SIST EN ISO 10360-7:2011

SLOVENSKI STANDARD
01-oktober-2011
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Geometrical product specifications (GPS) - Acceptance and reverification tests for
coordinate measuring machines (CMM) - Part 7: CMMs equipped with imaging probing
systems (ISO 10360-7:2011)
Geometrische Produktspezifikation (GPS) - Annahmeprüfung und Bestätigungsprüfung
für Koordinatenmessgeräte (KMG) - Teil 7: KMG mit Bildverarbeitungssystemen (ISO
10360-7:2011)
Spécification géométrique des produits (GPS) - Essais de réception et de vérification
périodique des machines à mesurer tridimensionnelles (MMT) - Partie 7: MMT équipés
de systèmes de mesurage imageurs (ISO 10360-7:2011)
Ta slovenski standard je istoveten z: EN ISO 10360-7:2011
ICS:
17.040.30 Merila Measuring instruments
17.040.40 6SHFLILNDFLMDJHRPHWULMVNLK Geometrical Product
YHOLþLQL]GHOND*36 Specification (GPS)
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN ISO 10360-7
NORME EUROPÉENNE
EUROPÄISCHE NORM
June 2011
ICS 17.040.30
English Version
Geometrical product specifications (GPS) - Acceptance and
reverification tests for coordinate measuring machines (CMM) -
Part 7: CMMs equipped with imaging probing systems (ISO
10360-7:2011)
Spécification géométrique des produits (GPS) - Essais de Geometrische Produktspezifikation (GPS) - Annahme- und
réception et de vérification périodique des machines à
Bestätigungsprüfung für Koordinatenmessgeräte (KMG) -
mesurer tridimensionnelles (MMT) - Partie 7: MMT Teil 7: KMG mit Bildverarbeitungssystemen (ISO 10360-
équipées de systèmes de palpage imageurs (ISO 10360- 7:2011)
7:2011)
This European Standard was approved by CEN on 7 April 2011.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland,
Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and United Kingdom.

EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2011 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 10360-7:2011: E
worldwide for CEN national Members.

Contents Page
Foreword .3

Foreword
This document (EN ISO 10360-7:2011) has been prepared by Technical Committee ISO/TC 213 “Dimensional
and geometrical product specifications and verification” in collaboration with Technical Committee
CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of which is
held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by December 2011, and conflicting national standards shall be withdrawn
at the latest by December 2011.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech
Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain,
Sweden, Switzerland and the United Kingdom.
Endorsement notice
The text of ISO 10360-7:2011 has been approved by CEN as a EN ISO 10360-7:2011 without any
modification.
INTERNATIONAL ISO
STANDARD 10360-7
First edition
2011-06-01
Geometrical product specifications
(GPS) — Acceptance and reverification
tests for coordinate measuring machines
(CMM) —
Part 7:
CMMs equipped with imaging probing
systems
Spécification géométrique des produits (GPS) — Essais de réception et
de vérification périodique des machines à mesurer tridimensionnelles
(MMT) —
Partie 7: MMT équipées de systèmes de palpage imageurs

Reference number
ISO 10360-7:2011(E)
©
ISO 2011
ISO 10360-7:2011(E)
©  ISO 2011
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,
electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or
ISO's member body in the country of the requester.
