IEC PAS 61340-5-6:2022

IEC PAS 61340-5-6 ®
Edition 1.0 2022-06
PUBLICLY AVAILABLE
SPECIFICATION
colour
inside
Electrostatics –
Part 5-6: Protection of electronic devices from electrostatic phenomena –
Process assessment techniques
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IEC PAS 61340-5-6 ®
Edition 1.0 2022-06
PUBLICLY AVAILABLE
SPECIFICATION
colour
inside
Electrostatics –
Part 5-6: Protection of electronic devices from electrostatic phenomena –

Process assessment techniques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 17.220.99; 29.020 ISBN 978-2-8322-3943-8

– 2 – IEC PAS 61340-5-6:2022 © IEC 2022

CONTENTS
FOREWORD . 4
1.0 PURPOSE, SCOPE, LIMITATION, and EXPERIENCE LEVEL REQUIRED . 9
1.1 Purpose . 9
1.2 Scope . 9
1.3 Limitation . 9
1.4 Experience Level Required . 9
2.0 ReferenceD PUBLICATIONS . 9
3.0 DEFINITIONS . 10
4.0 Personnel Safety . 10
5.0 Measurement Techniques FOR ESd Risk Assessment . 10
6.0 ESD Robustness of ESDS ITEMS used in Processes . 12
6.1 ESD Withstand Currents of Single Devices (Components) . 13
6.1.1 Human Body Model . 13
6.1.2 Discharge of Charged Conductors . 13
6.1.3 Charged Device Model . 14
6.2 ESD Withstand Currents of Electronic Assemblies . 14
6.2.1 Discharge of Charged Personnel . 14
6.2.2 Discharge of Charged Conductors . 14
6.2.3 Discharge of Boards/Systems . 15
7.0 Process Assessment Flow . 15
7.1 General Considerations . 15
7.2 Manual Handling Steps . 16
7.2.1 Introduction . 16
7.2.2 Parameter Limits for ESD Process Assessment in Manual Handling Steps . 16
7.2.3 Detailed ESD Risk Assessment Flow . 17
7.3 Conductors . 18
7.3.1 Introduction . 18
7.3.2 Parameter Limits for Process Assessment of Conductors . 19
7.3.3 Detailed ESD Risk Assessment Flow . 19
7.4 Charged ESDS Items . 20
7.4.1 Introduction . 20
7.4.2 Parameter Limits for Process Assessment of Charged ESDS Items . 20
7.4.3 Detailed ESD Risk Assessment Flow . 21
7.5 Risks Due to Process-Required Insulators . 23
7.5.1 Introduction . 23
7.5.2 Parameter Limits for Process Assessment of Process-Required Insulators . 23
7.5.3 Detailed ESD Risk Assessment Flow . 24
7.6 Process Assessment by ESD Event Detection . 25
7.6.1 Introduction . 25

7.6.2 General Procedure . 26
7.6.3 Detailed ESD Risk Assessment Flow . 26

ANNEX A (INFORMATIVE): Measurement TECHNIQUES And EQuipment . 28
A.1 General Considerations . 28
A.2 Measurements of Grounding . 28
A.3 Measurements of Electrostatic Fields . 31
A.4 Measurements of Charges . 32
A.5 Measurements of Electrostatic Voltages . 33
A.6 Measurements of Discharge Events . 37
A.7 Measurements of Discharge Currents . 39
ANNEX B (INFORMATIVE) – PREPARATION: WHAT IS NECESSARY TO .
PREPARE AN EFFECTIVE PROCESS EVALUATION? . 45
B.1 Measurement of Temperature, Humidity, and Basic Electrostatic Conditions . 45
B.2 Further Hints for Preparation . 45
ANNEX C (INFORMATIVE) – Risk Assessment and Mitigation . 46
ANNEX D (INFORMATIVE) – ExampleS for defining limits in process assessment for .
Risks Due to Charged Personnel . 47
ANNEX E (INFORMATIVE) – Example for CDM risk assessment in a .

semiconductor manufacturing line . 49
ANNEX F (INFORMATIVE) – Bibliography . 53
ANNEX g (INFORMATIVE) – revision History for ANSI/ESD Sp17.1 . 54

Table 1 – Overview of Possible Measurement Equipment Used for Different Scenarios .
to Assess ESD Risk . 11
Table 2 – Peak Current Ranges of CDM Discharges of Small and Large Verification Modules for
Oscilloscopes with a Bandwidth of 1 GHz and 6 GHz According to ANSI/ESDA/JEDEC JS-002 . 44
Table 3 – Recommended Measurement Locations During Process Assessment in Assembly .
(Pre-Assembly) of Devices . 49
Table 4 – Recommended Measurement Locations During Process Assessment in Device Testing . 50

Figure 1 – Direct (Best Correlation) and Indirect (Least Correlation) Measurements .
to Assess an ESD Risk . 12
Figure 2 – Flow to Assess ESD Risk Induced by Personnel . 18
Figure 3 – Flow to Assess the ESD Risk Induced by Conductors . 20
Figure 4 – Flow to Assess the ESD Risk Induced by Charged ESDS Items . 22
Figure 5 – Flow to Assess the ESD Risk Induced by Process-Required Insulators . 25
Figure 6 – Flow to Assess the ESD Risk by Detecting the Electromagnetic Radiation .
Using ESD Event Detectors or Antennas and Oscilloscopes . 27
Figure 7 – Examples of Current Probes . 40
Figure 8 – Example of a 4-GHz Pellegrini Target . 42
Figure 9 – Commercially Available CDM Test Head Used for Discharge Current Measurements . 43
Figure 10 – Discharge Current Measured in the Field and During Device Qualification [8] . 47
Figure 11 – Examples of Measurements During Semiconductor Assembly and Testing . 50
Figure 12 – Schematic of Possible CDM-Like Scenarios During Device Testing . 52

– 4 – IEC PAS 61340-5-6:2022 © IEC 2022

INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
ELECTROSTATICS –
Part 5-6: Protection of electronic devices from electrostatic phenomena –
Process assessment techniques
FOREWORD
1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising
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