IEC 60747-18-3:2019

IEC 60747-18-3 ®
Edition 1.0 2019-12
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 18-3: Semiconductor bio sensors – Fluid flow characteristics of lens-free
CMOS photonic array sensor package modules with fluidic system

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IEC 60747-18-3 ®
Edition 1.0 2019-12
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 18-3: Semiconductor bio sensors – Fluid flow characteristics of lens-free

CMOS photonic array sensor package modules with fluidic system

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99 ISBN 978-2-8322-7673-0

– 2 – IEC 60747-18-3:2019 © IEC 2019
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
4 Measurement setup . 8
4.1 General . 8
4.2 Measurement system . 9
4.3 Measurement parameters of sensor . 9
4.4 Evaluation process. 10
5 Measurement and calculation at initial state flow in fluidic system . 11
5.1 General . 11
5.2 Measurement and calculation of the flow propagation characteristics . 12
5.3 Calculation of horizontal flow velocity for global shutter system . 15
5.4 Calculation of horizontal flow velocity for rolling shutter system . 17
5.5 Calculation of vertical flow velocity for rolling shutter system . 18
5.6 Criteria for quality assurance of fluidic system . 19
6 Measurement and calculation at steady-state flow in fluidic system . 19
6.1 General . 19
6.2 Measurement and calculation of all pixels at every frame . 20
6.3 Calibration of lens-free CMOS photonic array sensor package modules with
fluidic system . 20
6.3.1 General . 20
6.3.2 Calibration for planarization of non-uniform fluidic system . 20
6.3.3 Final evaluation of calibrated sensor package modules with fluidic
system . 21
7 Test report . 21
Bibliography . 22

Figure 1 – Example of lens-free CMOS photonic array sensor package modules with
fluidic system of porous media . 8
Figure 2 – Example of measurement setup for lens-free CMOS photonic array sensor
package module with fluidic system . 9
Figure 3 – Example of photoelectric measurement schematics . 9
Figure 4 – Example of measurement parameters of sensor . 10
Figure 5 – Evaluation process of fluid flow characteristics of lens-free CMOS photonic
array sensor package modules with fluidic system . 11
Figure 6 – Example of frame capture performed at every frame . 13
Figure 7 – Flow propagation profile in the early stage of the initial state flow . 13
Figure 8 – Flow propagation profile in the intermediate stage of the initial state flow . 14
Figure 9 – Flow propagation profile in the final stage of the initial state flow . 15
Figure 10 – Example of exposure and horizontal flow in global shutter system . 16
Figure 11 – Example of exposure and horizontal flow in horizontal rolling shutter
system . 17
Figure 12 – Example of exposure and vertical flow in vertical rolling shutter system . 18

Figure 13 – Example on box plot of column pixels at every frame from sensor output
values of all pixel arrays . 20
Figure 14 – Example on boxplot of all pixels at every frame from sensor output values

of all pixel arrays . 20

– 4 – IEC 60747-18-3:2019 © IEC 2019
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
Part 18-3: Semiconductor bio sensors – Fluid flow characteristics
of lens-free CMOS photonic array sensor package modules
with fluidic system
FOREWORD
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International Standard IEC 60747-18-3 has been prepared by subcommittee 47E: Discrete
semiconductor devices, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
FDIS Report on voting
47E/682/FDIS 47E/690/RVD
Full information on the voting for the approval of this International Standard can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

A list of all parts of the IEC 60747 series, published under the general title Semiconductor
devices, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
A bilingual version of this publication may be issued at a later date.

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– 6 – IEC 60747-18-3:2019 © IEC 2019
INTRODUCTION
The IEC 60747-18 series on semiconductor bio sensors is composed of the following parts:
• IEC 60747-18-1 defines the test method and data analysis for calibration of lens-free
CMOS photonic array sensors
• IEC 60747-18-2 defines the evaluation process of lens-free CMOS photonic array sensor
package modules
• IEC 60747-18-3 defines the fluid flow characteristics of lens-free CMOS photonic array
sensor package modules with fluidic system
The IEC 60747-18 series includes subjects such as noise analysis, long-term reliability tests,
test methods for lens-free CMOS photonic array sensor package modules under patchable
environments, test methods under implantable environments, etc.
The International Electrotechnical Commission (IEC) draws attention to the fact that it is
claimed that
...