IEC TS 62607-6-4:2024

IEC TS 62607-6-4 ®
Edition 2.0 2024-02
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –
Part 6-4: Graphene-based materials – Surface conductance: non-contact
microwave resonant cavity method

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IEC TS 62607-6-4 ®
Edition 2.0 2024-02
TECHNICAL
SPECIFICATION
Nanomanufacturing – Key control characteristics –

Part 6-4: Graphene-based materials – Surface conductance: non-contact

microwave resonant cavity method

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120  ISBN 978-2-8322-8317-2

– 2 – IEC TS 62607-6-4 © IEC 2024
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 Graphene layers . 7
3.2 Measurement terminology . 8
4 Microwave cavity testing structure . 9
5 Test specimen . 9
6 Measurement procedure . 10
6.1 Apparatus . 10
6.2 Calibration . 10
6.3 Measurements . 11
6.3.1 General . 11
6.3.2 Empty cavity . 11
6.3.3 Specimen . 11
6.3.4 Repeated procedure . 11
6.3.5 Substrate . 12
7 Calculations of surface conductance . 12
8 Report . 12
9 Accuracy consideration . 13
Annex A (informative) Case study of surface conductance measurement of single-
layer and few-layer graphene . 14
A.1 General . 14
A.2 Cavity perturbation procedure . 14
A.3 Experimental procedure . 15
A.4 Results . 15
A.5 Surface conductance of single-layer graphene and few-layer graphene . 16
A.6 Summary . 17
Bibliography . 18

Figure 1 – Microwave cavity test structure . 9
Figure 2 – Microwave cavity testing fixture . 10
Figure A.1 – S magnitude of the resonant peak TE as a function of frequency at
21 103
several specimen insertions (h ) . 16
x
Figure A.2 – Plots of 1/Q − 1/Q as a function of the normalized specimen area (w h ). . 16
x 0 x
IEC TS 62607-6-4 © IEC 2024 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOMANUFACTURING –
KEY CONTROL CHARACTERISTICS –
Part 6-4: Graphene-based materials –
Surface conductance: non-contact microwave resonant cavity method

FOREWORD
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IEC TS 62607-6-4 has been prepared by IEC technical committee 113: Nanotechnology for
electrotechnical products and systems. It is a Technical Specification.
This second edition cancels and replaces the first edition published in 2016. This edition
constitutes a technical revision.
This edition includes the following significant technical changes with respect to the previous
edition:
a) changed the document title to better reflect its purpose and application:

– 4 – IEC TS 62607-6-4 © IEC 2024
old title: Graphene – Surface conductance measurement using resonant cavity
new title: Graphene based materials – Surface conductance: non-contact microwave
resonant cavity method.
b) replaced former Figure 1 with new Figure 1 and Figure 2, to better illustrate the method’s
fundamentals and its implementation for a non-technical reader.
The text of this Technical Specification is based on the following documents:
Draft Report on voting
113/756/DTS 113/809/RVDTS
Full information on the voting for its approval can be found in the report on voting indicated in
the above table.
The language used for the development of this Technical Specification is English.
This document was drafted in accordance with ISO/IEC Directives, Part 2, and developed in
accordance with ISO/IEC Directives, Part 1 and ISO/IEC Directives, IEC Supplement, available
at www.iec.ch/members_experts/refdocs. The main document types developed by IEC are
described in greater detail at www.iec.ch/publications.
A list of all parts in the IEC 62607 series, published under the general title Nanomanufacturing –
Key control characteristics, can be found on the IEC website.
The committee has decided that the contents of this document will remain unchanged until the
stability date indicated on the IEC website under webstore.iec.ch in the data related to the
specific document. At this date, the document will be
• reconfirmed,
• withdrawn, or
• amended.
IMPORTANT – The "colour inside" logo on the cover page of this document indicates
that it contains colours which are considered to be useful for the correct understanding
of its contents. Users should therefore print this document using a colour printer.

IEC TS 62607-6-4 © IEC 2024 – 5 –
INTRODUCTION
The microwave cavity test method for surface conductance is non-contact, fast, and accurate.
It is well suited for standards development, research and development (R&D), and for quality
control in the manufacturing of two-dimensional (2D) nano-carbon materials. These sheet-like
or flake-like carbon forms can be assembled into atomically thin monolayer or multilayer
graphene materials. They can be stacked, folded, crumpled, or pillared into a variety of nano-
carbon architectures with the vertical dimension limited to a few tenths of a nanometre. Many
of these 2D materials, and their derivatives, are new and exhibit extraordinary physical and
electrical properties such as optical transparency, anisotropic heat diffusivity, and charge
transport that are of significant interest to science, technology, and commercial applications
...