EN 62047-10:2011

SLOVENSKI STANDARD
01-december-2011
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Semiconductor devices - Microelectromechanical devices - Part 10: Micro-pillar
compression test for MEMS materials
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 10:
Druckprüfverfahren an zylinderförmigen Mikroproben für Werkstoffe der
Mikrosystemtechnik
Dispositifs à semiconducteur - Dispositifs microélectromécaniques - Partie 10: Essai de
compression utilisant la technique des micro-piliers pour les matériaux des MEMS
Ta slovenski standard je istoveten z: EN 62047-10:2011
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN 62047-10
NORME EUROPÉENNE
September 2011
EUROPÄISCHE NORM
ICS 31.080.99
English version
Semiconductor devices -
Micro-electromechanical devices -
Part 10: Micro-pillar compression test for MEMS materials
(IEC 62047-10:2011)
Dispositifs à semiconducteur -  Halbleiterbauelemente -
Dispositifs microélectromécaniques - Bauelemente der Mikrosystemtechnik -
Partie 10: Essai de compression utilisant Teil 10: Druckprüfverfahren an
la technique des micro-piliers pour les zylinderförmigen Mikroproben für
matériaux des MEMS Werkstoffe der Mikrosystemtechnik
(CEI 62047-10:2011) (IEC 62047-10:2011)

This European Standard was approved by CENELEC on 2011-08-30. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia,
Spain, Sweden, Switzerland and the United Kingdom.

CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung

Management Centre: Avenue Marnix 17, B - 1000 Brussels

© 2011 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 62047-10:2011 E
Foreword
The text of document 47F/85/FDIS, future edition 1 of IEC 62047-10, prepared by SC 47F, Micro-
electromechanical systems, of IEC TC 47, Semiconductor devices, was submitted to the IEC-CENELEC
parallel vote and approved by CENELEC as EN 62047-10:2011.

The following dates are fixed:
– latest date by which the document has to be implemented at (dop) 2012-05-30
national level by publication of an identical national
standard or by endorsement
– latest date by which the national standards conflicting with the (dow) 2014-08-30
document have to be withdrawn
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CENELEC [and/or CEN] shall not be held responsible for identifying any or all such patent
rights.
__________
Endorsement notice
The text of the International Standard IEC 62047-10:2011 was approved by CENELEC as a European
Standard without any modification.
__________
- 3 - EN 62047-10:2011
Annex ZA
(normative)
Normative references to international publications
with their corresponding European publications

The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.

NOTE  When an international publication has been modified by common modifications, indicated by (mod), the relevant EN/HD
applies.
Publication Year Title EN/HD Year

IEC 62047-8 - Semiconductor devices - Micro- EN 62047-8 -
electromechanical devices -
Part 8: Strip bending test method for tensile
property measurement of thin films

IEC 62047-10 ®
Edition 1.0 2011-07
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
colour
inside
Semiconductor devices – Micro-electromechanical devices –
Part 10: Micro-pillar compression test for MEMS materials

Dispositifs à semiconducteur – Dispositifs microélectromécaniques –
Partie 10: Essai de compression utilisant la technique des micro-piliers pour
les matériaux des MEMS
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
CODE PRIX L
ICS 31.080.99 ISBN 978-2-88912-606-4

– 2 – 62047-10  IEC:2011
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Symbols and designations . 5
4 Test piece . 6
4.1 General . 6
4.2 Shape of test piece . 6
4.3 Measurement of dimensions . 6
5 Testing method and test apparatus . 7
5.1 Test principle . 7
5.2 Test machine . 7
5.3 Test procedure . 8
5.4 Test environment. 8
6 Test report. 8
Annex A (informative) Error estimation using finite element method . 10
Bibliography . 11

Figure 1 – Shape of cylindrical pillar (See Table 1 for symbols) . 5
Figure 2 – Schematic of Micro-pillar compression test . 7
Figure A.1 – Error estimation with the aspect ratio and friction coefficient in the elastic
modulus measurement . 10

Table 1 – Symbols and designations of test piece . 6

62047-10  IEC:2011 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 10: Micro-pillar compression test for MEMS materials

FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
all national electrotechnical committees (IEC National Committees). The object of IEC is to promote
international co-operation on all questions concerning standardization in the electrical and electronic fields. To
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2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international
consensus of opinion on the relevant subjects since each technical committee has representation from all
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3) IEC Publications have the form of recommendations for international use and are accepted by IEC National
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8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is
indispensable for the correct application of this publication.
9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of
patent rights. IEC shall not be held responsible for identifying any or all such patent rights.
International Standard IEC 62047-10 has been prepared by subcommittee 47F: Micro-
electromechanical systems, of IEC technical committee 47: Semiconductor devices.
The text of this standard is based on the following documents:
FDIS Report on voting
47F/85/FDIS 47F/94/RVD
Full information on the voting for the approval of this standard can be found in the report on
voting indicated in the above table.
This publication has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts of IEC 62047, under the general title Semiconductor devices – Micro-
electromechanical devices, can be found on the IEC website.

– 4 – 62047-10  IEC:2011
The committee has decided that the contents of this publication will remain unchanged until
the stability date indicated on the IEC web site under "http://webstore.iec.ch" in the data
related to the specific publication. At this date, the publication will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
IMPORTANT – The “colour inside” logo on the cover page of this publication indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this publication using a colour printer.

62047-10  IEC:2011 – 5 –
SEMICONDUCTOR DEVICES –
MICRO-ELECTROMECHANICAL DEVICES –

Part 10: Micro-
...