ISO 29301:2017
(Main)Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
ISO 29301:2017 specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
Analyse par microfaisceaux — Microscopie électronique analytique — Méthodes d'étalonnage du grandissement d'image au moyen de matériaux de référence de structures périodiques
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Standards Content (Sample)
INTERNATIONAL ISO
STANDARD 29301
Second edition
2017-12
Microbeam analysis — Analytical
electron microscopy — Methods
for calibrating image magnification
by using reference materials with
periodic structures
Analyse par microfaisceaux — Microscopie électronique analytique
— Méthodes d'étalonnage du grandissement d'image au moyen de
matériaux de référence de structures périodiques
Reference number
ISO 29301:2017(E)
©
ISO 2017
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ISO 29301:2017(E)
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© ISO 2017, Published in Switzerland
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ii © ISO 2017 – All rights reserved
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ISO 29301:2017(E)
Contents Page
Foreword .iv
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 5
4.1 Definition of the image magnification . 5
4.2 Expressing magnification . 6
5 Reference materials . 6
5.1 General . 6
5.2 Requirements for CRM/RM. 7
5.3 Storage and handling . 7
6 Calibration procedures . 7
6.1 General . 7
6.2 Mounting CRM/RM . 8
6.3 Setting TEM operating conditions for calibration . 8
6.4 Capturing digitized image . 9
6.5 Digitizing the image recorded on photographic film .10
6.5.1 General.
...
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