ISO copyright office
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Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
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Published in Switzerland
ii © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
Contents Page
Foreword .v
Introduction.vi
1 Scope.1
2 Normative references.1
3 Terms and definitions .2
4 Symbols.7
5 Environmental and metrological requirements.8
5.1 Environmental conditions .8
5.2 Operating conditions .8
5.3 Requirements for various configuration imaging probe CMMs .8
5.3.1 General .8
5.3.2 Length measurement errors.9
5.3.3 Probing errors.10
5.3.4 Repeatability range of the length measurement error, R or R .10
B U
5.3.5 Workpiece loading effects.10
6 Acceptance tests and reverification tests .11
6.1 General .11
6.2 Length measurement errors.11
6.2.1 General .11
6.2.2 Measuring equipment .12
6.2.3 Length measurement error, E or E .13
B U
6.2.4 Z length measurement error, E or E .14
BZ UZ
6.2.5 XY length measurement error, E or E .15
BXY UXY
6.2.6 Imaging probe length measurement error, E or E .15
BV UV
6.3 Squareness error, E .16
SQ
6.3.1 General .16
6.3.2 Measuring equipment .16
6.3.3 Measuring positions.17
6.3.4 Measuring procedure .17
6.3.5 Derivation of test results .18
6.4 Repeatability range of the length measurement error, R or R .19
B U
6.5 Probing performance (P ) .19
F2D
6.5.1 Principle.19
6.5.2 Measuring equipment .19
6.5.3 Procedure.19
6.5.4 Derivation of test results .21
6.6 Probing error of the imaging probe, P .21
FV2D
6.6.1 Principle.21
6.6.2 Measuring equipment .21
6.6.3 Procedure.21
6.6.4 Derivation of test results .21
7 Compliance with specifications.22
7.1 Acceptance test .22
7.1.1 Acceptance criteria .22
7.1.2 Data rejection and repeated measurements.24
7.2 Reverification test .24
8 Applications .24
ISO 10360-7:2011(E)
8.1 Acceptance test .24
8.2 Reverification test.25
8.3 Interim check.25
9 Indication in product documentation and data sheets.26
Annex A (informative) Interim check.27
Annex B (normative) Artefacts that represent a calibrated test length.28
Annex C (informative) Alternative method for checking the squareness error.34
Annex D (normative) Mathematical adjustments to low CTE artefacts .36
Annex E (informative) Relation to the GPS matrix model .38
Bibliography .39

iv © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the
International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 10360-7 was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification.
ISO 10360 consists of the following parts, under the general title Geometrical product specifications (GPS) —
Acceptance and reverification tests for coordinate measuring machines (CMM):
⎯ Part 1: Vocabulary
⎯ Part 2: CMMs used for measuring linear dimensions
⎯ Part 3: CMMs with the axis of a rotary table as the fourth axis
⎯ Part 4: CMMs used in scanning measuring mode
⎯ Part 5: CMMs using single and multiple stylus contacting probing systems
⎯ Part 6: Estimation of errors in computing of Gaussian associated features
⎯ Part 7: CMMs equipped with imaging probing systems
⎯ Part 9: CMMs with multiple probing systems
The following part is under preparation:
⎯ Part 8: CMMs with optical distance sensors
ISO 10360-7:2011(E)
Introduction
This part of ISO 10360 is a geometrical product specification (GPS) standard and is to be regarded as a
general GPS standard (see ISO/TR 14638). It influences chain link 5 of the chains of standards on size,
distance, radius, angle, form, orientation, location, run-out and datums. For more detailed information on the
relation of this part of ISO 10360 to other standards and the GPS matrix model, see Annex E.
The tests of this part of ISO 10360 have two technical objectives:
a) to test the error of indication of a calibrated test length using an imaging probing system;
b) to test the errors in the imaging probing system.
The benefits of these tests are that the measured result has a direct traceability to the unit length, the meter,
and that it gives information on how the CMM will perform on similar length measurements.
The structure of this part of ISO 10360 parallels that of ISO 10360-2, which is for CMMs equipped with contact
probing systems. The testing methodology between these two parts of ISO 10360 is intentionally similar. The
differences that exist may be eliminated in future revisions of either this part of ISO 10360 or ISO 10360-2.
All the definitions in Clause 3 will appear in the revision of ISO 10360-1:2000.

vi © ISO 2011 – All rights reserved

INTERNATIONAL STANDARD ISO 10360-7:2011(E)

Geometrical product specifications (GPS) — Acceptance and
reverification tests for coordinate measuring machines
(CMM) —
Part 7:
CMMs equipped with imaging probing systems
1 Scope
This part of ISO 10360 specifies the acceptance tests for verifying the performance of a coordinate measuring
machine (CMM) used for measuring linear dimensions as stated by the manufacturer. It also specifies the
reverification tests that enable the user to periodically reverify the performance of the CMM.
