IEC TS 62607-8-4:2024

IEC TS 62607-8-4 ®
Edition 1.0 2024-12
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –
Part 8-4: Metal-oxide interfacial devices – Activation energy of electronic trap
states: Low-frequency-noise spectroscopy

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IEC TS 62607-8-4 ®
Edition 1.0 2024-12
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –

Part 8-4: Metal-oxide interfacial devices – Activation energy of electronic trap

states: Low-frequency-noise spectroscopy

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120  ISBN 978-2-8327-0080-8

– 2 – IEC TS 62607-8-4:2024 © IEC 2024
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms, definitions, and abbreviated terms . 7
3.1 Terms and definitions . 7
3.1.1 General terms . 8
3.1.2 Terms specific to this document . 8
3.2 Abbreviated terms . 8
4 General . 9
4.1 Measurement principle . 9
4.2 Sample preparation of the DUT . 9
4.3 Experimental setup and apparatus . 9
5 Measurement procedure . 10
6 Data analysis and interpretation of results . 11
6.1 General . 11
6.2 Peak determination . 11
6.3 Interpretation of results . 11
7 Reporting data . 12
Annex A (informative) Case study: Low-frequency-noise spectroscopy measurement
of metal-oxide interfacial device . 13
A.1 General . 13
A.2 LFNS measurement . 13
A.3 Data analysis . 14
Annex B (informative) Case study: Low-frequency-noise spectroscopy measurement
of metal-oxide interfacial device . 18
B.1 General . 18
B.2 LFNS measurement . 18
B.3 Data analysis . 19
Annex C (informative) Case study: Low-frequency-noise spectroscopy measurement
of metal-oxide interfacial device (electrochemical-type [6]) . 21
C.1 General . 21
C.2 LFNS measurement . 21
C.3 Data analysis . 22
Bibliography . 24

Figure 1 – An example of sample placement and experimental system . 9
Figure A.1 – Transmission electron microscopy image of TiN/TaO /TiN . 13
x
Figure A.2 – Changes in noise spectra as a function of temperature at the given
frequencies . 14
Figure A.3 – Changes in noise spectra as a function of temperature at the given
frequencies with the fitting curves to determine the peak temperatures . 15
Figure A.4 – Arrhenius plot using the peak temperatures . 16
Figure A.5 – Arrhenius plot using the peak temperatures, ln( T ∕f ) . 17

Figure B.1 – Changes in noise spectra as a function of temperature at the given
frequencies with the fitting curves to determine the peak temperatures . 19
Figure B.2 – Arrhenius plot using the peak temperatures . 20
Figure B.3 – Arrhenius plot using the peak temperatures, ln(T ∕f) . 20
Figure C.1 – Transmission electron microscopy image of Cu/Ta O /Pt . 21
2 5
Figure C.2 – Changes in noise spectra as a function of temperature at the given
frequencies with the fitting curves to determine the peak temperatures . 22
Figure C.3 – Arrhenius plot using the peak temperatures . 23
Figure C.4 – Arrhenius plot using the peak temperatures, ln(T ∕f) . 23

Table 1 – LFNS measurement sequence and parameters . 10
Table A.1 – LFNS measurement sequence and parameters . 14
Table A.2 – Peak temperature at each frequency . 15
Table A.3 – Peak temperature at each frequency, ln(T ∕f) . 16
Table A.4 – R values and activation energies . 17
Table B.1 – LFNS measurement sequence and parameters . 19
Table B.2 – R values and activation energies . 20
Table C.1 – LFNS measurement sequence and parameters . 22
Table C.2 – R values and activation energies . 23

– 4 – IEC TS 62607-8-4:2024 © IEC 2024
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 8-4: Metal-oxide interfacial devices – Activation energy of electronic
trap states: Low-frequency-noise spectroscopy

FOREWORD
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IEC TS 62607-8-4 has been prepared by IEC technical committee 113: Nanotechnology for
electrotechnical products and systems. It is a Technical Specification.
The text of this Technical Specification is based on the following documents:
Draft Report on vo
...