IEC TS 62607-6-9:2022

IEC TS 62607-6-9 ®
Edition 1.0 2022-02
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-9: Graphene-based material – Sheet resistance: Eddy current method
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IEC TS 62607-6-9 ®
Edition 1.0 2022-02
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –

Part 6-9: Graphene-based material – Sheet resistance: Eddy current method

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-1073-5

– 2 – IEC TS 62607-6-9:2022 © IEC 2022
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 General terms . 8
3.2 Terms related to the measurement method . 8
3.3 Key control characteristics . 9
4 Abbreviated terms . 10
5 General . 10
5.1 Measurement principle . 10
5.2 Measurement configuration . 10
5.3 Measurement mode . 11
5.3.1 Single point mode . 11
5.3.2 Imaging scanning mode . 11
5.4 Measurement system . 11
5.4.1 Measurement equipment . 11
5.4.2 Calibration standards . 12
5.4.3 Ambient conditions . 12
5.4.4 Sample preparation method . 13
6 Measurement procedure . 13
6.1 Calibration of test equipment . 13
6.2 Verifying calibration . 14
6.3 Description of the measurement procedure . 14
7 Data analysis / interpretation of results . 14
7.1 Single point sheet resistance measurement . 14
7.2 Sheet resistance imaging . 15
7.2.1 General . 15
7.2.2 Line profile analysis . 15
7.2.3 Histogram analysis . 15
7.2.4 Statistical analysis . 15
7.3 Individual homogeneity assessment . 15
7.4 Defect identification . 15
8 Test report . 16
8.1 General . 16
8.2 Sample identification . 16
8.3 Test conditions . 16
8.4 Measurement specific information . 16
8.5 Test results . 16
Annex A (informative) Worked example and test report . 17
A.1 General . 17
A.2 Sample identification . 17
A.3 Geometry of the sample and scanning method . 18
A.4 Measurement related information . 18
Annex B (informative) Comparison between eddy current and four point probe
measurement . 20

B.1 General . 20
B.2 Results . 20
Annex C (informative) Use case quality inspection . 22
C.1 General . 22
C.2 Analysis of the sheet resistance distribution for quality inspection . 22
C.3 Analysis example . 22
Annex D (informative) Reference sample sets . 25
Bibliography . 26

Figure 1 – Scheme of measurement setup . 12
Figure A.1 – Sheet resistance map with histogram . 19
Figure B.1 – Correlation of the results of sheet resistance measured by the eddy
current (EC) method and by the four point probe (4PP) method . 21
Figure C.1 – Sheet resistance image of 200 mm × 200 mm graphene sheet . 22
Figure C.2 – Line profile analysis . 23
Figure C.3 – Histogram view of the whole sample . 23
Figure C.4 – Histogram analysis (high sheet resistance area) . 23
Figure C.5 – Histogram analysis (good area) . 24
Figure C.6 – Selective area analysis (used specified shape) . 24
Figure C.7 – Selective area analysis (regular shape) . 24
Figure D.1 – Sheet resistance reference sample set 300 mm × 300 mm . 25

Table A.1 – Product identification . 17
Table A.2 – General material description . 17
Table A.3 – Geometry of the sample and scanning parameter . 18
Table A.4 – Measurement related information . 18
Table A.5 – Test results: Sheet resistance . 18
Table B.1 – Comparison of the results of sheet resistance measured by the eddy
current method and by the four point probe method . 20
Table B.2 – Measurement accuracy . 21

– 4 – IEC TS 62607-6-9:2022 © IEC 2022
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING – KEY CONTROL CHARACTERISTICS –

Part 6-9: Graphene-based material – Sheet resistance:
Eddy current method
FOREWORD
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