The acceptance and reverification tests given in this part of ISO 10360 are applicable only to Cartesian CMMs
using imaging probing systems of any type operating in the discrete-point probing mode.
This part of ISO 10360 does not explicitly apply to:
⎯ non-Cartesian CMMs; however, parties may apply this part of ISO 10360 to non-Cartesian CMMs by
mutual agreement;
⎯ CMMs using other types of optical probing; however, parties may apply this approach to other optical
CMMs by mutual agreement;
⎯ CMMs using contact probing systems (see ISO 10360-2 for contact probing systems).
This part of ISO 10360 specifies performance requirements that can be assigned by the manufacturer or the
user of a CMM, the manner of execution of the acceptance and reverification tests to demonstrate the stated
requirements, rules for proving conformance, and applications for which the acceptance and reverification
tests can be used.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.
ISO 10360-1:2000, Geometrical Product Specifications (GPS) — Acceptance and reverification tests for
coordinate measuring machines (CMM) — Part 1: Vocabulary
ISO 10360-2:2009, Geometrical product specifications (GPS) — Acceptance and reverification tests for
coordinate measuring machines (CMM) — Part 2: CMMs used for measuring linear dimensions
ISO 14253-1:1998, Geometrical Product Specifications (GPS) — Inspection by measurement of workpieces
and measuring equipment — Part 1: Decision rules for proving conformance or non-conformance with
specifications
ISO 10360-7:2011(E)
ISO 14660-1:1999, Geometrical Product Specifications (GPS) — Geometrical features — Part 1: General
terms and definitions
ISO/TS 23165:2006, Geometrical product specifications (GPS) — Guidelines for the evaluation of coordinate
measuring machine (CMM) test uncertainty
ISO/IEC Guide 99, International vocabulary of metrology — Basic and general concepts and associated terms
(VIM)
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 10360-1, ISO 10360-2, ISO 14253-1,
ISO 14660-1, ISO/TS 23165, ISO/IEC Guide 99 and the following apply.
3.1
imaging probing system
probing system which creates measurement points through the use of an imaging system
NOTE 1 This part of ISO 10360 is primarily concerned with imaging probing systems that enable measurements in the
lateral direction to the probing system axis.
NOTE 2 A video or vision probing system is an imaging probing system.
3.2
imaging probe CMM
CMM equipped with an imaging probing system
3.3
field of view
FOV
area viewed by the imaging probing system
See Figure 1.
NOTE The measuring limits, or size, of the FOV are stated as the limits of the object space that is reproduced in the
final image.
3.4
measuring window
region of interest in the FOV that is used in the determination of the measured point(s)
See Figure 1.
NOTE Configurations of measuring windows may vary widely between various imaging probe CMMs and for different
measuring applications on the same imaging probe CMM.
3.5
measuring plane (of the imaging probing system)
two-dimensional plane defined by the FOV of an imaging probing system
3.6
coefficient of thermal expansion
CTE
α
linear thermal expansion coefficient of a material at 20 °C
2 © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
3.7
normal CTE material
−6 −6
material with a CTE between 8 × 10 /°C and 13 × 10 /°C
3.8
test circle
circular material standard used for acceptance test and reverification test
+Z
+Y
+X
Key
1 camera or other device for capturing an image of the measured object
2 various optical elements of the imaging probing system
3 measured object
4 FOV (object)
5 FOV (image)
6 measuring window
7 measured point
Figure 1 — Imaging probing system
3.9
bidirectional length measurement error
E
B
error of indication when measuring a calibrated bidirectional test length using an imaging probe CMM with a
single probing point (or equivalent) at each end of the calibrated test length
NOTE E is applicable only to imaging probe CMMs that are capable of three-dimensional spatial measurements,
B
which may not always be the case.
ISO 10360-7:2011(E)
3.10
repeatability range of the bidirectional length measurement error
R
B
range (largest minus smallest) of three repeated length measurement errors measured by a CMM when
measuring a calibrated bidirectional test length
3.11
unidirectional length measurement error
E
U
error of indication when measuring a calibrated unidirectional test length using an imaging probe CMM with a
single probing point (or equivalent) at each end of the calibrated test length
NOTE E is applicable only to imaging probe CMMs that are capable of three-dimensional spatial measurements,
U
which may not always be the case.
