IEC TS 62607-8-2:2021

IEC TS 62607-8-2 ®
Edition 1.0 2021-01
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 8-2: Nano-enabled metal-oxide interfacial devices – Test method for the
polarization properties by thermally stimulated depolarization current
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IEC TS 62607-8-2 ®
Edition 1.0 2021-01
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –

Part 8-2: Nano-enabled metal-oxide interfacial devices – Test method for the

polarization properties by thermally stimulated depolarization current

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120; 07.030 ISBN 978-2-8322-9219-8

– 2 – IEC TS 62607-8-2:2021 © IEC 2021
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms, definitions, and abbreviated terms . 6
3.1 Terms and definitions . 6
3.2 Abbreviated terms . 7
4 Measurement of TSDC . 7
4.1 General . 7
4.1.1 Measurement system . 7
4.1.2 TSDC measurement sequence . 9
4.1.3 Expression of temperature dependency of TSDC value . 10
4.2 Sample preparation . 10
4.3 Experimental procedures . 10
5 Reporting data . 11
6 Data analysis / interpretation of results . 11
6.1 General . 11
6.2 Determination of the polarization charge . 11
6.3 Peak method . 11
Annex A (informative) Case study – TSDC measurement of SrTiO . 12
A.1 General . 12
A.2 Estimating activation energy of polarization state by peak method . 14
Annex B (informative) Possible methods to analyse TSDC spectra . 16
B.1 Determination of the polarization charge . 16
B.2 Peak method . 16
Bibliography . 17

Figure 1 – Examples of the experimental schematic diagram of TSDC . 8
Figure 2 – Photos of sample holders . 8
Figure 3 – Visualization of TSDC measurement sequence . 9
Figure A.1 – TSDC data comparison by heating rate . 13
Figure A.2 – Determination of TSDC peak positions using the second derivative curves . 15
Figure A.3 – Arrhenius plot of ln(T /β) versus 1/T . 15
m m
Figure B.1 – Peak method . 16

Table 1 – TSDC measurement sequence steps and parameters. 10
Table A.1 – TSDC measurement sequence steps and parameters / case study . 13
Table A.2 – Activation energies in the first heating for y = ln(T /β) . 15
m
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 8-2: Nano-enabled metal-oxide interfacial devices – Test method for
the polarization properties by thermally stimulated depolarization current

FOREWORD
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Technical Specifications are subject to review within three years of publication to decide
whether they can be transformed into International Standards.
IEC TS 62607-8-2, which is a Technical Specification, has been prepared by IEC technical
committee 113: Nanotechnology standardization for electrical and electronic products and
systems.
– 4 – IEC TS 62607-8-2:2021 © IEC 2021
The text of this Technical Specification is based on the following documents:
Draft TS Report on voting
113/539/DTS 113/562/RVDTS
Full information on the voting for the approval of this Technical Specification can be found in
the report on voting indicated in the above table.
This document has been drafted in accordance with the ISO/IEC Directives, Part 2.
A list of all parts in the IEC 62607 series, published under the general title Nanomanufacturing –
Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to
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• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
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INTRODUCTION
Thermally stimulated depolarization current (TSDC) measurement has been a widely used
method for acquiring information about electric polarization phenomena of various materials
such as dielectrics, ferroelectrics, semiconductors, ceramics, plastics, and other organic
materials for the past several decades. Recently, TSDC measurement became recognized as
a powerful tool to evaluate polarization and depolarization, relaxation time, charge-storage and
activation energy in advanced electronic materials including nano-enabled materials and
devices. Accordingly, a standardized protocol for TSDC measurement will be useful to add
validity to the experimental data for the purposes of productization of nano-enabled materials
and devices. The reference sample for the reproducible TSDC measurement is also important.
This document offers a measurement method to be developed for determining polarization
properties of metal-oxide interfacial devices using TSDC.

– 6 – IEC TS 62607-8-2:2021 © IEC 2021
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 8-2: Nano-enabled metal-oxide interfacial devices – Test method for
the polarization properties by thermally stimulated depolarization current

1 Scope
There are two types of thermally stimulated current (TSC) mea
...