IEC TS 62607-9-2:2024

IEC TS 62607-9-2 ®
Edition 1.0 2024-07
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –
Part 9-2: Nanomagnetic products – Magnetic field distribution: Magneto-optical
indicator film technique
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IEC TS 62607-9-2 ®
Edition 1.0 2024-07
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –

Part 9-2: Nanomagnetic products – Magnetic field distribution: Magneto-optical

indicator film technique
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120  ISBN 978-2-8322-8987-7

– 2 – IEC TS 62607-9-2:2024 © IEC 2024
CONTENTS
FOREWORD . 7
INTRODUCTION . 9
1 Scope . 11
2 Normative references . 11
3 Terms and definitions . 12
3.1 General terms . 12
3.2 General terms related to magnetic stray field characterization . 12
3.3 Terms related to the measurement method described in this document . 12
3.4 Terms related to the magneto optical indicator film (MOIF) . 15
3.5 Terms related to Faraday rotation . 18
3.6 Terms related to the magneto-optical measurement setup . 19
3.7 Terms related to optical microscopy . 21
3.8 Terms related to the setup calibration process . 22
3.9 Terms related to the magneto-optical measurement process . 23
3.10 Key control characteristics measured according to this standard . 23
4 Symbols and abbreviated terms . 24
5 General . 25
5.1 Measurement principle . 25
5.1.1 Overview . 25
5.1.2 Magneto-optical indicator films . 26
5.1.3 Sensor . 27
5.1.4 Faraday effect in reflection . 28
5.1.5 Measurement scheme . 28
5.1.6 MOIF signal generation theory . 29
5.1.7 MOIF measurement modes . 29
5.1.8 Feature detection mode . 30
5.1.9 Quantitative spatially resolved feature detection mode . 30
5.2 Description of measurement equipment or apparatus . 30
5.2.1 MOIF imaging system . 30
5.2.2 MOIF imaging systems for spot measurements, confocal microscopy . 31
5.2.3 Imaging systems in wide field geometry . 31
5.2.4 MOIF signal detection . 31
5.2.5 MOIF signal detection schemes overview . 32
5.2.6 MOIF signal detection by a polarizing filter as an analyser . 32
5.2.7 Differential MOIF signal detection by a polarizing filter plus a Faraday
rotator to modulate the signal for lock-in detection . 32
5.2.8 MOIF signal generation by a polarization camera . 33
5.2.9 MOIF signal generation theory for direct MOIF measurements . 33
5.2.10 Selecting the analyser operating angle . 33
5.2.11 MOIF signal generation theory in differential MOIF measurements . 34
5.2.12 MOIF signal generation theory in the polarization measurement using a
polarization camera . 35
5.3 Ambient conditions during measurement . 35
6 Measurement procedure . 36
6.1 Calibration of measurement equipment . 36
6.1.1 Calibration of analyser-based MOIF measurements for purely
perpendicular magnetic fields H = H . 36
z
6.1.2 Calibration approach for one pixel . 36
6.1.3 Calibration approach for array sensors using an analyser-based
detection scheme . 37
6.1.4 Background image subtraction . 37
6.1.5 Calibration of differential MOIF for perpendicular magnetic fields H = H . 38
z
6.1.6 Calibration approach . 38
6.1.7 Providing the perpendicular calibration field . 39
6.2 MOIF key control parameters . 40
6.2.1 General . 40
ext
6.2.2 Calibrated external magnetic field, H . 40
z
6.2.3 Intensity of the light source . 40
6.2.4 Optical imaging geometry . 40
MOIF
6.2.5 Thickness of the MOIF, d . 40
6.2.6 Measurement height, h . 41
sensor
6.2.7 Sensor measurement temperature, T . 41
env
6.2.8 Environmental measurement temperature, T . 41
6.2.9 Scan size Sx × Sy and pixel resolution Nx, Ny and pixel size ∆x × ∆x . 41
6.3 Detailed description of the measurement procedure . 42
6.3.1 General . 42
6.3.2 Sample mounting . 42
6.3.3 Temperature stabilization . 42
6.3.4 Frame averaging . 42
6.3.5 Background image . 42
6.3.6 Raw data distribution . 43
6.3.7 Measurement procedure for geometrical feature detection . 43
6.3.8 Measurement procedure for calibrated magnetic field measurements
(analyser based) . 43
6.3.9 Detailed description of the MOIF calibration procedure for quantitative
stray field measurements . 44
6.3.10 Detailed description of the MOIF calibrated stray field measurement
procedure . 46
6.4 Measurement accuracy . 48
6.4.1 Contribution of in-plane magnetic field components . 48
6.4.2 In-plane magnetic fields contribution for low magnetic fields H << H . 48
uoop
6.4.3 In-plane magnetic field contribution for fields in the order of magnitude
of H . 49
uoop
6.4.4 Forward simulation . 49
6.4.5 Influence of the finite sensor thickness . 49
6.4.6 Transfer function-based sensor thickness correction . 50
6.4.7 Spatial resolution . 50
6.4.8 Diffraction limited resolution . 50
6.4.9 Sensor thickness limited resolution . 50
6.4.10 Signal generation artefacts in MOIF measurements . 51
6.4.11 Uncertainty evaluation . 51
6.4.12 Calibration uncertainty . 51
6.4.13 Uncertainty of calibrated field measurement . 51
7 Data analysis and interpretation of results . 52
7.1 Quantitative data analysis . 52

– 4 – IEC TS 62607-9-2:2024 © IEC 2024
7.2 Secondary parameters from MOIF measurements . 52
7.2.1 General . 52
7.2.2 Secondary parameters of magnetic scales . 52
7.2.3 Secondary parameters of grain-oriented electrical steel sheets . 53
8 Results to be reported . 53
8.1 Cover sheet . 53
8.2 Product / sample identification . 53
8.3 Measurement conditions . 53
8.4 Measurement specific information (exampl
...