3.12
repeatability range of the unidirectional length measurement error
R
U
range (largest minus smallest) of three repeated length measurement errors measured by a CMM when
measuring a calibrated unidirectional test length
3.13
Z bidirectional length measurement error
E
BZ
error of indication when measuring a calibrated bidirectional test length that is nominally perpendicular to the
measuring plane of the imaging probe using a single probing point (or equivalent) at each end of the
calibrated test length
NOTE In this part of ISO 10360, it is assumed that the machine Z-axis is nominally perpendicular to the measuring
plane of the imaging probe. If that is not the case, alternative nomenclature should be used (e.g. E or E ).
BX BY
3.14
Z unidirectional length measurement error
E
UZ
error of indication when measuring a calibrated unidirectional test length that is nominally perpendicular to the
measuring plane of the imaging probe using a single probing point (or equivalent) at each end of the
calibrated test length
NOTE In this part of ISO 10360, it is assumed that the machine Z-axis is nominally perpendicular to the measuring
plane of the imaging probe. If that is not the case, alternative nomenclature should be used (e.g. E or E ).
UX UY
3.15
XY bidirectional length measurement error
E
BXY
error of indication when measuring a calibrated bidirectional test length that is nominally parallel to the
measuring plane of the imaging probe using a single probing point (or equivalent) at each end of the
calibrated test length
NOTE In this part of ISO 10360, it is assumed that the machine XY plane is nominally parallel to the measuring plane
of the imaging probe. If that is not the case, alternative nomenclature should be used (e.g. E or E ).
BXZ BYZ
3.16
XY unidirectional length measurement error
E
UXY
error of indication when measuring a calibrated unidirectional test length that is nominally parallel to the
measuring plane of the imaging probe using a single probing point (or equivalent) at each end of the
calibrated test length
NOTE In this part of ISO 10360, it is assumed that the machine XY plane is nominally parallel to the measuring plane
of the imaging probe. If that is not the case, alternative nomenclature should be used (e.g. E or E ).
UXZ UYZ
4 © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
3.17
squareness error
E
SQ
error of indication of the combined influence of the straightness and squareness (perpendicularity of motion)
measured between the axis of motion of the imaging probe CMM that is nominally perpendicular to the
measuring plane of the imaging probe and the plane of motion that is nominally parallel to the measuring
plane of the imaging probe
NOTE The expected usage is where the Z-axis is nominally perpendicular to the measuring plane of the imaging
probe and the XY plane is nominally parallel to the measuring plane of the imaging probe.
3.18
imaging probe bidirectional length measurement error
E
BV
error of indication of a calibrated bidirectional test length measured in any position within the field of view of
the imaging probe, nominally parallel to the measuring plane of the imaging probe, and using a single probing
point (or equivalent) at each end of the calibrated test length
NOTE 1 Testing E does not involve motion of the imaging probe CMM.
BV
NOTE 2 E is applicable only to imaging probe CMMs that are capable of making measurements in the field of view of
BV
the imaging probe, which may not always be the case.
3.19
imaging probe unidirectional length measurement error
E
UV
error of indication of a calibrated unidirectional test length measured in any position within the field of view of
the imaging probe, nominally parallel to the measuring plane of the imaging probe, and using a single probing
point (or equivalent) at each end of the calibrated test length
NOTE 1 Testing E does not involve motion of the imaging probe CMM.
UV
NOTE 2 E is applicable only to imaging probe CMMs that are capable of making measurements in the field of view of
UV
the imaging probe, which may not always be the case.
