EN ISO 25178-607:2019

SLOVENSKI STANDARD
01-junij-2019
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 607.
del: Imenske značilnosti nekontaktnih instrumentov (konfokalna mikroskopija)
(ISO 25178-607:2018)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal
characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2018)
Geometrische Produktspezifikationen (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 607: Merkmale von berührungslos messenden Geräten (konfokale Mikroskopie)
(ISO 25178-607:2018)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 607:
Caractéristiques nominales des instruments sans contact (microscopie confocale) (ISO
25178-607:2018)
Ta slovenski standard je istoveten z: EN ISO 25178-607:2019
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EN ISO 25178-607
EUROPEAN STANDARD
NORME EUROPÉENNE
April 2019
EUROPÄISCHE NORM
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 607: Nominal characteristics of non-contact
(confocal microscopy) instrumentss (ISO 25178-
607:2018)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikationen (GPS) -
surface: Surfacique - Partie 607: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 607:
nominales des instruments sans contact (microscopie Merkmale von berührungslos messenden Geräten
confocale) (ISO 25178-607:2018) (konfokale Mikroskopie) (ISO 25178-607:2018)
This European Standard was approved by CEN on 15 February 2019.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2019 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-607:2019 E
worldwide for CEN national Members.

Contents Page
European foreword . 3
Endorsement notice . 3

European foreword
This document (EN ISO 25178-607:2019) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2019, and conflicting national standards shall
be withdrawn at the latest by October 2019.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,
Netherlands, Norway, Poland, Portugal, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
Endorsement notice
The text of ISO 25178-607:2019 has been approved by CEN as EN ISO 25178-607 without any
modification.
INTERNATIONAL ISO
STANDARD 25178-607
First edition
2019-03
Geometrical product specifications
(GPS) — Surface texture: Areal —
Part 607:
Nominal characteristics of non-contact
(confocal microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 607: Caractéristiques nominales des instruments sans contact
(microscopie confocale)
Reference number
ISO 25178-607:2019(E)
©
ISO 2019
ISO 25178-607:2019(E)
© ISO 2019
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
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Published in Switzerland
ii © ISO 2019 – All rights reserved

ISO 25178-607:2019(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Descriptions of the influence quantities . 5
Annex A (informative) Classification of in-plane scanning techniques for confocal microscopes .7
Annex B (informative) Theory of operation of confocal microscopes .13
Annex C (informative) Thin and thick films with confocal microscopes.17
Annex D (informative) Relation to the GPS matrix model .19
Bibliography .20
ISO 25178-607:2019(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO's adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT) see www .iso
.org/iso/foreword .html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/members .html.
iv © ISO 2019 – All rights reserved

ISO 25178-607:2019(E)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general
GPS standard (see ISO 14638). It influences the chain link F of the chains of standards on areal surface
texture and profile surface texture.
The ISO/GPS matrix model given in ISO 14638 gives an overview of the ISO/GPS system of which this
document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and
the default decision rules given in ISO 14253-1 apply to the specifications made in accordance with this
document, unless otherwise indicated.
For more detailed information of the relation of this document to other standards and the GPS matrix
model, see Annex D.
This document describes the metrological characteristics of confocal microscopes designed for the
measurement of surface topography maps.
For detailed information on the confocal microscopy technique, see Annex A and Annex B.
NOTE Portions of this document, particularly the informative sections, describe patented systems and
methods. This information is provided only to assist users in understanding the operating principles of confocal
microscopy. This document is not intended to establish priority for any intellectual property, nor does it imply a
license to proprietary technologies described herein.
INTERNATIONAL STANDARD ISO 25178-607:2019(E)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 607:
Nominal characteristics of non-contact (confocal
microscopy) instruments
1 Scope
This document describes the influence quantities and instrument characteristics of confocal
microscopy systems for areal measurement of surface topography. Because surface profiles can be
extracted from surface topography images, the methods described in this document can be applied to
profiling measurements as well.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the
following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https: //www .iso .org/obp
— IEC Electropedia: available at http: //www .electropedia .org/
3.1
confocal microscopy
measurement method wherein the localization of optically sectioned images during an axial scan
through the focus of a microscope’s objective provides a means to determine an areal surface
topography image
Note 1 to entry: See also ISO 25178-6:2010, 3.3.6.
Note 2 to entry: Confocal microscopes produce optically sectioned images by restricting the illumination onto
the sample and through the detection system by means of a pattern, scanning this pattern in-plane to fill the
image (see also Figure B.1).
Note 3 to entry: Illumination and detection patterns could be one or several points, slits or any order of
structures, that effectively reduce the il
...