ISO 20341:2003

INTERNATIONAL ISO
STANDARD 20341
First edition
2003-07-15
Surface chemical analysis — Secondary-
ion mass spectrometry — Method for
estimating depth resolution parameters
with multiple delta-layer reference
materials
Analyse chimique des surfaces — Spectrométrie de masse des ions
secondaires — Méthode d'estimation des paramètres de résolution en
profondeur à l'aide de matériaux de référence multicouches minces

Reference number
©
ISO 2003
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Contents Page
1 Scope . 1
2 Normative references . 1
3 Symbols . 1
4 Requirements for multiple delta-layer reference materials . 1
5 Procedures . 2
6 Test report . 3
Annex A (normative) Simpler options of estimating SIMS depth resolution parameters . 4
Bibliography . 5
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ISO 2003 – All rights reserved iii

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
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Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 20341 was prepared by Technical Committee ISO/TC 201, Surface chemical analysis, Subcommittee
SC 6, Secondary ion mass spectrometry.
©
iv ISO 2003 – All rights reserved

Introduction
Depth resolution is one of the important parameters in SIMS depth profiling. However, sputter depth profiles in
SIMS analysis are affected by many factors which may include ion-beam-induced mixing and segregation,
charge-driven diffusion, matrix effects, crater shape, surface microtopography, etc. To obtain the best depth
resolution, the deterioration of the depth resolution due to these factors should be understood and minimized.
The best depth resolution generally requires special conditions of analysis which may include an ultra-low
primary-ion beam energy, glancing incidence angle, specimen rotation, specimen cooling to cryogenic
temperature, etc., all of which cannot be easily adopted for daily SIMS analysis. In addition to this, the
optimization of the analysis parameters may be quite different for each specimen. Moreover, different aspects of
the depth resolution are also affected by instrumental factors such as the crater shape, ion beam homogeneity,
removal of the crater edge effect, mass interference, memory effect, residual gas effect, etc.
Therefore, it is not straightforward to estimate the depth resolution under given daily SIMS analysis conditions.
In this International Standard, the three essential component parameters of the depth resolution, the leading-
edge decay length, the trailing-edge decay length and the Gaussian broadening, are described and procedures
are provided for the measurement of each parameter. The depth resolution parameters under daily SIMS
analysis conditions can be estimated using multiple delta-layer reference materials.
©
ISO 2003 – All rights reserved v

.
vi
INTERNATIONAL STANDARD ISO 20341:2003(E)
Surface chemical analysis — Secondary-ion mass
spectrometry — Method for estimating depth resolution
parameters with multiple delta-layer reference materials
1Scope
1.1 This International Standard specifies procedures for estimating three depth resolution parameters, viz the
leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling
using multiple delta-layer reference materials.
1.2 This International Standard is not applicable to delta-layers where the chemical and physical state of the
near-surface region, modified by the incident primary ions, is not in the steady state.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced document
(including any amendments) applies.
ISO 18115:2001
...