ISO 16063-11:1999

INTERNATIONAL ISO
STANDARD 16063-11
First edition
1999-12-15
Methods for the calibration of vibration and
shock transducers —
Part 11:
Primary vibration calibration by laser
interferometry
Méthodes pour l'étalonnage des transducteurs de vibrations et de chocs —
Partie 11: Étalonnage primaire de vibrations avec interféromètre de laser
Reference number
©
ISO 1999
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ii © ISO 1999 – All rights reserved

Contents Page
Foreword.iv
1 Scope .1
2 Uncertainty of measurement .1
3 Requirements for apparatus.2
3.1 General.2
3.2 Frequency generator and indicator .2
3.3 Power amplifier/vibrator combination .2
3.4 Seismic block(s) for vibrator and laser interferometer.2
3.5 Laser .3
3.6 Interferometer.3
3.7 Counting instrumentation (for Method 1) .4
3.8 Tunable bandpass filter or spectrum analyser (for Method 2) .4
3.9 Instrumentation for zero detection (for Method 2).4
3.10 Voltage instrumentation, measuring true r.m.s. accelerometer output.4
3.11 Distortion-measuring instrumentation .4
3.12 Oscilloscope (optional) .4
3.13 Waveform recorder with computer interface (for Method 3) .5
3.14 Computer with data-processing program (for Method 3) .5
3.15 Other requirements.5
4 Ambient conditions .6
5 Preferred accelerations and frequencies .6
6 Common procedure for all three methods.6
7 Method 1: Fringe-counting method .6
7.1 General.6
7.2 Test procedure.6
7.3 Expression of results .8
8 Method 2: Minimum-point method.8
8.1 General.8
8.2 Test procedure.9
8.3 Expression of results .11
9 Method 3: Sine-approximation method .11
9.1 General.11
9.2 Test procedure.11
9.3 Data acquisition .13
9.4 Data processing.14
10 Report of calibration results.15
Annex A (normative) Uncertainty components in the primary calibration by laser interferometry of
vibration and shock transducers .17
Annex B (normative) Formulae for the calculation of acceleration.23
Bibliography.27
© ISO 1999 – All rights reserved iii

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO
member bodies). The work of preparing International Standards is normally carried out through ISO technical
committees. Each member body interested in a subject for which a technical committee has been established has
the right to be represented on that committee. International organizations, governmental and non-governmental, in
liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical
Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3.
Draft International Standards adopted by the technical committees are circulated to the member bodies for voting.
Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this part of ISO 16063 may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights.
International Standard ISO 16063-11 was prepared by Technical Committee ISO/TC 108, Mechanical vibration and
shock, Subcommittee SC 3, Use and calibration of vibration and shock measuring instruments.
This first edition of ISO 16063-11 cancels and replaces ISO 5347-1, which has been technically revised.
ISO 16063 consists of the following parts, under the general title Methods for the calibration of vibration and shock
transducers:
� Part 1: Basic concepts
� Part 11: Primary vibration calibration by laser interferometry
� Part 12: Primary vibration calibration by the reciprocity method
� Part 13: Primary shock calibration using laser interferometry
� Part 21: Secondary vibration calibration
� Part 22: Secondary shock calibration
Annexes A and B form a normative part of this part of ISO 16063.
iv © ISO 1999 – All rights reserved

