prEN ISO 25178-603

SLOVENSKI STANDARD
01-december-2023
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 603.
del: Konstrukcije in značilnosti nekontaktnih instrumentov (interferometrija s
faznim zamikom) (ISO/DIS 25178-603:2023)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and
characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178
-603:2023)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 603: Aufbau und Merkmale von berührungslos messenden Geräten
(phasenschiebende Interferometrie) (ISO/DIS 25178-603:2023)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603:
Conception et caractéristiques des instruments sans contact (à interférométrie à
glissement de franges) (ISO/DIS 25178-603:2023)
Ta slovenski standard je istoveten z: prEN ISO 25178-603
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-603
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:
2023-10-23 2024-01-15
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 603:
Design and characteristics of non-contact (phase shifting
interferometry) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
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NATIONAL REGULATIONS.
ISO/DIS 25178-603:2023(E)
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PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023

ISO/DIS 25178-603:2023(E)
DRAFT INTERNATIONAL STANDARD
ISO/DIS 25178-603
ISO/TC 213 Secretariat: BSI
Voting begins on: Voting terminates on:

Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 603:
Design and characteristics of non-contact (phase shifting
interferometry) instruments
ICS: 17.040.20
This document is circulated as received from the committee secretariat.
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
© ISO 2023
ISO/CEN PARALLEL PROCESSING
THEREFORE SUBJECT TO CHANGE AND MAY
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
NOT BE REFERRED TO AS AN INTERNATIONAL
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NATIONAL REGULATIONS.
Website: www.iso.org ISO/DIS 25178-603:2023(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
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TO SUBMIT, WITH THEIR COMMENTS,
NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
ii
PROVIDE SUPPORTING DOCUMENTATION. © ISO 2023

ISO/DIS 25178-603:2023(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Instrument requirements .3
5 Metrological characteristics . 4
6 Design features .5
7 General information . 5
Annex A (informative) Principles of PSI for areal surface topography measurement .6
Annex B (informative) Sources of measurement error for PSI .11
Annex C (informative) Relation with the GPS matrix .15
Bibliography .16
iii
ISO/DIS 25178-603:2023(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment,
as well as information about ISO's adherence to the World Trade Organization (WTO) principles in the
Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.
The committee responsible for this document is Technical Committee ISO/TC 213, Dimensional and
geometrical product specifications and verification.
This second edition cancels and replaces the first edition (ISO 25178-603:2013), which has been
technically revised.
A list of all parts in the ISO 25178 series can be found on the ISO website.
iv
ISO/DIS 25178-603:2023(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences chain link F of the chains of standards on profile and areal
surface texture.
The ISO GPS matrix model given in ISO 14638 gives an overview of the ISO GPS system of which this
document is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex C.
This document includes normative terms and definitions relevant to the phase shifting interferometry
(PSI) method for the measurement of areal surface topography. The informative Annex A briefly
summarizes PSI instruments and methods to clarify the normative definitions and to provide a
foundation for informative Annex B, which describes common sources of uncertainty and their relation
to the metrological characteristics of PSI.
NOTE Portions of this document, particularly the informative sections, describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of phase
shifting interferometry. This document is not intended to establish priority for any intellectual property, nor
does it imply a license to proprietary technologies described herein.
v
DRAFT INTERNATIONAL STANDARD ISO/DIS 25178-603:2023(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 603:
Design and characteristics of non-contact (phase shifting
interferometry) instruments
1 Scope
This document describes the design and metrological characteristics of phase shifting interferometry
instruments for areal measurement of surface topography. Because surface profiles can be extracted
from areal surface topography data, the methods described in this document can be applied to profiling
measurements as well.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies. For
undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the following
apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
phase shifting interferometry
PSI
method for measuring areal surface topography from the surface height dependence of an
interferometric signal, whereby the interference phase is estimated from two or more digitized
interference images acquired over a sequence of controlled phase shifts
Note 1 to entry: In this document, PSI refers specifically to methods that employ time-dependent phase shifting
mechanisms. Other methods of acquiring and analysing interference patterns, including parallel or instantaneous
methods using polarization or carrier fringes, are outside the scope of this document.
Note 2 to entry: ISO/TR 14999-2:2019, 6.4.4 provides further information on synchronous detection and phase
shifting interferometry.
Note 3 to entry: PSI instruments are most often employed for measurements of optically smooth surfaces, as
defined in ISO 25178-600:2019, 3.4.4.
ISO/DIS 25178-603:2023(E)
3.2
interference objective
microscope objective adapted with a reference path and reference surface for the generation of
interference patterns superimposed on the image of a sample surface
Note 1 to entry: Interference objectives are used in PSI instruments that are configured as microscopes. Other
configurations of PSI instruments, particularly for fields of view larger than about 10 mm, can have interferometer
designs that are not based on microscope objectives.
Note 2 to entry: Annex A provides example types of interference objective in common usage.
3.3
linear phase shifting interferometry
linear PSI
PSI method that relies on sampling an interference signal over a sequence of evenly spaced interference
phase shifts
3.4
sinusoidal phase shifting interferometry
sinusoidal PSI
PSI method that relies on sampling an interference signal over a sequence of sinusoidally-varying
interference phase shifts
3.5
axial scan
mechanical or optical displacement between the sample under inspection and the imaging optics
Note 1 to en
...