3.20
probing error
P
F2D
error of indication within which the range of radii can be determined by a least-squares fit of points measured
on a circular material standard of size, the measurements being taken on the test circle located anywhere in
the measuring volume by an imaging probe CMM in the discrete-point probing mode using motion of the CMM
between all successive points and with all points evenly distributed across the usable field of view of the
imaging probe
3.21
probing error of the imaging probe
P
FV2D
error of indication within which the range of radii can be determined by a least-squares fit of point measured
on a circular material standard of size, the measurements being taken on the test circle by an imaging probe
CMM in the discrete-point probing mode using no motion of the CMM and with all points distributed across the
usable field of view of the imaging probe
NOTE P is applicable only to imaging probe CMMs that are capable of making measurements in the field of view
FV2D
of the imaging probe, which may not always be the case.
3.22
maximum permissible error of bidirectional length measurement
E
B, MPE
extreme value of the bidirectional length measurement error, E , permitted by specifications
B
ISO 10360-7:2011(E)
3.23
maximum permissible limit of the bidirectional repeatability range
R
B, MPL
extreme value of the repeatability range of the bidirectional length measurement error, R , permitted by
B
specifications
3.24
maximum permissible error of unidirectional length measurement
E
U, MPE
extreme value of the unidirectional length measurement error, E , permitted by specifications
U
3.25
maximum permissible limit of the unidirectional repeatability range
R
U, MPL
extreme value of the repeatability range of the unidirectional length measurement error, R , permitted by
U
specifications
3.26
maximum permissible error of Z bidirectional length measurement
E
BZ, MPE
extreme value of the Z bidirectional length measurement error, E , permitted by specifications
BZ
3.27
maximum permissible error of Z unidirectional length measurement
E
UZ, MPE
extreme value of the Z unidirectional length measurement error, E , permitted by specifications
UZ
3.28
maximum permissible error of the XY bidirectional length measurement
E
BXY, MPE
extreme value of the XY bidirectional length measurement error, E , permitted by specifications
BXY
3.29
maximum permissible error of the XY unidirectional length measurement
E
UXY, MPE
extreme value of the XY unidirectional length measurement error, E , permitted by specifications
UXY
3.30
maximum permissible squareness error
E
SQ, MPE
extreme value of the squareness error, E , permitted by specifications
SQ
3.31
maximum permissible error of imaging probe bidirectional length measurement
E
BV, MPE
extreme value of the imaging probe bidirectional length measurement error, E , permitted by specifications
BV
3.32
maximum permissible error of imaging probe unidirectional length measurement
E
UV, MPE
extreme value of the imaging probe unidirectional length measurement error, E , permitted by specifications
UV
3.33
maximum permissible probing error
P
F2D, MPE
extreme value of the probing error, P , permitted by specifications
F2D
3.34
maximum permissible probing error of the imaging probe
P
FV2D, MPE
extreme value of the probing error of the imaging probe, P , permitted by specifications
FV2D
6 © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
4 Symbols
For the purposes of this part of ISO 10360, the symbols of Table 1 apply.
Table 1 — Symbols
Symbol Meaning
E bidirectional length measurement error
B
R repeatability range of the bidirectional length measurement error
B
E unidirectional length measurement error
U
R repeatability range of the unidirectional length measurement error
U
E Z bidirectional length measurement error
BZ
E Z unidirectional length measurement error
UZ
E XY bidirectional length measurement error
BXY
E XY unidirectional length measurement error
UXY
E X bidirectional length measurement error
BX
E X unidirectional length measurement error
UX
E Y bidirectional length measurement error
BY
E Y unidirectional length measurement error
UY
E squareness error
SQ
E imaging probe bidirectional length measurement error
BV
E imaging probe unidirectional length measurement error
UV
P probing error
F2D
P probing error of the imaging probe
FV2D
E maximum permissible error of bidirectional length measurement
B, MPE
R maximum permissible limit of bidirectional repeatability range
B, MPL
E maximum permissible error of unidirectional length measurement
U, MPE
R maximum permissible limit of unidirectional repeatability range
U, MPL
E maximum permissible error of Z bidirectional length measurement
BZ, MPE
E maximum permissible error of Z unidirectional length measurement
UZ, MPE
E maximum permissible error of XY bidirectional length measurement
BXY, MPE
E maximum permissible error of XY unidirectional length measurement
UXY, MPE
E maximum permissible error of X bidirectional length measurement
BX, MPE
E maximum permissible error of X unidirectional length measurement
UX, MPE
E maximum permissible error of Y bidirectional length measurement
BY, MPE
E maximum permissible error of Y unidirectional length measurement
UY, MPE
E maximum permissible squareness error
SQ, MPE
E maximum permissible error of imaging probe bidirectional length measurement
BV, MPE
E maximum permissible error of imaging probe unidirectional length measurement
UV, MPE
P maximum permissible probing error
F2D, MPE
P maximum permissible probing error of the imaging probe
FV2D, MPE
NOTE See Clause 9 for the indications of these symbols in product documentation, drawings, data sheets, etc.