INTERNATIONAL STANDARD ISO 16063-11:1999(E)
Methods for the calibration of vibration and shock transducers —
Part 11:
Primary vibration calibration by laser interferometry
1 Scope
This part of ISO 16063 specifies the instrumentation and procedure to be used for primary vibration calibration of
rectilinear accelerometers (with or without amplifier) to obtain magnitude and phase lag of the complex sensitivity
by steady-state sinusoidal vibration and laser interferometry.
It is applicable to a frequency range from 1 Hz to 10 kHz and a dynamic range (amplitude) from 0,1 m/s to
1 000 m/s (frequency-dependent).
These ranges are covered with the uncertainty of measurement specified in clause 2. Calibration frequencies lower
than 1 Hz (e.g. 0,4 Hz, which is a reference frequency used in other International Standards) and acceleration
2 2
amplitudes smaller than 0,1 m/s (e.g. 0,004 m/s at 1 Hz) can be achieved using Method 3 specified in this part of
ISO 16063, in conjunction with an appropriate low-frequency vibration generator.
Method 1 (fringe-counting method) is applicable to sensitivity magnitude calibration in the frequency range 1 Hz to
800 Hz and, under special conditions, at higher frequencies (cf. clause 7). Method 2 (minimum-point method) can
be used for sensitivity magnitude calibration in the frequency range 800 Hz to 10 kHz (cf. clause 8). Method 3
(sine-approximation method) can be used for magnitude of sensitivity and phase calibration in the frequency range
1Hzto10kHz(cf. clause9).
Methods 1 and 3 provide for calibrations at fixed acceleration amplitudes at various frequencies. Method 2 requires
calibrations at fixed displacement amplitudes (acceleration amplitude varies with frequency).
2 Uncertainty of measurement
The limits of the uncertainty of measurement applicable to this part of ISO 16063 shall be as follows.
a) For the magnitude of sensitivity:
0,5 % of the measured value at reference conditions;
u 1 % of the measured value outside reference conditions.
b) For the phase shift of sensitivity:
0,5° of the measured value at reference conditions;
u 1° of the reading outside reference conditions.
Recommended reference conditions are as follows:
� frequency in hertz: 160, 80, 40, 16 or 8 (or radian frequency � = 1 000, 500, 250, 100 or 50 radians per
second);
© ISO 1999 – All rights reserved 1

� acceleration in metres per second squared (acceleration amplitude or r.m.s. value): 100, 50, 20, 10, 5, 2 or 1.
Amplifier settings shall be selected for optimum performance with respect to noise, distortion and influence from
cut-off frequencies.
NOTE The uncertainty of measurement is expressed as the expanded measurement uncertainty in accordance with
ISO 16063-1 (referred to in short as uncertainty).
3 Requirements for apparatus
3.1 General
This clause gives recommended specifications for the apparatus necessary to fulfil the scope of clause 1 and to
obtain the uncertainties of clause 2.
If desired, systems covering parts of the ranges may be used, and normally different systems (e.g. exciters) should
be used to cover all the frequency and dynamic ranges.
NOTE The apparatus specified in this clause covers all devices and instruments required for any of the three calibration
methods described in this part of ISO 16063. The assignment to a given method is indicated (cf. Figures 1, 2 and 3).
3.2 Frequency generator and indicator
A frequency generator and indicator having the following characteristics shall be used:
a) uncertainty of frequency: maximum 0,05 % of reading;
b) frequency stability: better than� 0,05 % of reading over the measurement period;
c) amplitude stability: better than� 0,05 % of reading over the measurement period.
3.3 Power amplifier/vibrator combination
A power amplifier/vibrator combination having the following characteristics shall be used.
a) Total harmonic distortion of acceleration: 2 % maximum.
b) Transverse, bending and rocking acceleration: sufficiently small to prevent excessive effects on the calibration
results. At large amplitudes, preferably in the low-frequency range from 1 Hz to 10 Hz, transverse motion of
less than 1 % of the motion in the intended direction may be required; above 10 Hz to 1 kHz, a maximum of
10 % of the axial motion is permitted; above 1 kHz, a maximum of 20 % of the axial motion is tolerated.
c) Hum and noise: 70 dB minimum below full output.
d) Acceleration amplitude stability: better than� 0,05 % of reading over the measurement period.
The attachment surface shall introduce minimal base strain to the accelerometer (see 3.15).
3.4 Seismic block(s) for vibrator and laser interferometer
The vibrator and th
...