EN 61094-6:2005

SLOVENSKI SIST EN 61094-6:2005

STANDARD
december 2005
Meritev mikrofonov – 6. del: Elektrostatični aktuatorji za ugotavljanje
frekvenčnega odziva (IEC 61094-6:2004)
Measurement microphones – Part 6: Electrostatic actuators for determination of
frequency response (IEC 61094-6:2004)
ICS 17.140.50; 33.160.50 Referenčna številka
©  Standard je založil in izdal Slovenski inštitut za standardizacijo. Razmnoževanje ali kopiranje celote ali delov tega dokumenta ni dovoljeno

EUROPEAN STANDARD EN 61094-6
NORME EUROPÉENNE
EUROPÄISCHE NORM January 2005

ICS 17.140.50
English version
Measurement microphones
Part 6: Electrostatic actuators for determination of frequency response
(IEC 61094-6:2004)
Microphones de mesure Messmikrofone
Partie 6: Grilles d'entraînement Teil 6: Elektrostatische Anregeelektroden
pour la détermination zur Ermittlung des Frequenzgangs
de la réponse en fréquence (IEC 61094-6:2004)
(CEI 61094-6:2004)
This European Standard was approved by CENELEC on 2004-12-01. CENELEC members are bound to
comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and
notified to the Central Secretariat has the same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Cyprus, Czech
Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Slovakia, Slovenia, Spain, Sweden,
Switzerland and United Kingdom.

CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung

Central Secretariat: rue de Stassart 35, B - 1050 Brussels

© 2005 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.

Ref. No. EN 61094-6:2005 E
Foreword
The text of document 29/562/FDIS, future edition 1 of IEC 61094-6, prepared by IEC TC 29,
Electroacoustics, was submitted to the IEC-CENELEC parallel vote and was approved by CENELEC
as EN 61094-6 on 2004-12-01.
The following dates were fixed:
– latest date by which the EN has to be implemented
at national level by publication of an identical
national standard or by endorsement (dop) 2005-09-01
– latest date by which the national standards conflicting
with the EN have to be withdrawn (dow) 2007-12-01
Annex ZA has been added by CENELEC.
__________
Endorsement notice
The text of the International Standard IEC 61094-6:2004 was approved by CENELEC as a European
Standard without any modification.

- 3 - EN 61094-6:2005
Annex ZA
(normative)
Normative references to international publications
with their corresponding European publications
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
NOTE Where an international publication has been modified by common modifications, indicated by (mod), the relevant
EN/HD applies.
Publication Year Title EN/HD Year
1) 2)
IEC 61094-1 - Measurement microphones EN 61094-1 2000
Part 1: Specifications for laboratory
standard microphones
1) 2)
IEC 61094-2 - Part 2: Primary method for pressure EN 61094-2 1993
calibration of laboratory standard
microphones by the reciprocity technique

1) 2)
IEC 61094-3 - Part 3: Primary method for free-field EN 61094-3 1995
calibration of laboratory standard
microphones by the reciprocity technique

1) 2)
IEC 61094-5 - Part 5: Methods for pressure calibration EN 61094-5 2001
of working standard microphones by
comparison
ISO/IEC Guide 1995 Guide to the expression of uncertainty in - -
Express measurement (GUM)
1)
Undated reference.
2)
Valid edition at date of issue.

NORME CEI
INTERNATIONALE
IEC
61094-6
INTERNATIONAL
Première édition
STANDARD
First edition
2004-11
Microphones de mesure –
Partie 6:
Grilles d'entraînement pour la détermination
de la réponse en fréquence
Measurement microphones –
Part 6:
Electrostatic actuators for determination
of frequency response
 IEC 2004 Droits de reproduction réservés  Copyright - all rights reserved
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utilisée sous quelque forme que ce soit et par aucun procédé, form or by any means, electronic or mechanical, including
électronique ou mécanique, y compris la photocopie et les photocopying and microfilm, without permission in writing from
microfilms, sans l'accord écrit de l'éditeur. the publisher.
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Telephone: +41 22 919 02 11 Telefax: +41 22 919 03 00 E-mail: inmail@iec.ch Web: www.iec.ch
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For price, see current catalogue

61094-6  IEC:2004 – 3 –
CONTENTS
FOREWORD.7

1 Scope.11
2 Normative references .11
3 Terms and definitions .13
4 Reference environmental conditions .13
5 Principle of electrostatic actuator operation .13
5.1 General .13
5.2 Electrostatic pressure.15
5.3 Electrostatic actuator response .21
6 Actuator design .23
6.1 General .23
6.2 Design.23
7 Validation .25
7.1 General .25
7.2 Repeatability of measurements .25
7.3 Uniformity of actuators of a given model.25
7.4 Uniformity of the difference between actuator and pressure response levels .25
8 Measurement of electrostatic actuator response.27
8.1 System for measurement of electrostatic actuator response .27
8.2 Uncertainty components .29
9 Applications of an electrostatic actuator .33
9.1 General .33
9.2 Verification of the frequency response of a measurement system.33
9.3 Determination of the environmental characteristics of microphone
measurement systems.33
9.4 Determination of free-field and pressure frequency responses.35
9.5 Measurement of actuator response at very high frequencies .35

Annex A (informative) Examples of electrostatic actuator designs.37
Annex B (informative) Set-up for measuring electrostatic actuator response .43
Annex C (informative) Typical uncertainty analysis .45
Annex D (informative) Difference between free-field-, pressure- and actuator
responses for typical models of measurement microphones.51

Figure 1 – Principle of microphone and electrostatic actuator .17
Figure 2 – Lumped parameter model of a measurement microphone excited by an
electrostatic actuator .21
Figure A.1 – Example of electrostatic actuator for type WS1 microphones .37
Figure A.2 – Example of an electrostatic actuator for type WS2 microphones .39
Figure A.3 – Examples of electrostatic actuators forming integral parts of the
microphone protection grids.41
Figure A.4 – Example of an electrostatic actuator combined with  weather-resistant
protection .41

61094-6  IEC:2004 – 5 –
Figure B.1 – Typical set-up for measuring the electrostatic actuator response of a
microphone.43
Figure D.1 – Examples of differences between relative pressure and actuator
frequency responses for four different type of measurement microphone: WS1P (a),
WS1F (b) of nominal sensitivities –26 dB re 1V/Pa and WS2P (c) and WS2F (d) of
nominal sensitivities –38 dB re 1V/Pa .51
Figure D.2 – Examples of differences between relative free-field and actuator
frequency responses for type WS1, WS2 and WS3 microphones when used without
protection grids.51
Figure D.3 – Example of model dependent difference between relative free field and
actuator frequency responses for a type WS2 microphone when used with its
protection grid.53
Figure D.4 – Example on the determination of a relative free-field frequency response b)
by adding the model dependent free-field to actuator difference as shown in Figure D.3
to the electrostatic actuator response of a microphone a) .53

Table C.1 – Uncertainties .49

61094-6  IEC:2004 – 7 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
MEASUREMENT MICROPHONES –
Part 6: Electrostatic actuators for determination
of frequency response
FOREWORD
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