ISO 10360-7:2011(E)
5 Environmental and metrological requirements
5.1 Environmental conditions
Limits for permissible environmental conditions, such as temperature conditions, air humidity, vibration and
ambient lighting at the site of installation, that influence the measurements shall be specified by:
⎯ the manufacturer, in the case of acceptance tests;
⎯ the user, in the case of reverification tests.
In both cases, the user is free to choose the environmental conditions under which the ISO 10360-7 testing
will be performed within the specified limits (as supplied in the data sheet of the manufacturer).
The user is responsible for providing the environment enclosing the CMM, as specified by the manufacturer in
the data sheet.
If the environment does not meet the specifications, then verification of the maximum permissible errors and
limits cannot be required.
5.2 Operating conditions
The CMM shall be operated using the procedures given in the manufacturer's operating manual when
conducting the tests given in Clause 6.
Specific areas in the manufacturer's manual to be adhered to are, for example:
a) machine start-up/warm-up cycles,
b) cleaning procedures,
c) probing system qualification,
d) thermal stability of the probing system before calibration,
e) probing approach direction,
f) ambient illumination,
g) illumination system,
h) location, type, number of thermal sensors,
i) imaging probe set-up and magnification,
j) image processing filters and algorithms.
5.3 Requirements for various configuration imaging probe CMMs
5.3.1 General
This part of ISO 10360 recognizes the various configurations of imaging probe CMMs and allows
manufacturer's specifications and the required testing procedure some amount of flexibility for that reason.
8 © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
5.3.2 Length measurement errors
Some imaging probe CMMs are designed and intended for three-dimensional measurements while some are
not capable of making three-dimensional measurements. In order to allow some flexibility in specifications, but
still ensure all necessary requirements for metrological characteristics are met, variations of specifications
using the defined MPEs are allowed.
a) For imaging probe CMMs that are capable of spatial (three-dimensional) measurements anywhere in the
imaging probe CMM volume, this part of ISO 10360 allows for two different testing approaches: the
component approach and the composite approach.
1) The composite approach includes a single maximum permissible error (MPE) for length
measurement errors, i.e.
either E or E .
B, MPE U, MPE
2) The component approach includes the following three MPE values:
i) either E or E ;
BXY, MPE UXY, MPE
ii) either E or E ;
BZ, MPE UZ, MPE
iii) E .
SQ, MPE
The MPE values from the composite and component approaches cannot necessarily be directly compared.
b) For imaging probe CMMs that can move in three axes but are only capable of making measurements in a
two-dimensional plane (nominally parallel to the measuring plane of the imaging probe, whereby
measured features may be in different planes but are projected into a single plane for measurement),
there are two MPE values for length measurement errors:
1) E ;
SQ, MPE
2) either E or E .
BXY, MPE UXY, MPE
c) For imaging probe CMMs that are only capable of making measurements in any two-dimensional plane
(nominally parallel to the measuring plane of the imaging probe, but where all features measured at any
given time are always nominally in a single plane and not projected from the plane of measurement),
there is one MPE value for length measurement errors:
either E or E .
BXY, MPE UXY, MPE
In addition, for machines capable of measurements in the field of view without machine motion, specification
of either E or E is allowed, but not required.
BV, MPE UV, MPE
The maximum permissible errors for the length measurement errors can be specified, at the discretion of the
manufacturer, using either unidirectional or bidirectional test lengths.
NOTE 1 Measuring machines with optical probing systems are sometimes used for the task of line scale pitch
measurement. For this measurement task, a unidirectional length MPE specification may be appropriate.
