IEC TS 62607-6-2:2023

IEC TS 62607-6-2 ®
Edition 1.0 2023-04
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 6-2: Graphene – Number of layers: atomic force microscopy,
optical transmission, Raman spectroscopy
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IEC TS 62607-6-2 ®
Edition 1.0 2023-04
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –

Part 6-2: Graphene – Number of layers: atomic force microscopy,

optical transmission, Raman spectroscopy

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-6749-3

– 2 – IEC TS 62607-6-2:2023 © IEC 2023
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 General terms . 7
3.2 Terms related to measurements . 9
4 Method for preparation of graphene flake sample . 11
4.1 Micromechanical cleavage . 11
4.2 Sonication . 11
4.3 Ball milling . 11
4.4 Fluid dynamics . 11
5 Measurement of the number of graphene layers using combined method . 12
5.1 Basic concept of combined method . 12
5.2 General protocol . 12
5.2.1 Sample preparation . 12
5.2.2 AFM calibration . 12
5.2.3 Raman calibration . 12
5.2.4 Optical reflectance calibration . 12
5.3 Measurement procedure . 12
6 Data analysis and interpretation of results . 13
6.1 General protocol for data analysis . 13
6.2 Analysis of number of layers of graphene using Raman spectroscopy . 13
6.3 Analysis of number of layers of graphene using AFM topography . 13
6.4 Analysis of number of layers of graphene using reflectance (Rayleigh
scattering). 14
7 Report . 14
Annex A (informative) Summary of three simultaneous measurements and their
analysis . 15
A.1 Flowchart for determining the number of layers of graphene . 15
A.2 Summary table of analysis process . 16
Annex B (informative) Interpretation of the simultaneous measurement for Raman
scattering, AFM, and reflectance – case studies . 17
Annex C (informative) Description of the measurement apparatus . 20
C.1 General . 20
C.2 AFM system . 20
C.3 Spectroscopy system . 20
Annex D (informative) Measurement using currently available equipment . 21
D.1 Atomic force microscopy . 21
D.2 Optical transmittance and reflectance . 22
D.3 Raman scattering . 23
D.4 Reflection and optical contrast (Rayleigh scattering) . 23
Bibliography . 24

Figure 1 – Schematic of simultaneous measurement of AFM, Raman scattering, and
light reflectance . 13

Figure A.1 – Flowchart for determining the number of layers of graphene . 15
Figure B.1 – Simultaneous measurement of Raman scattering, AFM, and reflectance
images to determine the number of graphene layers . 17
Figure B.2 – Confocal Raman spectrum, AFM line profile and reflectance intensity
profile of graphene flake extracted along red line in Figure B.1 . 18
Figure B.3 – Confocal Raman spectrum, AFM line profile and reflectance intensity
profile of graphene flake extracted along cyan line in Figure B.1 . 19
Figure B.4 – Confocal Raman spectrum, AFM line profile and reflectance intensity
profile of graphene flake extracted along black line in Figure B.1 . 19

Table A.1 – Summary table of analysis process . 16
Table D.1 – Summary of selected results for monolayer graphene thickness measured
by AFM with preparation method, AFM method, substrate, and whether monolayer
graphene was confirmed by Raman spectroscopy [7] . 22

– 4 – IEC TS 62607-6-2:2023 © IEC 2023
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING – KEY CONTROL CHARACTERISTICS –

Part 6-2: Graphene – Number of layers: atomic force microscopy,
optical transmission, Raman spectroscopy

FOREWORD
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IEC TS 62607-6-2 has been prepared by IEC technical committee 113 Nanotechnology for
electrotechnical products and systems. It is a Technical Specification.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
113/676/DTS 113/727/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.

This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at http://www.iec.ch/standardsdev/publications.
A list of all parts in the IEC TS 62607 series, published under the general title
Nanomanufacturing – Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this
...