CEN ISO/TS 80004-8:2020

SLOVENSKI STANDARD
01-februar-2021
Nadomešča:
SIST-TS CEN ISO/TS 80004-8:2015
Nanotehnologije - Slovar - 8. del: Procesi nanoproizvodnje (ISO/TS 80004-8:2020)
Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes (ISO/TS 80004-
8:2020)
Nanotechnologien - Fachwörterverzeichnis - Teil 8: Industrieller
Nanoherstellungsprozess (ISO/TS 80004-8:2020)
Nanotechnologies - Vocabulaire - Partie 8: Processus de nanofabrication (ISO/TS 80004
-8:2020)
Ta slovenski standard je istoveten z: CEN ISO/TS 80004-8:2020
ICS:
01.040.07 Naravoslovne in uporabne Natural and applied sciences
vede (Slovarji) (Vocabularies)
07.120 Nanotehnologije Nanotechnologies
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

CEN ISO/TS 80004-8
TECHNICAL SPECIFICATION
SPÉCIFICATION TECHNIQUE
December 2020
TECHNISCHE SPEZIFIKATION
ICS 01.040.07; 07.120 Supersedes CEN ISO/TS 80004-8:2015
English Version
Nanotechnologies - Vocabulary - Part 8:
Nanomanufacturing processes (ISO/TS 80004-8:2020)
Nanotechnologies - Vocabulaire - Partie 8: Processus Nanotechnologien - Fachwörterverzeichnis - Teil 8:
de nanofabrication (ISO/TS 80004-8:2020) Industrieller Nanoherstellungsprozess (ISO/TS 80004-
8:2020)
This Technical Specification (CEN/TS) was approved by CEN on 26 October 2020 for provisional application.

The period of validity of this CEN/TS is limited initially to three years. After two years the members of CEN will be requested to
submit their comments, particularly on the question whether the CEN/TS can be converted into a European Standard.

CEN members are required to announce the existence of this CEN/TS in the same way as for an EN and to make the CEN/TS
available promptly at national level in an appropriate form. It is permissible to keep conflicting national standards in force (in
parallel to the CEN/TS) until the final decision about the possible conversion of the CEN/TS into an EN is reached.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2020 CEN All rights of exploitation in any form and by any means reserved Ref. No. CEN ISO/TS 80004-8:2020 E
worldwide for CEN national Members.

Contents Page
European foreword . 3

European foreword
This document (CEN ISO/TS 80004-8:2020) has been prepared by Technical Committee ISO/TC 229
"Nanotechnologies" in collaboration with Technical Committee CEN/TC 352 “Nanotechnologies” the
secretariat of which is held by AFNOR.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes CEN ISO/TS 80004-8:2015.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to announce this Technical Specification: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and the
United Kingdom.
Endorsement notice
The text of ISO/TS 80004-8:2020 has been approved by CEN as CEN ISO/TS 80004-8:2020 without any
modification.
TECHNICAL ISO/TS
SPECIFICATION 80004-8
Second edition
2020-11
Nanotechnologies — Vocabulary —
Part 8:
Nanomanufacturing processes
Nanotechnologies — Vocabulaire —
Partie 8: Processus de nanofabrication
Reference number
ISO/TS 80004-8:2020(E)
©
ISO 2020
ISO/TS 80004-8:2020(E)
© ISO 2020
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
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Email: copyright@iso.org
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Published in Switzerland
ii © ISO 2020 – All rights reserved

ISO/TS 80004-8:2020(E)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Terms related to general aspects . 3
5 Terms related to directed assembly . 4
6 Terms related to self-assembly processes . 5
7 Terms related to synthesis . 6
7.1 Gas process phase — Physical methods . 6
7.2 Gas process phase — Chemical methods . 7
7.2.1 Flame synthesis processes . 7
7.2.2 Other terms . 8
7.3 Liquid process phase — Physical methods . 8
7.4 Liquid process phase — Chemical methods . 9
7.5 Solid process phase — Physical methods .10
7.6 Solid process phase — Chemical methods .12
8 Terms related to fabrication .12
8.1 Nanopatterning lithography .12
8.2 Deposition processes .16
8.3 Etching processes .18
8.4 Printing and coating .21
Annex A (informative) Identification of output resulting from defined synthesis processes .22
Bibliography .25
Index .26
ISO/TS 80004-8:2020(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www .iso .org/ patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and
expressions related to conformity assessment, as well as information about ISO’s adherence to the
World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/
iso/ foreword .html.
This document was prepared jointly by Technical Committee ISO/TC 229, Nanotechnologies, and
Technical Committee IEC/TC 113, Nanotechnology for electrotechnical products and systems, in
collaboration with the European Committee for Standardization (CEN) Technical Committee CEN/
TC 352, Nanotechnologies, in accordance with the Agreement on technical cooperation between ISO and
CEN (Vienna Agreement). The draft was circulated for voting to the national bodies of both ISO and IEC.
This second edition cancels and replaces the first edition (ISO/TS 80004-8:2013), which has been
technically revised throughout.
A list of all parts in the ISO/TS 80004 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2020 – All rights reserved

ISO/TS 80004-8:2020(E)
Introduction
Nanomanufacturing is the essential bridge between the discoveries of the nanosciences and real-world
nanotechnology products.
Advancing nanotechnology from the laboratory into volume production ultimately requires careful
study of manufacturing process issues including product design, reliability and quality, process design
and control, shop floor operations, supply chain management, workplace safety and health practices
during the production, use and handling of nanomaterials. Nanomanufacturing encompasses directed
self-assembly and assembly techniques, synthetic methodologies, and fabrication processes such as
lithography and biological processes. Nanomanufacturing also includes bottom-up directed assembly,
top-down high-resolution processing, molecular systems engineering and hierarchical integration with
larger scale systems. As dimensional scales of materials and molecular systems approach the nanoscale,
the conventional rules governing their behaviour may change significantly. As such, the behaviour of a
final product is enabled by the collective performance of its nanoscale building blocks.
Biological process terms are not included in this second
...