NOTE 2 Limited availability of suitable bidirectional length artefacts with low calibration uncertainty may significantly
increase the MPE for bidirectional length measurements compared to unidirectional length measurements.
The length measurement errors shall not exceed the respective maximum permissible errors as stated by:
⎯ the manufacturer, in the case of acceptance tests,
⎯ the user, in the case of reverification tests.
The length measurement errors and the maximum permissible errors of length measurement are expressed in
micrometres.
ISO 10360-7:2011(E)
5.3.3 Probing errors
P is required for all machine configurations. The test procedure for the probing error, P , shall
F2D, MPE F2D
include both machine motion and the full usable portion of the field of view.
For machines capable of measurements in the field of view without machine motion, specification of
P is allowed, but not required.
FV2D, MPE
The probing errors, P and P , shall not exceed the respective maximum permissible error, P
F2D FV2D F2D, MPE
and P as stated by:
FV2D, MPE
⎯ the manufacturer, in the case of acceptance tests,
⎯ the user, in the case of reverification tests.
The probing error and the maximum permissible error of the probing error are expressed in micrometres.
5.3.4 Repeatability range of the length measurement error, R or R
B U
When E or E is specified then the corresponding R or R shall also be specified.
B, MPE U, MPE B, MPL U, MPL
The repeatability range of the length measurement errors (R or R values) shall not exceed the respective
B U
maximum permissible limit of the repeatability range, R or R , as stated by:
B, MPL U, MPL
⎯ the manufacturer, in the case of acceptance tests;
⎯ the user, in the case of reverification tests.
The repeatability range of the length measurement error (R or R values) and the maximum permissible limit
B U
of the repeatability range, R or R , are expressed in micrometres.
B, MPL U, MPL
5.3.5 Workpiece loading effects
The length measurement errors shall not exceed the respective maximum permissible errors as stated by the
manufacturer when the CMM is loaded with up to the maximum workpiece mass for which the CMM
performance is rated. Testing of the length measurement errors may be conducted under any workpiece load
(from zero up to the rated maximum workpiece load), selected by the user subject to the following conditions.
⎯ The physical volume of the load supplied for testing shall lie within the measuring volume of the CMM and
the load shall be free-standing.
⎯ The manufacturer may specify a limit on the maximum load per unit area (kg/m ) on the CMM support
(i.e. table) surface or on individual point loads (kg/cm ), or on both; for point loads, the load at any
specific contact point shall be no greater than twice the load of any other contact point.
⎯ Unless otherwise specified by the manufacturer, the load shall be located approximately centrally and
approximately symmetrically at the centre of the CMM table.
The user and manufacturer should arrange for the availability of the load.
The user and the manufacturer should discuss the loading of the CMM table since access to measurement
positions may be impaired by the load.
10 © ISO 2011 – All rights reserved

ISO 10360-7:2011(E)
6 Acceptance tests and reverification tests
6.1 General
Acceptance tests are executed according to the manufacturer's specifications and procedures that are in
compliance with this part of ISO 10360. The manufacturer may choose the artefact representing the calibrated
test length from those described in Annex B and Annex D.
The user may supply the artefact if there is mutual agreement between the user and manufacturer; in this
case, the measurement uncertainty, artefact material, and cost should be carefully considered.
Reverification tests are executed according to the user's specifications and the manufacturer's procedures.
For all tests, supplementary measurements may be required for artefact alignment purposes. It is
recommended that the alignment method used be consistent with the procedures used for the artefact
calibration.
The manufacturer should clearly specify on the data sheet the imaging probing configuration that will be used
for all tests. If the manufacturer does not specify the imaging probing configuration, the user is free to choose
the configuration from any components supplied with the CMM.
For all tests, the probing system shall be set up and qualified in accordance with the manufacturer's normal
procedures (see 5.2). All probing system qualifications shall be performed using the artefact supplied by the
manufacturer for probe qualifications in the normal use of the CMM and shall not make use of any test artefact
or other artefacts.
NOTE Changing the imaging probing system or me
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