this case, limited by the angular vibration exciter.
NOTE 2 Though the calibration methods specified in this part of ISO 16063 are applicable to angular transducers
(according to definition in ISO 2041) and, in addition, to measuring instrumentation for angular motion quantities, the
specifications are given for transducers as calibration objects, for the sake of simplified description. Some specific
information for the calibration of rotational laser vibrometers is given in 4.11 and Figure 11.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 266, Acoustics — Preferred frequencies
ISO 2041:1990, Vibration and shock — Vocabulary
ISO 16063-1:1998, Methods for the calibration of vibration and shock transducers — Part 1: Basic concepts
3 Uncertainty of measurement
The limits of the uncertainty of measurement app
...