IEC TR 63258:2021

IEC TR 63258
Edition 1.0 2021-03
TECHNICAL
REPORT
colour
inside
Nanotechnologies – A guideline for ellipsometry application to evaluate the
thickness of nanoscale films
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IEC TR 63258
Edition 1.0 2021-03
TECHNICAL
REPORT
colour
inside
Nanotechnologies – A guideline for ellipsometry application to evaluate the

thickness of nanoscale films
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-9584-7

– 2 – IEC TR 63258:2021 © IEC 2021
CONTENTS
FOREWORD . 3
INTRODUCTION . 5
1 Scope . 6
2 Normative references . 6
3 Terms and definitions . 6
3.1 General terms . 6
3.2 Terms specific to this document . 7
4 Measurement of ellipsometry . 8
4.1 General . 8
4.2 Measurement procedure . 9
4.2.1 Sample preparation for system check . 9
4.2.2 Experimental procedure for system check . 9
4.2.3 Sample handling . 9
4.2.4 Experimental procedures . 9
5 Reporting data . 10
6 Data analysis / interpretation of results . 10
6.1 General . 10
6.2 Setting analysis model . 11
6.3 Data fitting and validation of analysis result . 12
6.3.1 General . 12
6.3.2 Data analysis method 1 – Dispersion law (Cauchy model) [6] . 13
6.3.3 Data analysis method 2 – Sellmeier equation model (transparent
material) [7] . 13
6.3.4 Data analysis method 3 – Drude dispersion model (conductive material)
[8], [9] . 13
6.3.5 Data analysis method 4 – Dispersion law (classical model / Lorentz
model) [8], [9] . 14
6.3.6 Data analysis method 5 – Forouhi-Bloomer dispersion model [10], [11]. 15
6.3.7 Data analysis method 6 – Tauc-Lorentz dispersion model (amorphous
materials) [12], [13]. 15
Annex A (informative) Case study: Interlaboratory comparison by using SiO /Si
samples . 17
Annex B (informative) Case study: Ellipsometry measurement of other materials . 19
Bibliography . 20

Figure 1 – Primary structure of ellipsometry measurement . 8
Figure 2 – Flow chart of the ellipsometry data analysis . 11
Figure A.1 – An example of the report form of ellipsometry measurements . 17
Figure A.2 – An example of the results of the interlaboratory comparison . 18
Figure A.3 – The wafer-shaped sample used for the interlaboratory comparison . 18

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOTECHNOLOGIES – A GUIDELINE FOR ELLIPSOMETRY
APPLICATION TO EVALUATE THE THICKNESS OF NANOSCALE FILMS

FOREWORD
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The main task of IEC technical committees is to prepare International Standards. However, a
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data of a different kind from that which is normally published as an International Standard, for
example "state of the art".
IEC TR 63258, which is a Technical Report, has been prepared by IEC technical committee
113: Nanotechnology for electrotechnical products and systems, in collaboration with
ISO technical committee 229: Nanotechnologies.
It is published as a double logo document.
The text of this Technical Report is based on the following documents:
DTR Report on voting
113/548/DTR 113/563/RVDTR
Full information on the voting for the approval of this Technical Report can be found in the
report on voting indicated in the above table.

– 4 – IEC TR 63258:2021 © IEC 2021
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INTRODUCTION
Ellipsometry is a powerful optical technique to evaluate the dielectric properties of thin films.
Ellipsometry can be used to characterize thickness, roughness, composition, crystalline nature,
and other properties of nanomaterials, and is frequently used to warrant the quality and the
performance of thin-film growth equipment. The signal depends on the change in the optical
response of incident light that interacts with the nanomaterial being investigated.
Many current and emerging electrotechnical devices employ nanomaterials in the form of thin
films. Therefore, it is important to develop a measurement protocol to evaluate the thickness of
such films with sufficient accuracy. This document describes the practical considerations that
need to be taken into account in using ellipsometry to evaluate the thickness of nanoscale films.

– 6 – IEC TR 63258:2021 © IEC 2021
NANOTECHNOLOGIES – A GUIDELINE FOR ELLIPSOMETRY
APPLICATION TO EVALUATE THE THICKNESS OF NANOSCALE FILMS

1 Scope
This document, which is a Technical Report, is focused on the practical protocol of ellipsometry
to evaluate the thickness of nanoscale films. This document does not include any specification
of the ellipsometers, but suggests how to minimize the data variation to improve data
reproducibility.
This document includes
– outlines of the ellipsometry procedures,
– methods of interpretation of results and discussion of data analysis, and
– case studies.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content
constitutes requirements of this document. For dated references, only the edition cited applies.
For undated references, the latest edition of the referenced document (including any
amendments) applies.
ISO/TS 80004-1, Nanotechnologies –Vocabulary – Part 1: Core terms
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO/TS 80004-1 and the
following apply.
ISO and IEC maintain termi
...